이 특허를 인용한 특허 (87)

1. Fischer Patrick J. (Oxford GBX), Actuator assembly.

   상세보기
2. Muka Richard S., Apparatus and method for batch thermal conditioning of substrates.

   상세보기
3. Cooper, Thomas G., Apparatus for compact counter balance arms.

   상세보기
4. Schieve, Eric W.; Lei, Lawrence Chung-Lai, Apparatus having platforms positioned for precise centering of semiconductor wafers during processing.

   상세보기
5. Tara, Fumihiro; Furukawa, Nobuyuki; Ohni, Kensuke, Arm mechanism, and vacuum robot provided with the same.

   상세보기
6. Eastman Richard H. (Needham MA) Davis ; Jr. James C. (Carlisle MA), Articulated arm transfer device.

   상세보기
7. Hofmeister Christopher, Articulated arm transfer device.

   상세보기
8. Pfeiffer,Michael W.; Johnson,Eric D., Assembly station with rotatable turret which forms and unloads a completed stack of articles.

   상세보기
9. Barnes, Michael; Cox, Michael S.; Lai, Canfeng; Parks, John, Atmospheric substrate processing apparatus for depositing multiple layers on a substrate.

   상세보기
10. Fukushima Masazumi,JPX ; Shiwaku Tamotsu,JPX, Automatic warehouse.

    상세보기
11. Minami, Hirofumi; Fujimura, Kazuhiro, Carrying mechanism, a carrying device and a vacuum processing apparatus.

    상세보기
12. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.

    상세보기
13. Cooper, Thomas G., Compact counter balanced arms.

    상세보기
14. Nakao, Hirotoshi; Nishitsuji, Muneyoshi; Yoshino, Takahiro; Kuriyama, Takuya; Chiba, Taiji; Kawakubo, Daisuke; Yamada, Kiyotaka, Drive device and conveyance device.

    상세보기
15. Blank, Richard; McLellan, Matt, Dual arm vacuum robot.

    상세보기
16. Stevens Craig L. (Felton CA), Dual coaxial magnetic couplers for vacuum chamber robot assembly.

    상세보기
17. Brown William ; Welch Michael, Dual independent robot blades with minimal offset.

    상세보기
18. Wakui Shinji,JPX, Exposure apparatus and positioning apparatus.

    상세보기
19. Bacchi Paul ; Filipski Paul S., High torque, low hysteresis, multiple link robot arm mechanism.

    상세보기
20. Matteo Joseph C. (721 Summit Lake Ct. Knoxville TN 37922), Hybrid differential transmission.

    상세보기
21. Ogawa,Hironori; Uratani,Takafumi; Sugane,Masayuki; Matsuzaki,Yoshiyuki; Murata,Naoya; Uno,Sakiko, Linear moving mechanism and transfer robot using the same.

    상세보기
22. Kim, Sun-Ho; Nam, Ki-Hoon; Earmme, Tae-Min; Heo, Seok; Hwang, Jae-Chul, Link structure.

    상세보기
23. Christopher A. Hofmeister, Method of transferring substrates with two different substrate holding end effectors.

    상세보기
24. Cooper, Thomas G.; Blumenkranz, Stephen J.; Guthart, Gary S.; Rosa, David J., Modular manipulator support for robotic surgery.

    상세보기
25. Cooper, Thomas G.; Blumenkranz, Stephen J.; Guthart, Gary S.; Rosa, David J., Modular manipulator support for robotic surgery.

    상세보기
26. Cooper, Thomas G.; Blumenkranz, Stephen J.; Guthart, Gary S.; Rosa, David J., Modular manipulator support for robotic surgery.

    상세보기
27. Asakawa Teruo,JPX ; Saeki Hiroaki,JPX, Multi-chamber treatment system.

    상세보기
28. Muka Richard S., Multi-level substrate processing apparatus.

    상세보기
29. Muka Richard S., Multi-level substrate processing apparatus.

    상세보기
30. McClintock William ; Lowrance Robert B. ; Grunes Howard, Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers.

    상세보기
31. Bacchi Paul ; Filipski Paul S., Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput.

    상세보기
32. Hosek, Martin; Hofmeister, Christopher, Robot and adaptive placement system and method.

    상세보기
33. Hosek, Martin; Hofmeister, Christopher, Robot and adaptive placement system and method.

    상세보기
34. Hosek, Martin; Hofmeister, Christopher; Poole, Dennis, Robot and adaptive placement system and method.

    상세보기
35. Okuno, Chohei; Mori, Hiroki; Watanabe, Tetsuya, Robot arm mechanism.

    상세보기
36. Grunes Howard (Santa Cruz CA) Tepman Avi (Cupertino CA) Lowrance Robert (Los Gatos CA), Robot assembly.

    상세보기
37. Grunes Howard ; Lowrance Robert B. ; Tepman Avi, Robot assembly.

    상세보기
38. Blank, Richard; McLellan, Matt, Robot for a substrate processing system.

    상세보기
39. Tatsunori Suwa JP; Kazuhiro Hatake JP; Shunsuke Sugimura JP, Robot for handling.

    상세보기
40. Hudgens, Jeffrey C.; Kremerman, Izya, Robot systems, apparatus, and methods having independently rotatable waists.

    상세보기
41. Musha, Kazuhiro; Minami, Hirofumi; Kawaguchi, Takafumi, Rotation introduction mechanism, substrate transfer apparatus, and vacuum processing apparatus.

    상세보기
42. Bacchi Paul ; Filipski Paul S., Single and dual end effector, multiple link robot arm systems having triaxial drive motors.

    상세보기
43. Carducci Jim, Single drive, dual plane robot.

    상세보기
44. Bhola De ; Mark Spencer Grey, Spatula for separation of thinned wafer from mounting carrier.

