$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Semiconductor device having an MOS transistor with overlapped and elevated source and drain 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/78
  • H01L-027/02
  • H01L-023/48
출원번호 US-0753500 (1991-09-03)
발명자 / 주소
  • Pfiester James R. (Austin TX)
출원인 / 주소
  • Motorola, Inc. (Schaumburg IL 02)
인용정보 피인용 횟수 : 90  인용 특허 : 0

초록

Source and drain electrodes which are overlapped and elevated with respect to an inverse-T gate electrode provide low lateral electric field, low source-drain series resistance, and uniform source and drain doping profiles while maintaining a compact layout. In one form of the invention, a semicondu

대표청구항

A semiconductor device having a MOS transistor with an overlapped and elevated source and drain, comprising: a silicon substrate; an inverse-T gate electrode overlying the substrate and separated from the substrate by a gate dielectric, the inverse-T gate electrode having a body portion and first an

이 특허를 인용한 특허 (90)

  1. Dorleans Fernand (Wappingers Falls NY) Hsia Liang-Choo (Stormville NY) Hsu Louis L. C. (Fishkill NY) Larsen Gerald R. (Cornwall NY) Schwartz Geraldine C. (Poughkeepsie NY), CMOS transistor with two-layer inverse-T tungsten gate.
  2. Lin, Chun-Jung, Cells array of mask read only memory.
  3. Bauer, Matthias; Thomas, Shawn G., Cyclical epitaxial deposition and etch.
  4. Yamazaki, Shunpei, Device comprising EL element electrically connected to P-channel transistor.
  5. Arena,Chantal J.; Italiano,Joe P.; Brabant,Paul D., Enhanced selectivity for epitaxial deposition.
  6. Kusunoki Shigeru (Hyogo-ken JPX) Inuishi Masahide (Hyogo-ken JPX), Field effect transistor including silicon oxide film and nitrided oxide film as gate insulator film and manufacturing me.
  7. Smith, Elliot John, Gate patterning for AC and DC performance boost.
  8. Choi Jeong Yeol ; Han Chung-Chyung ; Mui Ken-Chuen, High density MOSFET with raised source and drain regions.
  9. Bryant Frank Randolph, High impedance load for integrated circuit devices.
  10. Bauer, Matthias, High throughput cyclical epitaxial deposition and etch process.
  11. Mandelman, Jack A.; Radens, Carl J.; Tonti, William R., Inverse T-gate structure using damascene processing.
  12. Mandelman,Jack A.; Radens,Carl J.; Tonti,William R., Inverse-T gate structure using damascene processing.
  13. Yamazaki, Shunpei; Fukunaga, Takeshi; Koyama, Jun; Inukai, Kazutaka, Light emitting device and fabricating method thereof.
  14. Yamazaki,Shunpei; Fukunaga,Takeshi; Koyama,Jun; Inukai,Kazutaka, Light emitting device and fabrication method thereof.
  15. Yamazaki, Shunpei; Fukunaga, Takeshi; Koyama, Jun; Inukai, Kazutaka, Light emitting device and manufacturing method thereof.
  16. Yamazaki, Shunpei; Fukunaga, Takeshi; Koyama, Jun; Inukai, Kazutaka, Light emitting device and manufacturing method thereof.
  17. Yamazaki, Shunpei, Light-emitting device having a triple-layer wiring structure.
  18. Schwalke Udo,DEX ; Zeininger Heinz,DEX, Low junction leakage mosfets with particular sidewall spacer structure.
  19. Matsuoka Fumitomo (Kawasaki JPX), MOSFET having fine gate electrode structure.
  20. Abadeer, Wagdi W.; Brown, Jeffrey S.; Chatty, Kiran V.; Gauthier, Jr., Robert J.; Radens, Carl J.; Tonti, William R., MOSFET with decoupled halo before extension.
