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Method of making fused silica 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C03B-019/06
출원번호 US-0750561 (1991-08-26)
발명자 / 주소
  • Blackwell Jeffery L. (Corning NY) Dobbins Michael S. (Wilmington NC) McLay Robert E. (Corning NY) Truesdale Carlton M. (Corning NY)
출원인 / 주소
  • Corning Incorporated (Corning NY 02)
인용정보 피인용 횟수 : 63  인용 특허 : 0

초록

This invention relates to the production of high purity fused silica glass through oxidation and/or flame hydrolysis of a halide-free, organosilicon-R compound in vapor form having the following properties: (a) producing a gas stream of a halide-free silicon-containing compound in vapor form capable

대표청구항

In a method for making a virtually non-porous body of high purity fused silica glass which comprises the steps of: (a) producing a gas stream of a halide-free, silicon-containing compound in vapor form capable of being converted through thermal decomposition with oxidation or flame hydrolysis to SiO

이 특허를 인용한 특허 (63)

  1. Sayce Ian George,GBX ; Nicholson Robert,GBX ; Turnbull Paul Willikam,GBX ; Wells Peter John,GBX, Apparatus for manufacturing a vitreous silica article.
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  3. Fabian, Heinz; Roeper, Juergen, Atomizing method for producing synthetic quartz glass.
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  6. Hunt Andrew Tye ; Hwang Tzyy-Jiuan ; Shao Hong, Combustion chemical vapor deposition of phosphate films and coatings.
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  8. Hunt Andrew Tye ; Hwang Tzyy Jiuan ; Hendrick Michelle R. ; Shao Hong ; Thomas Joseph R., Corrosion-resistant multilayer coatings.
  9. Zhou, Ligui; Spear, Richard A.; Leung, Roger Yu-Kwan; Fan, Wenya; Xu, Helen X.; Metin, Lea M.; Bhanap, Anil Shriram, Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions.
  10. Claude L. Davis, Jr. ; Kenneth E. Hrdina ; Robert Sabia ; Harrie J. Stevens, Extreme ultraviolet soft x-ray projection lithographic method and mask devices.
  11. Davis, Jr., Claude L.; Hrdina, Kenneth E.; Sabia, Robert; Stevens, Harrie J., Extreme ultraviolet soft x-ray projection lithographic method and mask devices.
  12. Davis Jr., Claude L.; Hrdina, Kenneth E., Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements.
  13. Davis, Jr., Claude L.; Hrdina, Kenneth E., Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements.
  14. Bowden, Bradley F.; Hrdina, Kenneth E., Fabrication of inclusion free homogeneous glasses.
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  16. Hunt, Andrew T.; Hwang, Tzyy Jiuan; Hornis, Helmut G.; Lin, Wen-Yi, Formation of thin film capacitors.
  17. Kutsovsky, Yakov E., Fumed metal oxide particles and process for producing the same.
  18. Davis, Sheldon B.; Sanchez Garcia, Angelica M.; Matheu, David M.; Kutsovsky, Yakov E., Fumed silica of controlled aggregate size and processes for manufacturing the same.
  19. Davis, Sheldon B.; Sanchez Garcia, Angelica M.; Matheu, David; Kutsovsky, Yakov E., Fumed silica of controlled aggregate size and processes for manufacturing the same.
  20. Schermerhorn Paul M., Furnace for producing fused silica glass.
  21. Marley, Floyd E.; Sempolinski, Daniel R.; Sproul, Merrill F., Furnaces for fused silica production.
  22. Maxon John E. ; Pavlik ; Jr. Robert S. ; Sempolinski Daniel R. ; Wasilewski Michael H., Fused SiO.sub.2 -TiO.sub.2 glass method.
  23. Roger J. Araujo ; Nicholas F. Borrelli ; Robert E. McLay ; Daniel R. Sempolinski ; Charlene M. Smith, Fused silica with constant induced absorption.
  24. Jeffery Lynn Blackwell ; Lisa Anne Moore ; Carlton Maurice Truesdale, Germanium doped silica forming feedstock and method.
  25. Bowden, Bradley F.; Hrdina, Kenneth E.; Wight, Jr., John F.; Yu, Chunzhe C., High purity glass bodies formed by zero shrinkage casting.
  26. Pandelisev, Kiril A., Hot substrate deposition of fused silica.
