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Spin coating apparatus 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05C-005/00
  • B05C-011/02
  • B05C-011/10
출원번호 US-0524378 (1990-05-16)
우선권정보 JP-0254796 (1989-09-29)
발명자 / 주소
  • Amada Haruo (Kamisato JPX) Kojima Akihiro (Kasugai JPX) Kagohashi Hiroshi (Kasugai JPX) Sakai Atsuyuki (Nagoya JPX) Shimura Katsumasa (Nagoya JPX) Maekawa Hisamitsu (Kasugai JPX)
출원인 / 주소
  • Hitachi, Ltd. (Tokyo JPX 03) CKD Corporation (Komaki JPX 03)
인용정보 피인용 횟수 : 81  인용 특허 : 0

초록 ▼

The present invention relates to a spin coating apparatus for feeding a clean liquid at a fixed rate. In any of the feeding apparatus in the prior art, no constituent other than a filter has the function of eliminating foreign matter, and the operation of feeding a liquid under precise control is no

대표청구항 ▼

An apparatus for spin-coating a flat object with a viscous coating liquid, comprising: (a) dispenser means having a diaphragm pump for sucking the coating liquid from a liquid source and for discharging and dropping the sucked liquid in a constant amount and at a constant speed from a discharge nozz

이 특허를 인용한 특허 (81)

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