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Method and apparatus for transferring articles between two controlled environments 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65B-001/04
출원번호 US-0607898 (1990-11-01)
발명자 / 주소
  • Bonora Anthony C. (Menlo Park CA) Guerre Gilles (Les Loges en Josas CA FRX) Parikh Mihir (San Jose CA) Rosenquist Frederick T. (Redwood City CA) Jain Sudhir (Santa Clara CA)
출원인 / 주소
  • Asyst Technologies, Inc. (Milpitas CA 02)
인용정보 피인용 횟수 : 44  인용 특허 : 0

초록 ▼

A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt s

대표청구항 ▼

A system for removing articles to be processed from a sealable container, comprising: a container having an interior region and a door which makes a seal with said container to establish a controlled environment isolated from ambient atmospheric conditions in said interior region; a processing stati

이 특허를 인용한 특허 (44)

  1. Olsson Bert-.ANG.ke,SEX, Aseptic transfer.
    상세보기
  2. Muka Richard S. (Topsfield MA) Pippins Michael W. (Hamilton MA) Drew Mitchell A. (Portsmouth NH), Batchloader for substrate carrier on load lock.
    상세보기
  3. Miyajima, Toshihiko; Ishiyama, Shigeki, Clean device with clean box-opening/closing device.
    상세보기
  4. Masujima Sho,JPX ; Miyauchi Eisaku,JPX ; Miyajima Toshihiko,JPX ; Watanabe Hideaki,JPX, Clean transfer method and apparatus therefor.
    상세보기
  5. Masujima Sho,JPX ; Miyauchi Eisaku,JPX ; Miyajima Toshihiko,JPX ; Watanabe Hideaki,JPX, Clean transfer method and apparatus therefor.
    상세보기
  6. Kondoh, Keisuke; Tsuji, Norihiko, Connecting mechanism and connecting method of substrate container.
    상세보기
  7. Fujii, Toshiaki; Horita, Osamu; Ohyama, Koji; Nakayama, Toshiya; Sakiya, Fumio; Kinpara, Mineo, Container and loader for substrate.
    상세보기
  8. Boris Fishkin ; Seiji Sato ; Robert B. Lowrance, Controlled environment enclosure and mechanical interface.
    상세보기
  9. Fishkin Boris (San Jose CA) Sato Seiji (Palo Alto CA) Lowrance Robert B. (Los Gatos CA), Controlled environment enclosure and mechanical interface.
    상세보기
  10. Fishkin Boris ; Sato Seiji ; Lowrance Robert B., Controlled environment enclosure and mechanical interface.
    상세보기
  11. Hara, Shiro, Coupling system.
    상세보기
  12. Hara, Shiro; Maekawa, Hitoshi, Coupling transfer system.
    상세보기
  13. Hara, Shiro; Maekawa, Hitoshi, Coupling transfer system.
    상세보기
  14. Ludwig Joachim (Jena DEX), Device for transporting magazines for molding wafer-shaped objects.
    상세보기
  15. Muka Richard S. (Topsfield MA), Door drive mechanisms for substrate carrier and load lock.
    상세보기
  16. Suzuki, Hitoshi; Miyajima, Toshihiko, Dust resistant load port apparatus and mini-environment system.
    상세보기
  17. Suzuki, Hitoshi; Miyajima, Toshihiko, Dust resistant load port apparatus and mini-environment system.
    상세보기
  18. Yamashita Teppei,JPX ; Murata Masanao,JPX ; Tanaka Tsuyoshi,JPX ; Morita Teruya,JPX ; Kawano Hitoshi,JPX ; Hayashi Mitsuhiro,JPX ; Okuno Atsushi,JPX ; Nakamura Akio,JPX, Electronic substrate processing system using portable closed containers.
    상세보기
  19. Fosnight William J. ; Bonora Anthony C. ; Martin Raymond S. ; Tatro Jay, Evacuation-driven SMIF pod purge system.
    상세보기
  20. Blahnik, Jeffrey C.; Vopat, Robert Brent; Weaver, William T., High throughput, low volume clamshell load lock.
    상세보기
  21. Atkins, Andrew William; Bailey, Steve Andrew; Farquhar, David Ronald Bain; Orriss, David John; Richardson, Kevin, Housings and devices for disk drives.