    상세보기
45. Lee, Hyun Wook, Spin scrubber apparatus.

    상세보기
46. Caveney, Robert T.; Krishnasamy, Jayaraman; Gilchrist, Ulysses; Drew, Mitchell; Moura, Jairo T., Substrate processing apparatus.

    상세보기
47. Gilchrist, Ulysses; Caveney, Robert T.; Krishnasamy, Jayaraman; Drew, Mitchell; Moura, Jairo T., Substrate processing apparatus.

    상세보기
48. Gilchrist, Ulysses; Caveney, Robert T.; Krishnasamy, Jayaraman; Drew, Mitchell; Moura, Jairo T., Substrate processing apparatus.

    상세보기
49. Suda Atsuhiko,JPX ; Toyoda Kazuyuki,JPX ; Makiguchi Issei,JPX ; Ozawa Makoto,JPX, Substrate processing apparatus.

    상세보기
50. Ohkura Jun,JPX ; Iida Naruaki,JPX ; Kudou Hiroyuki,JPX ; Tateyama Masanori,JPX ; Sakamoto Yasuhiro,JPX, Substrate processing apparatus and substrate processing method.

    상세보기
51. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.

    상세보기
52. Mokuo Shori,JPX, Substrate transferring device.

    상세보기
53. Caveney, Robert T.; Gilchrist, Ulysses; Krupyshev, Alexander, Substrate transport apparatus.

    상세보기
54. Tuan T. Ha, Substrate transport apparatus.

    상세보기
55. Hofmeister Christopher A., Substrate transport apparatus with angled arms.

    상세보기
56. Beaulieu, David R., Substrate transport apparatus with coaxial drive shafts and dual independent scara arms.

    상세보기
57. Muka Richard S. ; Davis ; Jr. James C. ; Hofmeister Christopher A., Substrate transport apparatus with double substrate holders.

    상세보기
58. Muka Richard S. ; Davis ; Jr. James C. ; Hofmeister Christopher A., Substrate transport apparatus with double substrate holders.

    상세보기
59. Gilchrist, Ulysses, Substrate transport apparatus with multiple independent end effectors.

    상세보기
60. Mizukami Masami (Yamanashi JPX) Osada Hatsuo (Yamanashi JPX), Transfer apparatus.

    상세보기
61. Saeki Hiroaki,JPX ; Asakawa Teruo,JPX, Transfer arm apparatus and semiconductor processing system using the same.

    상세보기
62. Ogawa Hironori,JPX ; Kamitani Masashi,JPX, Transfer robot.

    상세보기
63. Ogawa Hironori,JPX ; Kamitani Masashi,JPX, Transfer robot.

    상세보기
64. Ogawa,Hironori; Uno,Sakiko, Transfer robot.

    상세보기
65. Tsuji Kazuhiko,JPX ; Murakami Yasuaki,JPX ; Takinami Eisaku,JPX ; Suzuki Masaharu,JPX, Transferring apparatus and robot arm.

    상세보기
66. Saeki, Hiroaki; Ishizawa, Shigeru; Shindo, Takehiro; Hiroki, Tsutomu; Machiyama, Wataru, Transportation apparatus and drive mechanism.

    상세보기
67. Tachibana, Sachio; Taniyama, Yasushi, Transportation apparatus and tension adjustment method of belt in the same.

    상세보기
68. Masayuki Toda JP; Tadahiro Ohmi JP; Yoshio Ishihara JP, Transportation method for substrate wafers and transportation apparatus.

    상세보기
69. Matteo Joseph C., Triple epicyclic differential transmission.

    상세보기
70. Ogawa,Hironori; Uno,Sakiko, Two-arm transfer robot.

    상세보기
71. Hironori Ogawa JP; Hirokazu Yoda JP, Two-armed transfer robot.

    상세보기
72. Ogawa Hironori,JPX ; Tsubota Ryusuke,JPX, Two-armed transfer robot.

    상세보기
73. Ogawa Hironori,JPX ; Tsubota Ryusuke,JPX, Two-armed transfer robot.

    상세보기
74. Ogawa Hironori,JPX ; Yoda Hirokazu,JPX, Two-armed transfer robot.

    상세보기
75. Ogawa Hironori,JPX ; Yoda Hirokazu,JPX, Two-armed transfer robot.

    상세보기
76. Tsubota Ryusuke,JPX, Two-armed transfer robot.

    상세보기
77. Lowrance Robert B., Two-axis magnetically coupled robot.

    상세보기
78. Bacchi Paul ; Filipski Paul S., Unitary specimen prealigner and continuously rotatable four link robot arm mechanism.

    상세보기
79. Bacchi Paul ; Filipski Paul S., Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism.

    상세보기
80. Ramsay, Bruce Gordon, Vacuum chamber load lock structure and article transport mechanism.

    상세보기
81. Schertler,Roman, Vacuum process apparatus.

    상세보기
82. Moslehi Mehrdad M., Wafer handler for multi-station tool.

    상세보기
83. Weaver, William Tyler; Daniel, Jr., Malcolm N.; Vopat, Robert B.; Schaller, Jason M.; Newman, Jacob; Kanawade, Dinesh; Constant, Andrew J.; Hickerson, Stephen C.; Hudgens, Jeffrey C.; Freeman, Marvin L., Wafer handling systems and methods.

    상세보기
84. Yoshino, Katsuhiro, Wafer transfer device and wafer transfer method.

    상세보기
85. Kinnard, David William; Richardson, Daniel, Wafer transport apparatus.

    상세보기
86. Crandell Rod, Work piece transfer apparatus.

    상세보기
87. Hirahara Yorio,JPX ; Maetani Haruo,JPX, Work transport control method.

    상세보기
더보기