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Self-testable micro-accelerometer and method

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01P-021/02
출원번호 US-0370364 (1989-06-22)
발명자 / 주소
  • Allen Henry V. (Fremont CA) Terry Stephen C. (Palo Alto CA) De Bruin Diederik W. (Santa Clara CA)
출원인 / 주소
  • IC Sensors, Inc. (Milpitas CA 02)
인용정보 피인용 횟수 : 36  인용 특허 : 0

초록

An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capaci

대표청구항

A self-testable accelerometer comprising a housing; a diaphragm mounted in said housing movable relative to said housing in response to an applied force, said diaphragm including a conductive mass formed on said diaphragm; at least one capacitive plate attached to said housing and disposed such that

이 특허를 인용한 특허 (36)

  1. Hanisko John Cyril P. ; Munch Carl A., Apparatus and method for testing an acceleration sensor.
  2. Okada,Kazuhiro, Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing the apparatus.
  3. Kazuhiro Okada JP, Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus.
  4. Okada, Kazuhiro, Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus.
  5. Okada, Kazuhiro, Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus.
  6. Kaiser William J. (Los Angeles CA) Pister Kristofer S. J. (Pacific Palisades CA) Stafsudd Oscar M. (Los Angeles CA) Nelson Phyllis R. (Mar Vista CA) Burstein Amit (N. Hollywood CA), CMOS integrated microsensor with a precision measurement circuit.
  7. Homeijer, Brian D.; Bicknell, Robert Newton, Calibration of MEMS sensor.
  8. Ayazi, Farrokh; Amini, Babak Vakili; Abdolvand, Reza, Capacitive microaccelerometers and fabrication methods.
  9. Hayakawa,Junji; Kitao,Norio; Umemura,Akinobu; Ito,Hirokazu; Kawai,Takaaki, Capacitive physical quantity sensor.
  10. Weber ; Jr. Gerard Vincent, Charged mass thin film condenser accelerometer.
  11. Stewart, Robert E.; Bulatowicz, Michael D., Dynamic self-calibration of an accelerometer system.
  12. Hanisko John Cyril P. ; Munch Carl A., Method and apparatus for detecting operational failure of a digital accelerometer.
  13. Hanisko John Cyril P. (Southfield MI), Method and apparatus for trimming gain of an accelerometer.
  14. Chau,Kevin H. L.; Samuels,Howard R., Method for calibrating accelerometer sensitivity.
  15. Ueyanagi Katsumichi,JPX, Method for making a semiconductor acceleration sensor.
  16. Lehtonen, Tuomo; Mourujärvi, Risto; Salo, Teemu; Thurau, Jens, Method for the mircomechanical measurement of acceleration and a micromechanical acceleration sensor.
  17. Okada Kazuhiro,JPX, Method of manufacturing a sensor detecting a physical action as an applied force.
  18. Okada, Kazuhiro, Method of testing a sensor.
  19. Tsang Robert W. K. (Bedford MA) Core Theresa A. (North Andover MA), Methods for fabricating monolithic device containing circuitry and suspended microstructure.
  20. Galvin Gregory J. ; Davis Timothy J. ; MacDonald Noel C., Microelectromechanical accelerometer for automotive applications.
  21. MacDonald Noel C. ; Shaw Kevin A. ; Adams Scott G., Micromechanical accelerometer for automotive applications.
  22. Mader Gerhard,DEX ; Noetzel Jens,DEX ; Schulze Steffen,DEX, Micromechanical sensor unit for detecting acceleration.
  23. Arms, Steven W.; Townsend, Christopher P., Miniaturized inclinometer for angle measurement with accurate measurement indicator.
  24. Tsang Robert W. K. ; Core Theresa A. ; Sherman Steven J. ; Brokaw A. Paul, Monolithic micromechanical apparatus with suspended microstructure.
  25. Tsang Robert W. K. ; Core Theresa A. ; Sherman Steven J. ; Brokaw A. Paul, Monolithic micromechanical apparatus with suspended microstructure.
  26. Clark, Jason, Performance improvement of MEMS devices.
  27. Ueyanagi Katsumichi (Kawasaki JPX), Semiconductor acceleration sensor and testing method thereof.
  28. Ueyanagi Katsumichi,JPX, Semiconductor acceleration sensor and testing method thereof.
  29. Schalk, Josef; Stenzel, Erwin; Bauer, Karin; Freitag, Rainer; Hilser, Roland; Voss, Ralf; Aikele, Matthias; Seidel, Helmut; Prechtel, Ulrich, Sensor having a resonance structure, especially an acceleration or rotation rate sensor, and a device for carrying out a self-test.
  30. Samuels, Howard, Sensor self-test transfer standard.
  31. Samuels, Howard, Sensor self-test transfer standard.
  32. Delorme, Nicolas; Condemine, Cyril; Belleville, Marc, Test method for a variable capacitance measuring system.
  33. Okada, Kazuhiro, Testing sensor.
  34. Mehregany, Mehran, Three-axis accelerometers and fabrication methods.
  35. Mehregany, Mehran, Three-axis accelerometers and fabrication methods.
  36. Kenny,Thomas W.; Park,Woo Tae, Ultra-miniature accelerometers.
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