    상세보기
  22. Briner Donald R. ; Laramore Christopher D., Isolation chamber transfer apparatus.
    상세보기
  23. Sugawara, Yudo, Lid opening and closing device.
    상세보기
  24. Yoshimura, Takehiko; Nagata, Tatsuhiko; Seki, Masaru; Cho, Yoshinori, Load port.
    상세보기
  25. Morita Teruya,JPX ; Murata Masanao,JPX ; Kawano Hitoshi,JPX ; Tanaka Tsuyoshi,JPX ; Oyobe Hiroyuki,JPX ; Takaoka Toshiyuki,JPX, Mechanical interface apparatus.
    상세보기
  26. Paul E. Lewis ; Adel George Tannous ; Karl A. Davlin, Method and apparatus for processing tool interface in a manufacturing environment.
    상세보기
  27. Paul E. Lewis ; Adel George Tannous ; Karl A. Davlin, Method and apparatus for processing tool interface in a manufacturing environment.
    상세보기
  28. Albert Hasper NL; Frank Huussen NL; Cornelis Marinus Kooijman NL; Theodorus Gerardus Maria Oosterlaken NL; Jack Herman Van Putten NL; Christianus Gerardus Maria Ridder NL; Gert-Jan Snijders NL, Method and device for transferring wafers.
    상세보기
  29. Spiegelman, Jeffrey J.; Alvarez, Jr., Daniel; Holmes, Russell J.; Tram, Allan, Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures.
    상세보기
  30. Elliott, Martin R.; Shah, Vinay, Methods and apparatus for mapping carrier contents.
    상세보기
  31. Elliott,Martin R.; Rice,Michael Robert, Methods and apparatus for repositioning support for a substrate carrier.
    상세보기
  32. Glenn A. Roberson, Jr. ; Robert M. Genco ; Robert B. Eglinton ; Wayland Comer ; Gregory K. Mundt, Molecular contamination control system.
    상세보기
  33. Roberson ; Jr. Glenn A. ; Genco Robert M. ; Eglinton Robert B. ; Comer Wayland ; Mundt Gregory K., Molecular contamination control system.
    상세보기
  34. Roberson ; Jr. Glenn A. ; Genco Robert M. ; Eglinton Robert B. ; Comer Wayland ; Mundt Gregory K., Molecular contamination control system.
    상세보기
  35. Roberson ; Jr. Glenn A. ; Genco Robert M. ; Eglinton Robert B. ; Comer Wayland ; Mundt Gregory K., Molecular contamination control system.
    상세보기
  36. Paul E. Lewis ; Adel George Tannous ; Karl A. Davlin ; Khalid Makhamreh, Processing tool interface apparatus for use in manufacturing environment.
    상세보기
  37. Miyajima,Toshihiko; Kagaya,Takeshi; Suzuki,Hitoshi; Sasaki,Mutsuo, Purging system and purging method for the interior of a portable type hermetically sealed container.
    상세보기
  38. Yoshitake Shusuke,JPX ; Tsukumo Yoshiaki,JPX ; Hirano Ryoichi,JPX ; Tojo Toru,JPX ; Tada Yoshiaki,JPX ; Kanda Makoto,JPX, Sample transferring method and sample transfer supporting apparatus.
    상세보기
  39. Yoshitake Shusuke,JPX ; Tsukumo Yoshiaki,JPX ; Hirano Ryoichi,JPX ; Tojo Toru,JPX ; Tada Yoshiaki,JPX ; Kanda Makoto,JPX, Sample transferring method and sample transfer supporting apparatus.
    상세보기
  40. Saga Koichiro,JPX, Sealed container and sealed container ambient gas substitution apparatus and method.
    상세보기
  41. Gallagher Gary M. (Colorado Springs CO) Wittman Boyd C. (Colorado Springs CO) Neumann Edmund B. (Corvallis OR), Semiconductor wafer cassette transport box.
    상세보기
  42. Hofmeister Christopher, Substrate carrier as batchloader.
    상세보기
  43. Walker Delroy (Springdale MD) Zihmer Joseph (Frederick MD) Furches Danny (Columbia MD) Garmer Christopher J. (Rockville MD), System for transferring articles between controlled environments.
    상세보기
  44. Van Der Meulen, Peter, System for transporting substrates.
    상세보기

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