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Method for preparing vaporized reactants for chemical vapor deposition 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C03C-017/245
출원번호 US-0591121 (1990-10-04)
발명자 / 주소
  • Soubeyrand Michel J. (Perrysburg OH) McCurdy Richard J. (Toledo OH)
출원인 / 주소
  • Libbey-Owens-Ford Co. (Toledo OH 02)
인용정보 피인용 횟수 : 60  인용 특허 : 0

초록 ▼

Vaporized reactants, useful for chemical vapor deposition of a coating on the surface of a hot substrate, are prepared by initially heating a liquid coating precursor, injecting the liquid coating precursor into a vaporization chamber, simultaneously admitting a blend gas into the vaporization chamb

대표청구항 ▼

A process for preparing vaporized reactants, comprising the steps of: A) providing a coating precursor selected from metal or silicon compounds at a temperature above its melting point but substantially below its standard vaporization temperature, thereby causing the coating precursor to be in the f

이 특허를 인용한 특허 (60)

  1. Gealy, Dan; Weimer, Ronald A., Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers.
    상세보기
  2. Carpenter,Craig M.; Mardian,Allen P.; Dando,Ross S.; Tschepen,Kimberly R.; Derderian,Garo J., Apparatus and method for depositing materials onto microelectronic workpieces.
    상세보기
  3. Mardian, Allen P.; Rodriguez, Santiago R., Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes.
    상세보기
  4. Derderian,Garo J., Apparatus and methods for plasma vapor deposition processes.
    상세보기
  5. Carpenter,Craig M.; Dando,Ross S.; Mardian,Allen P., Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces.
    상세보기
  6. Tasaki Yuzo,JPX ; Sato Mamoru,JPX ; Yoshizawa Shuji,JPX, CVD precursors and film preparation method using the same.
    상세보기
  7. Tasaki Yuzo,JPX ; Sato Mamoru,JPX ; Yoshizawa Shuji,JPX, CVD precursors and film preparation method using the same.
    상세보기
  8. Donald L. Westmoreland ; Gurtej S. Sandhu, Chemical vapor deposition apparatus with liquid feed.
    상세보기
  9. Dye,David Forrest; Ackerman,John Frederick; Gupta,Bhupendra Kumar; Pinson,Jennifer Ann; Pothier,Brian Thomas; Reynolds,Anthony Wayne, Coating system and process and apparatus for depositing a coating system.
    상세보기
  10. Krisko,Annette J.; Hartig,Klaus, Graded photocatalytic coatings.
    상세보기
  11. Westmoreland,Donald L.; Sandhu,Gurtej S., High efficiency method for performing a chemical vapordeposition utilizing a nonvolatile precursor.
    상세보기
  12. O'Shaughnessy, Roger D.; Krisko, Annette J.; Hartig, Klaus, Hydrophilic surfaces carrying temporary protective covers.
    상세보기
  13. O'Shaughnessy,Roger D.; Krisko,Annette J.; Hartig,Klaus, Hydrophilic surfaces carrying temporary protective covers.
    상세보기
  14. Larkin William Albert, Liquid methyltin halide compositions.
    상세보기
  15. Abrams, Michael B.; Korotkov, Roman Y.; Silverman, Gary S.; Smith, Ryan C.; Stricker, Jeffery L., Low temperature method of making a zinc oxide coated article and the coated article made thereby.
    상세보기
  16. Krisko, Annette J.; Bond, Bob; Stanek, Roger; Pfaff, Gary; Hartig, Klaus, Low-emissivity, soil-resistant coating for glass surfaces.
    상세보기
  17. Myli, Kari B.; Krisko, Annette J.; German, John R.; Hartig, Klaus, Low-maintenance coating technology.
    상세보기
  18. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James E., Low-maintenance coatings.
    상세보기
  19. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James E., Low-maintenance coatings.
    상세보기
  20. Krisko, Annette J.; Myli, Kari; Pfaff, Gary L.; Brownlee, James, Low-maintenance coatings.
    상세보기
  21. Krisko, Annette J.; Myli, Kari; Pfaff, Gary L.; Brownlee, James, Low-maintenance coatings.
    상세보기
  22. Myli, Kari B.; Krisko, Annette J.; Brownlee, James E.; Pfaff, Gary L., Low-maintenance coatings, and methods for producing low-maintenance coatings.
    상세보기
  23. Hidetoshi Saitoh JP; Shigeo Ohshio JP; Norio Tanaka JP; Hideki Sunayama JP, Material having titanium dioxide crystalline orientation film and method for producing the same.
    상세보기
  24. Nelson, Douglas M., Method and apparatus for preparing vaporized reactants for chemical vapor deposition.
    상세보기
  25. Senateur Jean-Pierre,FRX ; Madar Roland,FRX ; Weiss Francois,FRX ; Thomas Olivier,FRX ; Abrutis Adulfas,FRX, Method and device for introducing precursors into chamber for chemical vapor deposition.
    상세보기
  26. Baumann, Peter; Lindner, Johannes, Method for self-limiting deposition of one or more monolayers.
    상세보기
  27. Alasti Perry, Method for the concentration and separation of sterols.
    상세보기
