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특허 상세정보

Exhaust gas cleaner

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01D-053/34    F01N-003/10   
미국특허분류(USC) 422/174 ; 422/169 ; 422/171 ; 422/173
출원번호 US-0560556 (1990-07-31)
우선권정보 JP-0199659 (1989-08-01); JP-0105021 (1990-04-20); JP-0105022 (1990-04-20)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 36  인용 특허 : 0
초록

An exhaust gas cleaner comprising (a) at least one filter made of a heat-resistant and electrically insulating material for trapping floating fine particles in an exhaust gas; and (b) at least a pair of electrodes stacked with the filter alternately, voltage being applied between the adjacent electrodes to burn electrically conductive and burnable fine particles trapped in the filter by heat generated by a current flowing between the adjacent electrodes, and the direction of the flow of the exhaust gas in the filter being essentially parallel to that of ...

대표
청구항

An exhaust gas cleaner comprising: (a) at least one planar filter element for trapping particulate matter in an exhaust gas, said filter element being made of a heat-resistant and electrically insulating material and having a hole therein; (b) at least a pair of planar electrodes each having substantially the same shape and area as said filter element and having a hole therein of the same size as the hole in said filter element, said electrodes being stacked alternately with said at least one filter element with the holes therein in alignment so as to de...

이 특허를 인용한 특허 피인용횟수: 36

  1. Livingston, Darren; Gu, Youfan; Dozoretz, Paul; Mueller, James M.. Acceleration assisted particle/gas separation system. USP2003056562109.
  2. Foster,Michael R.; Li,Robert X.; Nelson,David E.. Apparatus and method for mat protection of non-thermal plasma reactor. USP2006077078000.
  3. Gu Youfan. Apparatus and method for removing condensable aluminum vapor from aluminum etch effluent. USP2001056238514.
  4. Li, Robert X.; Foster, Michael R.; Nelson, David E.; Turek, Alan G.. Apparatus and method for retention of non-thermal plasma reactor. USP2005056893617.
  5. Pang, Ben; Cheung, David; Taylor, Jr., William N.; Raoux, Sebastien; Fodor, Mark. Apparatus for cleaning an exhaust line in a semiconductor processing system. USP2004016680420.
  6. Paul Dozoretz ; Youfan Gu. Apparatus for controlling polymerized teos build-up in vacuum pump lines. USP2002036361607.
  7. Katsuo Suga JP; Masanori Nakamura JP. Catalyst system for purifying oxygen rich exhaust gas. USP2002056395675.
  8. Mao, Fuhe; Li, Cheng G.; Ziebarth, Robin. Catalyzed diesel soot filter and process. USP2010057713909.
  9. Heidenreich, Steffen; Roessler, Max-Eckhard; Walch, Astrid; Gutmann, Manfred; Chudzinski, Sven. Ceramic filter element. USP2013038388898.
  10. Biswas, Prantik Guha; Buczynski, Peter J.; Klobusnik, Kenneth J.. Compact filter assembly for removing oil mist and odor from an airstream. USP2015099120042.
  11. Becker Oliver (Losheim DEX) Kolz Sabine (Grossrosseln DEX) Hager Herbert (Nalbach DEX). Device for the purification of contaminated exhaust air through heterogeneous catalysis. USP1996105567392.
  12. Hirth, Peter; Hodgson, Jan; Vorsmann, Christian. Device for treating a gas stream flowing radially outwardly from a central area. USP2016109476332.
  13. McConkey James H.,GBX ITX G52 2HH. Emission filter. USP1999065912370.
  14. Muramatsu, Gyo; Abe, Akira; Yoshida, Kiyohide; Sumiya, Satoshi; Matsumura, Nobuyuki; Takahashi, Yoshikazu. Exhaust gas cleaner and method of cleaning exhaust gas. USP1994065320999.
  15. Eberle, Richard; Dewes, Markus. Filter device for purifying fluids. USP2015028961752.
  16. Fleck,Carl Maria. Filter system for spreading soot particles from a stream of exhaust gas. USP2006057041157.
  17. Gu Youfan ; Hauschultz Dana S.. Fluid cooled trap. USP1998105820641.
  18. Tsutomu Tanaka ; Chau Nguyen ; Hari Ponnekanti ; Kevin Fairbairn ; Sebastien Raoux ; Mark Fodor. Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing. USP2002036354241.
  19. Seidler, Christian; Bierbaum, Achim; Ose, Lutz. Heating device for filter elements of a particle filter and particle filter. USP2003096625392.
  20. Fennell Paul Antony Harry,GBX. In situ filter cleaning. USP1999095958242.
  21. Martin Richard J. ; Stilger John D. ; Holst Mark R. ; Young John D.,GBX ; Edgar Bradley L.. Matrix bed for generating non-planar reaction wave fronts, and method thereof. USP2001076257869.
  22. Pang Ben ; Cheung David ; Taylor ; Jr. William N. ; Raoux Sebastien ; Fodor Mark. Method and apparatus for cleaning a vacuum line in a CVD system. USP2001026194628.
  23. Pang, Ben; Cheung, David; Taylor, Jr., William N.; Raoux, Sebastion; Fodor, Mark. Method and apparatus for cleaning an exhaust line in a semiconductor processing system. USP2004026689930.
  24. Dozoretz Paul ; Gu Youfan. Method and apparatus for controlling polymerized teos build-up in vacuum pump lines. USP2001036197119.
  25. Cheung David ; Raoux Sebastien ; Huang Judy H. ; Taylor ; Jr. William N. ; Fodor Mark ; Fairbairn Kevin. Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions. USP2001026187072.
  26. Cheung, David; Raoux, Sebastien; Huang, Judy H.; Taylor, Jr., William N.; Fodor, Mark; Fairbairn, Kevin. Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions. USP2003026517913.
  27. Gu, Youfan. Method for removing condensable aluminum chloride vapor from aluminum etch effluent. USP2004096790258.
  28. Xia Li-Qun ; Pokharrna Himanshu ; Lim Tian-Hoe. Method for removing residue from substrate processing chamber exhaust line for silicon-oxygen-carbon deposition process. USP2001076255222.
  29. Richard J. Martin ; John D. Stilger ; Mark R. Holst ; John D. Young GB; Michael P. Barkdoll ; Bradley L. Edgar. Method of reducing internal combustion engine emissions, and system for same. USP2002056391267.
  30. Raoux Sebastien ; Tanaka Tsutomu ; Kelkar Mukul ; Ponnekanti Hari ; Fairbairn Kevin ; Cheung David. Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment. USP2000046045618.
  31. Michalakos,Peter M.; Tom,Robert. Ozone removal system and method for low and high temperature operation. USP2009017473402.
  32. Pang Ben ; Cheung David ; Taylor ; Jr. William N. ; Raoux Sebastien ; Fodor Mark. Parallel plate apparatus for in-situ vacuum line cleaning for substrate processing equipment. USP2001026193802.
  33. Toyoda,Tetsuro; Matsuoka,Katsunori. Particulate matter reducing apparatus. USP2009017473288.
  34. Iyer,Kartik Ganesan; Delvecchio,Kerry Allen; Costura,Joanna Louise. Particulate trap. USP2007107288137.
  35. Kolstad,Owen Charles; Iyer,Kartik Ganesan; Delvecchio,Kerry Allen; Williams,Joanna Louise. Particulate trap. USP2007017169200.
  36. Youfan Gu. Trap apparatus and method for condensable by-products of deposition reactions. USP2002126488745.