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Air driven double diaphragm pump 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F04B-039/10
출원번호 US-0321889 (1989-03-10)
발명자 / 주소
  • Wilden James K. (11727 Pendleton Yucaipa CA 92399)
인용정보 피인용 횟수 : 61  인용 특허 : 0

초록

A double diaphragm pump having an air chamber housing centrally located between two water chamber housings. The air chamber housing includes a center section and two outwardly facing concave discs. Each water chamber housing inlcudes a water chamber shell mating with one of the discs with a flexible

대표청구항

A double diaphragm pump comprising an air chamber housing having a center section and two outwardly facing concave discs rigidly positioned to either side of said center section; two water chamber housings fixed to said air chamber housing and mating with said two outwardly facing concave discs abou

이 특허를 인용한 특허 (61)

  1. Eberwein Dennis D., Actuator for reciprocating air driven devices.
  2. Kennedy Dennis E. ; Eberwein Dennis D. ; Jack Robert F., Air drive pumps and components therefor.
  3. Dennis E. Kennedy ; Dennis D. Eberwein ; Robert F. Jack, Air driven devices and components therefor.
  4. Duncan Gregory S. (Corona CA), Air driven diaphragm pump.
  5. Duncan Gregory S. ; Forman Eric L., Air driven diaphragm pump.
  6. Duncan, Greg S., Air driven diaphragm pump.
  7. Eberwein,Dennis D., Air driven diaphragm pump.
  8. West,Todd M.; Kennedy,Dennis E., Air driven hydraulic pump.
  9. Dietzsch, Curtis W.; Duncan, Greg S.; Lent, Gary K., Air driven pump with performance control.
  10. Dietzsch, Curtis W.; Duncan, Greg S.; Lent, Gary K., Air driven pump with performance control.
  11. Jack Robert F. ; Forman Eric L. ; Humphries James E. ; Lent Gary K., Air driven pumps and components therefor.
  12. Jack Robert F. ; Forman Eric L. ; Humphries James E. ; Lent Gary K., Air driven pumps and components therefor.
  13. Glauber, Carl J., Air motor.
  14. Glauber, Carl, Air operated pump.
  15. Glauber, Carl; Duncan, Greg S., Air operated pump.
  16. Glauber, Carl J., Air-driven pump system.
  17. Glauber, Carl J., Air-driven pump system.
  18. Kennedy Dennis E. ; Pascual Wilfred D., Amplified pressure air driven diaphragm pump and pressure relief value therefor.
  19. Dennis E. Kennedy ; Wilfred D. Pascual, Amplified pressure air driven diaphragm pump and pressure relief valve therefor.
  20. Kennedy Dennis E. ; Pascual Wilfred D., Amplified pressure air driven diaphragm pump and pressure relief valve therefor.
  21. Yokomizo,Kenji, Apparatus and method of securing a workpiece during high-pressure processing.
  22. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Apparatus for supercritical processing of a workpiece.
  23. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Apparatus for supercritical processing of multiple workpieces.
  24. Jones,William Dale, Control of fluid flow in the processing of an object with a fluid.
  25. Pascual Wilfred D. ; Forman Eric L., Diaphragm mechanism for an air driven diaphragm pump.
  26. Hines, Bradley H.; Koehn, Brian W.; Scheierl, Paul W.; Earles, Jeffrey A., Diaphragm pump.
  27. Layman, Fredrick, Dual diaphragm pump.
  28. Sheydayi,Alexei; Sutton,Thomas, Gate valve for plus-atmospheric pressure semiconductor process vessels.
  29. Jones, William D., High pressure fourier transform infrared cell.
  30. Biberger, Maximilian A.; Layman, Frederick Paul; Sutton, Thomas Robert, High pressure processing chamber for semiconductor substrate.
  31. Biberger,Maximilian A.; Layman,Frederick Paul; Sutton,Thomas Robert, High pressure processing chamber for semiconductor substrate.
  32. Jones,William Dale, High-pressure processing chamber for a semiconductor wafer.
  33. Jones,William Dale, High-pressure processing chamber for a semiconductor wafer.
  34. Renfro Wesley E. ; Hopkins Marty H. ; Sample Michael T. ; Skarzynski James N., Hydro mechanical packingless pump and liquid spray system.
  35. Sheydayi,Alexei, Method and apparatus for clamping a substrate in a high pressure processing system.
  36. Goshi,Gentaro, Method and apparatus for cooling motor bearings of a high pressure pump.
  37. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Method and apparatus for supercritical processing of multiple workpieces.
  38. Parent,Wayne M.; Goshi,Gentaro, Method and system for cooling a pump.
  39. Parent,Wayne M., Method and system for determining flow conditions in a high pressure processing system.
  40. Parent, Wayne M.; Geshell, Dan R., Method and system for passivating a processing chamber.
  41. Hansen,Brandon; Lowe,Marie, Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid.
  42. Kawamura,Kohei; Asano,Akira; Miyatani,Koutarou; Hillman,Joseph T.; Palmer,Bentley, Method for supercritical carbon dioxide processing of fluoro-carbon films.
  43. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Method for supercritical processing of multiple workpieces.
  44. Baland Kerry W. (Calimesa CA), Method of forming a seal between a control shaft and bushing.
  45. Biberger,Maximilian Albert; Layman,Frederick Paul; Sutton,Thomas Robert, Method of supercritical processing of a workpiece.
  46. Cantley George A. (Akron OH), Modular pump.
  47. Sheydayi,Alexei, Non-contact shuttle valve for flow diversion in high pressure systems.
  48. Bethel,Brian V., One-way valve.
  49. Simmons, John M.; Simmons, Tom M.; Simmons, David M.; Kingsford, Kenji A.; Johnson, Bruce, Pneumatic reciprocating fluid pump with improved check valve assembly, and related methods.
  50. Sheydayi,Alexei, Pressure energized pressure vessel opening and closing device and method of providing therefor.
  51. Wuester,Christopher D., Process flow thermocouple.
  52. Huss, Howard; Eady, Eldon; Varney, James, Process for making chemical resistant pump diaphragm.
  53. Hale, Nathan Earl; McCall, David Brian; Wiitkoff, Wallace Christian; Jack, Robert Foster, Pump diaphragm.
  54. Yaschur, Jefferey C., Quick release pump clamp.
  55. Distaso,Chris; Duncan,Greg S.; Jack,Robert F., Reciprocating air distribution system.
  56. Mullee, William H., Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process.
  57. Pascual Wilfred D. (Baldwin Park CA), Shaft seal arrangement for air driven diaphragm pumping systems.
  58. Gale,Glenn; Hillman,Joseph T.; Jacobson,Gunilla; Palmer,Bentley, System and method for processing a substrate using supercritical carbon dioxide processing.
  59. Jacobson,Gunilla; Yellowaga,Deborah, Treatment of a dielectric layer using supercritical CO.
  60. Kevwitch, Robert, Treatment of substrate using functionalizing agent in supercritical carbon dioxide.
  61. Sheydayi,Alexei, Vacuum chuck utilizing sintered material and method of providing thereof.
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