  27. Kevin Bruce Albaugh ; Nitin Ramesh Keskar, Integration of ceramic membrane into a silicon oxide production plant.
  28. Morse, Theodore F., Liquid spray pyrolysis method for the fabrication of optical fiber preforms, with reactant mixing.
  29. Aronowitz,Sheldon; Zubkov,Vladimir, Low dielectric constant fluorine and carbon-containing silicon oxide dielectric material characterized by improved resistance to oxidation.
  30. Hawtof, Daniel W.; Henderson, Danny L.; Smith, Greg E.; Urruti, Eric H., Method and apparatus for forming fused silica by combustion of liquid reactants.
  31. Blackwell Jeffery L. ; Fu Xiaodong ; Hawtof Daniel W. ; Henderson Danny L., Method and apparatus for forming silica by combustion of liquid reactants using a heater.
  32. Floyd E. Marley ; Mahendra K. Misra ; Merrill F. Sproul, Method and apparatus for minimizing air infiltration in the production of fused silica glass.
  33. Henriksen, Knut; Vegge, Olaf Trygve, Method and apparatus for production of amorphous silica from silicon and silicon containing materials.
  34. Sempolinski Daniel R. ; Wasilewski Michael H. ; Yu C. Charles, Method and burner for forming silica-containing soot.
  35. Maxon John E. (Canton NY), Method and containment vessel for producing fused silica glass and the fused silica blank produced.
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  37. Hawtof, Daniel W.; Whalen, Joseph M., Method for collecting soot.
  38. Blackwell Jeffery Lynn ; Fu Xiaodong ; Hawtof Daniel Warren ; Powers Dale Robert, Method for forming silica by combustion of liquid reactants using oxygen.
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  41. Badeke, Klaus-Uwe; Otto, Norbert; Trommer, Martin; Laudahn, Hilmar; Brueckel, Andreas, Method for producing synthetic quartz glass.
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  45. Ackerman, Bradford Giles; Hrdina, Kenneth Edward; Moore, Lisa Anne; Russo, Nikki Jo; Yu, C. Charles, Method for producing titania-doped fused silica glass.
  46. Fabian, Heinz; Thomas, Stephan, Method for producing titanium-doped synthetic quartz glass.
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  50. Drouart Alain,FRX ; Gouez Benoit,FRX ; Lumineau Yves,FRX ; Ripoche Pierre,FRX ; Campion Jean-Florent,FRX, Method of purifying silica and depositing on an optical fiber preform.
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  52. Best, Michael E.; Davis, Jr., Claude L.; Edwards, Mary J.; Hobbs, Thomas W.; Murray, Gregory L., Method to avoid striae in EUV lithography mirrors.
  53. Risen ; Jr. William M. ; Wang Yong Zhong ; Bredall Scott, Methods and compositions for forming silica, germanosilicate and metal silicate films, patterns and multilayers.
  54. Marley, Floyd E.; Sempolinski, Daniel R.; Sproul, Merrill F., Methods and furnaces for fused silica production.
  55. Burke Gerald E. ; Hoaglin Christine L. ; Truesdale Carlton M., Optical waveguide attenuating device and method for producing the same.
  56. Borrelli Nicholas Francis ; Cook Thomas Allen ; DeLiso Evelyn McGee ; Modavis Robert Adam, Photoinduced grating in oxynitride glass.
  57. Borrelli, Nicholas Francis; Cook, Thomas Allen; DeLiso, Evelyn McGee; Modavis, Robert Adam, Photoinduced grating in oxynitride glass.
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  59. Aronowitz, Sheldon; Zubkov, Vladimir, Process for forming a low dielectric constant fluorine and carbon-containing silicon oxide dielectric material.
  60. Hiroyuki Nishimura JP; Akira Fujinoki JP; Hisatoshi Otsuka JP, Production method for making an optical member for excimer laser using synthetic quartz glass.
  61. Bussing Thomas R. A. ; Ting Joseph M., Pulse detonation synthesis.
  62. Adler, Meryle D. M.; Brown, John T.; Misra, Mahendra K., Sealed, nozzle-mix burners for silica deposition.
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