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Liquid coating device 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05B-001/24
출원번호 US-0525681 (1990-05-21)
우선권정보 JP-0128194 (1989-05-22); JP-0142395 (1989-06-05)
발명자 / 주소
  • Iwatsu Haruo (Shichijo JPX) Sakamoto Yasuhiro (voth of Kumamoto JPX) Iwakiri Junro (voth of Kumamoto JPX)
출원인 / 주소
  • Tokyo Electron Limited (Tokyo JPX 03) Tokyo Electron Kyushu Limited (Kumamoto JPX 03)
인용정보 피인용 횟수 : 87  인용 특허 : 0

초록

A liquid coating device for coating a solution on a substrate to form a film includes a chuck for rotatably supporting the substrate, a nozzle for supplying the solution on the substrate, a heater provided in the nozzle for changing a temperature of the solution, a sensor for measuring a temperature

대표청구항

A liquid coating device for coating a solution on a substrate to form a film, comprising: means for supporting a substrate; means for supplying a solution on said substrate; means for rotating the supporting means with said substrate thereon; means for measuring a temperature and a humidity of an am

이 특허를 인용한 특허 (87)

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