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Wafer carrier 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65D-085/48
출원번호 US-0620274 (1990-11-30)
발명자 / 주소
  • Kos Robert D. (Victoria MN)
출원인 / 주소
  • Fluoroware (Chaska MN 02)
인용정보 피인용 횟수 : 38  인용 특허 : 0

초록

A moldable plastic carrier for predictably and steadfastly locating the carrier and wafers therein upon wafer transfer equipment has an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and support

대표청구항

A molded plastic carrier for wafers, the carrier being indexable upon a flat platform of wafer transfer equipment with indexing webbing on the platform, having an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetw

이 특허를 인용한 특허 (38)

  1. Schauer, Ronald Vern; Lappen, Alan Rick, Apparatus for alignment of automated workpiece handling systems.
  2. Buitron, Gerardo; Luu, Thuan; Okamoto, Barry, Apparatus for combining or separating disk pairs simultaneously.
  3. Buitron,Gerardo; Luu,Thuan; Okamoto,Barry, Apparatus for combining or separating disk pairs simultaneously.
  4. Kim Young Su,KRX ; Park Sun Im,KRX, Apparatus for packing liquid crystal display modules.
  5. Crofton, Walter; Wypych, Andrew, Apparatus for simultaneous two-disk scrubbing and washing.
  6. Crofton,Walter; Newman,David; Ta,Nghia, Automated merge nest for pairs of magnetic storage disks.
  7. Iwamoto, Yoshio; Kurokawa, Hiroyuki, Carrier for cleaning silicon wafers.
  8. Buitron, Gerardo; Crofton, Walter; Newman, David, Cassette for holding disks of different diameters.
  9. Lee, Hsin-Ho, Clamping apparatus for washing optical members.
  10. Bhatt, Sanjiv M.; Eggum, Shawn D., Composite substrate carrier.
  11. Bhatt,Sanjiv M.; Eggum,Shawn D., Composite substrate carrier.
  12. Bhatt Sanjiv M. ; Eggum Shawn D. ; Olson Wayne C., Composite transport carrier.
  13. Luu, Thuan; Crofton, Walter; Liu, Bill; Spaulding, David; Kim, Kwang Kon, Disk burnishing device.
  14. Kenichi Nakabeppu JP, Drying apparatus and method.
  15. Grow,John; Kim,Kwang Kon; Palmer,Dan, Dual disk transport mechanism processing two disks tilted toward each other.
  16. Jeff Mendiola, Electronic device workpiece carriers.
  17. Kim,Kwang Kon; Clasara,Ramon; Peabody,Charles F., Information-storage media with dissimilar outer diameter and/or inner diameter chamfer designs on two sides.
  18. Luu, Thuan; Crofton, Walter; Liu, Bill; Spaulding, David; Kim, Kwang Kon, Magnetic disk with uniform lubricant thickness distribution.
  19. Allen, Joseph, Manufacturing single-sided storage media.
  20. Hachtmann,Bruce, Memory disk shipping container with improved contaminant control.
  21. Schauer,Ronald Vern; Lappen,Alan Rick; Tuttle,David L., Method and apparatus for aligning a cassette.
  22. Buitron,Gerardo; Crofton,Walter; Hachtmann,Bruce; Newman,David, Method for manufacturing single-sided hard memory disks.
  23. Kim,Kwang Kon; Clasara,Ramon, Method for manufacturing single-sided sputtered magnetic recording disks.
  24. Kim, Kwang Kon; Clasara, Ramon, Method for producing single-sided sputtered magnetic recording disks.
  25. Valeri,Thomas M., Method for servo pattern application on single-side processed disks in a merged state.
  26. Buitron,Gerardo; Crofton,Walter; Okamoto,Barry; Sagen,Lynnette A.; Ta,Nghia, Method for simultaneous two-disk texturing.
  27. Buitron,Gerardo; Cheng,Peter; Crofton,Walter; Kim,Kwang Kon; Maida,William; Newman,David, Method of lubricating multiple magnetic storage disks in close proximity.
  28. Buitron, Gerardo, Method of merging two disks concentrically without gap between disks.
  29. Buitron,Gerardo; Gapay,Clarence; Grow,John; Hachtmann,Bruce; Kim,Kwang Kon; Nguyen,Huan; O'Hare,Tom, Method of simultaneous two-disk processing of single-sided magnetic recording disks.
  30. Mendiola Jeff, Methods of processing electronic device workpieces and methods of positioning electronic device workpieces within a workpiece carrier.
  31. Jeff Mendiola, Methods of processing semiconductor wafers, methods of supporting a plurality of semiconductor wafers, methods of processing electronic device workpieces and methods of orienting electronic device wo.
  32. Mendiola Jeff, Off center three point carrier for wet processing semiconductor substrates.
  33. Bhatt, Sanjiv M.; Eggum, Shawn D., Process for fabricating composite substrate carrier.
  34. Peterson Kelly ; Wiseman Brian ; Gallagher Gary ; Gregerson Barry, Shipping and transport cassette with kinematic coupling.
  35. Kim,Kwang Kon; Clasara,Ramon, Single-sided sputtered magnetic recording disks.
  36. Kakizaki Takeyoshi,JPX ; Hyobu Yukihiro,JPX, Thin-plate supporting container.
  37. Lappen, Alan Rick, Variable method and apparatus for alignment of automated workpiece handling systems.
  38. Buitron, Gerardo; Grow, John, W-patterned tools for transporting/handling pairs of disks.
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