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SOI/semiconductor heterostructure fabrication by wafer bonding of polysilicon to titanium 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/20
  • H01L-021/76
출원번호 US-0633647 (1990-12-20)
발명자 / 주소
  • Moslehi Mehrdad M. (Dallas TX)
출원인 / 주소
  • Texas Instruments Incorporated (Dallas TX 02)
인용정보 피인용 횟수 : 65  인용 특허 : 0

초록 ▼

This is a method of forming a semiconductor-on-insulator wafer from two individual wafers. The method comprises: forming a layer of metal (e.g. titanium 24) on a first wafer; forming an insulator (e.g. oxide 32) on a second wafer; forming a bonding layer (e.g. poly 38) over the insulator; anisotropi

대표청구항 ▼

A method of forming a semiconductor-on-insulator wafer from two individual wafers; said method comprising: a. forming a layer of metal on a first wafer; b. forming an insulator on a second wafer; c. forming a bonding layer over said insulator; d. anisotropically etching said bonding layer to form ch

이 특허를 인용한 특허 (65)

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  21. Kitch, Vassili, Fabrication of copper-containing region such as electrical interconnect.
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  22. Tang, Sanh D.; Zahurak, John K.; Juengling, Werner, Floating body cell structures, devices including same, and methods for forming same.
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  26. Henley, Francois J.; Cheung, Nathan W., Gettering technique for wafers made using a controlled cleaving process.
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  27. Henley, Francois J.; Cheung, Nathan W., Gettering technique for wafers made using a controlled cleaving process.
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  28. Henley, Francois J., Layer transfer of films utilizing controlled propagation.
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  29. Henley, Francois J., Layer transfer of films utilizing controlled shear region.
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  30. Tang, Sanh D., Memory cells, memory arrays, methods of forming memory cells, and methods of forming a shared doped semiconductor region of a vertically oriented thyristor and a vertically oriented access transistor.
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  32. Ohmi, Kazuaki; Yonehara, Takao; Sakaguchi, Kiyofumi; Yanagita, Kazutaka, Method and apparatus for separating composite member using fluid.
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  36. Henley, Francois J., Method and structure for fabricating solar cells using a thick layer transfer process.
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