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Carbon dioxide snow agglomeration and acceleration

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B08B-007/00
출원번호 US-0548323 (1990-07-02)
발명자 / 주소
  • Swain Eugene A. (Webster NY) Carter Stephen R. (Tucson AZ) Hoenig Stuart A. (Tucson AZ)
출원인 / 주소
  • Xerox Corporation (Stamford CT 02)
인용정보 피인용 횟수 : 47  인용 특허 : 0

초록

A cleaning process involving expanding carbon dioxide from an orifice into a thermally insulated chamber to form small carbon dioxide particles, retaining the small carbon dioxide particles in the insulating chamber until the small carbon dioxide particles agglomerate into large snowflakes, entraini

대표청구항

Apparatus for cleaning substrates comprising means to direct liquid carbon dioxide through at least one orifice having a diameter of between about 500 micrometers and about 1,000 micrometers to form a stream of carbon dioxide particles, said carbon dioxide particles comprising between about 20 perce

이 특허를 인용한 특허 (47)

  1. Rose Peter H. ; Sferlazzo Piero ; van der Heide Robert G., Aerosol surface processing.
  2. Rose Peter H. ; Sferlazzo Piero ; van der Heide Robert G., Aerosol surface processing.
  3. Brandt Werner V. ; Bowers Charles W., Apparatus for cleaning and testing precision components of hard drives and the like.
  4. Billy Courson ; John Shelburne, Apparatus for confined underwater cryogenic surface preparation.
  5. Bran,Mario E., Apparatus for megasonic processing of an article.
  6. Lammert, Michael D.; Watson, Victor J.; DiMond, John M.; Barsky, Michael E., Automated spray cleaning apparatus for semiconductor wafers.
  7. Kipp,Jens Werner, Blasting method and apparatus.
  8. Goenka Lakhi N. (Ann Arbor MI), CO2 nozzle and method for cleaning pressure-sensitive surfaces.
  9. Luo Jih-Shiuan (Sam), Capacitor coupled chuck for carbon dioxide snow cleaning system.
  10. Bishop Phillip W. ; Harrover Alexander J., Carbon dioxide cleaning process.
  11. Suh, Song-Moon; Guo, Yuanhong; Xuan, Guangchi; Agarwal, Pulkit, Cleaning of chamber components with solid carbon dioxide particles.
  12. Billy Courson ; John Shelburne, Confined underwater cryogenic surface preparation.
  13. Elbing, Felix; Rotstein, Raphael; Knackstedt, Marc, Device and process for cleaning, activation or pretreatment of work pieces by means of carbon dioxide blasting.
  14. Eliasson, Bertil; Hallberg, Per-Åke; Carlsson, Lennart; Engman, Fredrik, Device and use in connection with measure for combating.
  15. Hopf, Wilhelm; Dahlmanns, Frank; Klingel, Markus; Mattis, Aron, Device for processing component part contours.
  16. Kipp, Jens Werner, Dry ice blasting device.
  17. Okazawa, Masaki; Iwama, Hideo, Dry ice cleaning method and dry ice cleaning apparatus.
  18. Becker David Scott ; Hanestad Ronald J. ; Thomes Gregory P. ; Weygand James F. ; Zimmerman Larry D., Eliminating stiction with the use of cryogenic aerosol.
  19. Zito Richard R., High dispersion carbon dioxide snow apparatus.
  20. Talley, J. Ross; Atkins, Wyland L., Method and apparatus for washing and/or drying using a revolved coanda profile.
  21. Kipp, Jens Werner, Method and device for generating dry ice particles.
  22. Bran, Mario E., Method for megasonic processing of an article.
  23. Charles W. Bowers, Method for selective metal film layer removal using carbon dioxide jet spray.
  24. Lee, Moon-hee; Lee, Kun-tack; Shim, Woo-gwan; Chung, Jong-ho, Method of and apparatus for removing contaminants from surface of a substrate.
  25. Lee,Moon hee; Lee,Kun tack; Shim,Woo gwan; Chung,Jong ho, Method of and apparatus for removing contaminants from surface of a substrate.
  26. Bran,Mario E., Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate.
  27. Bran, Mario E., Method of manufacturing integrated circuit devices.
  28. Jackson,David P., Nozzle device and method for forming cryogenic composite fluid spray.
  29. Yoon,Cheol Nam; Ko,Se Jong, Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface.
  30. Yoon, Cheol-Nam, Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface.
  31. Yoon,Cheol Nam, Nozzle for spraying sublimable solid particles entrained in gas for cleaning surface.
  32. Bowers Charles W., Photoresist and redeposition removal using carbon dioxide jet spray.
  33. Rose Peter H. ; Sferlazzo Piero, Processing a surface.
  34. Wagener Thomas J. ; Siefering Kevin L. ; Kunkel Pamela A. ; Weygand James F. ; Thomes Gregory P., Rotatable and translatable spray nozzle.
  35. Biermann,Paul J.; Roberts,Jack C., Structure including a plurality of cells of cured resinous material, method of forming the structure and apparatus for forming the structure.
  36. Joffe Michael A, Suction device with jet boost.
  37. Albrecht, Markus; Tietze, Frank, System for coating, in particular for painting, articles, in particular vehicle bodies.
  38. Bran, Mario E., System for megasonic processing of an article.
  39. Bran,Mario E., Transducer assembly for megasonic processing of an article and apparatus utilizing the same.
  40. Karasawa Yukihiko,JPX, Transfer apparatus and transfer method for particulate material.
  41. Patrin John C. ; Heitzinger John M., Treating substrates by producing and controlling a cryogenic aerosol.
  42. Bran, Mario E., Wafer cleaning.
  43. Bran, Mario E., Wafer cleaning.
  44. Bran Mario E., Wafer cleaning method.
  45. Mario E. Bran, Wafer cleaning method.
  46. Bran Mario E., Wafer cleaning system.
  47. Bran Mario E., Wafer cleaning system.
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