  21. Abadeer,Wagdi W.; Brown,Jeffrey S.; Chatty,Kiran V.; Gauthier, Jr.,Robert J.; Radens,Carl J.; Tonti,William R., MOSFET with decoupled halo before extension.
  22. Chen, Huajie; Holt, Judson R.; Jagannathan, Rangarajan; Natzle, Wesley C.; Sievers, Michael R.; Wise, Richard S., Metal oxide field effect transistor with a sharp halo.
  23. Chen,Huajie; Holt,Judson R; Jagannathan,Rangarajan; Natzle,Wesley C; Sievers,Michael R; Wise,Richard S, Metal oxide field effect transistor with a sharp halo and a method of forming the transistor.
  24. Lin, Shiuan-Jeng; Cheng, Shyh-Wei; Chu, Che-Jung, Metal-oxide-semiconductor field-effect transistor with extended gate dielectric layer.
  25. Dorleans Fernand (Wappingers Falls NY) Hsia Liang-Choo (Stormville NY) Hsu Louis L. C. (Fishkill NY) Larsen Gerald R. (Cornwall NY) Schwartz Geraldine C. (Poughkeepsie NY), Method for fabricating a MOS transistor with two-layer inverse-T tungsten gate structure.
  26. Yeon Woo Cheong KR; Young Kum Back KR, Method for fabricating a semiconductor device with an improved short channel effect.
  27. Wu Shye-Lin,TWX, Method for forming a semiconductor device with an inverse-T gate lightly-doped drain structure.
  28. Yamazaki, Shunpei, Method of fabricating a semiconductor device.
  29. Yamazaki, Shunpei, Method of fabricating a semiconductor device.
  30. Yamazaki, Shunpei, Method of fabricating a semiconductor device.
  31. Yamazaki, Shunpei; Ohtani, Hisashi; Suzawa, Hideomi; Takayama, Toru, Method of forming a semiconductor device.
  32. Chan Tsiu C. (Carrollton TX) Smith Gregory C. (Carrollton TX), Method of forming raised source/drain regions in a integrated circuit.
  33. Chan Tsiu C. ; Smith Gregory C., Method of forming raised source/drain regions in an integrated circuit.
  34. Pasch Nicholas F. (Pacifica CA) Kapoor Ashok (Palo Alto CA) Schinella Richard D. (Saratoga CA), Method of making self-aligned remote polysilicon contacts.
  35. Yamazaki,Shunpei, Method of manufacturing a semiconductor device having a gate electrode with a three layer structure.
  36. Choi Yong-bae,KRX ; Kim Keon-soo,KRX, Methods for forming peripheral circuits including high voltage transistors with LDD structures.
  37. Hong Gary (Hsinchu TWX), Mosfet with fully overlapped lightly doped drain structure and method for manufacturing same.
  38. Choi Jeong Yeol ; Han Chung-Chyung ; Mui Ken-Chuen, Mosfet with raised source and drain regions.
  39. Choi Yong-bae,KRX ; Kim Keon-soo,KRX, Peripheral circuits including high voltage transistors with LDD structures for nonvolatile memories.
  40. Bauer, Matthias; Weeks, Keith Doran, Selective epitaxial formation of semiconductive films.
  41. Bauer, Matthias; Weeks, Keith Doran, Selective epitaxial formation of semiconductor films.
  42. Shunpei Yamazaki JP, Semiconductor device.
  43. Yamazaki, Shunpei, Semiconductor device.
  44. Yamazaki, Shunpei; Arai, Yasuyuki; Koyama, Jun, Semiconductor device and fabrication method thereof.
  45. Yamazaki, Shunpei; Arai, Yasuyuki; Koyama, Jun, Semiconductor device and fabrication method thereof.
  46. Yamazaki, Shunpei; Arai, Yasuyuki; Koyama, Jun, Semiconductor device and fabrication method thereof.
  47. Yamazaki, Shunpei; Arai, Yasuyuki; Koyama, Jun, Semiconductor device and fabrication method thereof.
  48. Yamazaki, Shunpei; Arai, Yasuyuki; Koyama, Jun, Semiconductor device and fabrication method thereof.
  49. Suzawa, Hideomi; Ono, Koji; Takayama, Toru; Arao, Tatsuya; Yamazaki, Shunpei, