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Capacitance type accelerometer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/283
출원번호 US-0429546 (1989-10-31)
우선권정보 JP-0286714 (1988-11-15)
발명자 / 주소
  • Suzuki Seiko (Hitachioota JPX) Tsuchitani Shigeki (Mito JPX) Miki Masayuki (Katsuta JPX) Matsumoto Masahiro (Hitachi JPX)
출원인 / 주소
  • Hitachi, Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 76  인용 특허 : 0

초록 ▼

A capacitance type accelerometer, having a fist silicon plate formed a movable electrode which is moved according to acceleration, two second silicon plates which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films which are respectively

대표청구항 ▼

A capacitance type accelerometer, having: a silicon plate including a portion formed as a movable electrode which is moved according to acceleration; glass plates respectively mounting a conductive layer thereon which are opposite to the silicon plate with a certain separation distance and are conne

이 특허를 인용한 특허 (76)

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  8. Johnson, Burgess R.; Supino, Ryan, All-silicon electrode capacitive transducer on a glass substrate.
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  11. Torregrosa Michel (Beaumont les Valence FRX), Capacitive accelerometer with a circuit for correcting stray capacitance perturbations.
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  18. Koyama, Mitsuaki; Mutoh, Takeru; Iwai, Hiroki; Ichikawa, Ryoichi, External force detection apparatus and external force detection sensor.
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  20. Okada,Kazuhiro, Force detector and acceleration detector and method of manufacturing the same.
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  21. Potter, Michael D., High temperature embedded charge devices and methods thereof.
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  26. Potter,Michael D., Method for non-damaging charge injection and a system thereof.
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  28. Silverbrook,Kia, Method of fabricating an array of wafer scale polymeric caps.
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  30. Bergstedt, Leif; Andersson, Gert; Ottosson, Britta, Method relating to anodic bonding.
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  31. Potter,Michael D., Methods for distributed electrode injection.
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  32. Potter,Michael D., Micro fluidic valves, agitators, and pumps and methods thereof.
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  33. Potter,Michael D., Micro-electro-mechanical switch and a method of using and making thereof.
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  34. Bowers, John Edward; Helkey, Roger Jonathan; Corbalis, Charles; Sink, Robert Kehl; Lee, Seung Bok; MacDonald, Noel, Micro-electro-mechanical-system (MEMS) mirror device and methods for fabricating the same.
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  35. Lee, Seung Bok; MacDonald, Noel, Micro-electro-mechanical-system (MEMS) mirror device having large angle out of plane motion using shaped combed finger actuators and method for fabricating the same.
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  36. Mark A. Lemkin ; Allen W. Roessig ; Thor Juneau ; William A. Clark, Micro-machined accelerometer with improved transfer characteristics.
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  38. Shaw Kevin A. (Ithaca NY) Adams Scott G. (Ithaca NY) MacDonald Noel C. (Ithaca NY), Microelectromechanical lateral accelerometer.
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  47. Adams Scott G. ; Wang Yongmei Cindy ; Macdonald Noel C. ; Thorp James S., Multistable tunable micromechanical resonators.
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  48. Kamisuki, Shinichi, Physical quantity sensor and electronic apparatus.
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  50. Lemkin, Mark A.; Juneau, Thor N.; Clark, William A.; Roessig, Allen W., Position sensing with improved linearity.
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  54. Ueyanagi Katsumichi,JPX, Semiconductor acceleration sensor and testing method thereof.
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  68. Choi, Sang J., Shock sensor by variable capacitor.
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  69. Matsumoto, Masahiro; Suzuki, Seikou; Miki, Masayuki, Structure for mounting components.
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  71. Fawcett John Neville,GBX, Transducer.
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  72. Silverbrook,Kia, Two part mold for wafer scale caps.
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  73. Hopkins, Andrew David, Ultrasound probe with accelerometer.
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  74. Silverbrook, Kia, Wafer scale caps located by molding.
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  75. Silverbrook, Kia, Wafer scale molding of protective caps.
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  76. Edmans Daniel M. ; Gutierrez Adolfo ; Cormeau Christopher ; Maby Edward, Wideband vibration sensor.
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