  28. Galante, Marco; Arimondi, Marco; Roba, Giacomo Stefano; Santi, Ilenia, Method for vaporizing a liquid reactant in manufacturing a glass preform.
    상세보기
  29. McCurdy Richard J. ; Strickler David A. ; Sanderson Kevin D.,GBX, Method of coating flat glass with indium oxide.
    상세보기
  30. Williams Richard R. (Wilmington NC), Method of providing vaporized halide-free, silicon-containing compounds.
    상세보기
  31. Kyu Hong Lee KR, Method of vaporizing liquid sources and apparatus therefor.
    상세보기
  32. Zheng,Lingyi A.; Doan,Trung T.; Breiner,Lyle D.; Ping,Er Xuan; Beaman,Kevin L.; Weimer,Ronald A.; Kubista,David J.; Basceri,Cem, Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces.
    상세보기
  33. Beaman,Kevin L.; Weimer,Ronald A.; Breiner,Lyle D.; Ping,Er Xuan; Doan,Trung T.; Basceri,Cem; Kubista,David J.; Zheng,Lingyi A., Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers.
    상세보기
  34. Carpenter,Craig M.; Dando,Ross S.; Gealy,Dan; Derderian,Garo J.; Mardian,Allen P., Methods and apparatus for vapor processing of micro-device workpieces.
    상세보기
  35. Krisko,Annette J.; Bond,Bob; Stanek,Roger; Pfaff,Gary; Hartig,Klaus, Methods and apparatuses for depositing film on both sides of a pane.
    상세보기
  36. Myli, Kari; Pfaff, Gary; Brownlee, James; German, John; Krisko, Annette; Hartig, Klaus, Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films.
    상세보기
  37. Beaman, Kevin L.; Doan, Trung T.; Breiner, Lyle D.; Weimer, Ronald A.; Ping, Er-Xuan; Kubista, David J.; Basceri, Cem; Zheng, Lingyi A., Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition.
    상세보기
  38. Beaman, Kevin L.; Doan, Trung T.; Breiner, Lyle D.; Weimer, Ronald A.; Ping, Er-Xuan; Kubista, David J.; Basceri, Cem; Zheng, Lingyi A., Methods and systems for controlling temperature during microfeature workpiece processing, E.G., CVD deposition.
    상세보기
  39. Beaman,Kevin L.; Doan,Trung T.; Breiner,Lyle D.; Weimer,Ronald A.; Ping,Er Xuan; Kubista,David J.; Basceri,Cem; Zheng,Lingyi A., Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition.
    상세보기
  40. Carpenter,Craig M.; Dynka,Danny, Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers.
    상세보기
  41. Dando, Ross S.; Gealy, Dan, Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces.
    상세보기
  42. Dando, Ross S.; Gealy, Dan, Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces.
    상세보기
  43. Basceri,Cem; Doan,Trung T.; Weimer,Ronald A.; Beaman,Kevin L.; Breiner,Lyle D.; Zheng,Lingyi A.; Ping,Er Xuan; Sarigiannis,Demetrius; Kubista,David J., Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces.
    상세보기
  44. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James, Opposed functional coatings having comparable single surface reflectances.
    상세보기
  45. Carpenter,Craig M.; Dando,Ross S.; Dynka,Danny, Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces.
    상세보기
  46. Dando, Ross S., Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces.
    상세보기
  47. Miller, Matthew W.; Basceri, Cem, Reactors, systems and methods for depositing thin films onto microfeature workpieces.
    상세보기
  48. Krisko, Annette J.; Bond, Bob; Stanek, Roger; Pfaff, Gary; Hartig, Klaus, Soil-resistant coating for glass surfaces.
    상세보기
  49. Krisko, Annette J.; Hartig, Klaus; O'Shaughnessy, Roger D., Soil-resistant coating for glass surfaces.
    상세보기
  50. Krisko, Annette; Hartig, Klaus; O'Shaughnessy, Roger D., Soil-resistant coating for glass surfaces.
    상세보기
  51. Krisko,Annette J.; Bond,Bob; Stanek,Roger; Pfaff,Gary; Hartig,Klaus, Soil-resistant coating for glass surfaces.
    상세보기
  52. Brabender, Dennis M; Kokoschke, Jeffrey L, Sputtering apparatus including target mounting and control.
    상세보기
  53. Sarigiannis,Demetrius; Meng,Shuang; Derderian,Garo J., Systems and methods for depositing material onto microfeature workpieces in reaction chambers.
    상세보기
  54. Lyons, Christopher S.; Engle, Kent T.; Vanhoose, Steven R.; Spawn, Terence D.; Pieper, Joseph M.; Anderson, Edward J.; Stoss, Walter, Systems and methods for processing vapor.
    상세보기
  55. O'Shaughnessy, Roger D.; Krisko, Annette J.; Hartig, Klaus, Temporary protective covers.
    상세보기
  56. Poshusta, Joseph C.; Bruinsma, Douwe, Thin film vaporizer.
    상세보기
  57. Lyons Christopher S. ; Ruta Constantin I. ; Fleming Robert J. ; Blette Russell E., Vapor coating apparatus.
    상세보기
  58. Lyons Christopher S. ; Ruta Constantin I. ; Fleming Robert J. ; Blette Russell E. ; Wright Robin E. ; Tokie Jeffrey H., Vapor coating method.
    상세보기
  59. Gahan, Richard E.; Choi, Wai Ming, Vapor deposition treated electret filter media.
    상세보기
  60. Wang Yuchun, Vapor phase deposition.
    상세보기

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