|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||137/62533 ; 251/325 ; 417/42314|
|발명자 / 주소|
|출원인 / 주소|
|인용정보||피인용 횟수 : 5 인용 특허 : 0|
A valve arrangement comprises a stationary tubular wall with a cover plate defining a housing and an opening in the wall. A second coaxial tubular wall or valve element acts as a closure element for closing the opening with seals acting through axial displacement relative to the stationary wall. This allows for a very compact construction with simultaneous good flow conditions. The valve arrangement can also be directly integrated into a pump housing whereby the use of available space is further improved. The low force expenditure for the closing operati...
A high vacuum pump and valve arrangement, comprising: a vacuum pump having a pumping element (12); a valve housing surrounding said pumping element and having, an axially extending tubular wall (1) and a radially extending cover plate (13) with a first ring-shaped sealing surface facing axially only, said tubular wall having a second ring-shaped sealing surface spaced axially from said first sealing surface, said second sealing surface facing axially only, said housing having at least one opening (5) extending radially through said tubular wall at a loca...