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Apparatus for testing integrated circuits 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01R-031/00
출원번호 US-0606676 (1990-10-31)
발명자 / 주소
  • Pasiecznik
  • Jr. John (Malibu CA)
출원인 / 주소
  • Hughes Aircraft Company (Los Angeles CA 02)
인용정보 피인용 횟수 : 132  인용 특허 : 0

초록 ▼

A membrane probe (10, 12, 14, 16, 58, 144) for testing integrated circuits (56,138) while still on the wafer upon which they are manufactured includes a flexible visually clear and self planarizing membrane (26) having circuit traces (20) and ground shielding planes (14), terminating resistor (152)

대표청구항 ▼

Apparatus for testing integrated circuit chips comprising: a fixture mounting plate having test circuitry connections, a gas chamber housing mounted to said fixture mounting plate, an annular circuit board carried by said fixture mounting plate and having an internal aperture receiving a portion of

이 특허를 인용한 특허 (132)

  1. Dale Buermann ; Daniel Tran, Apparatus for docking a floating test stage in a terrestrial base.
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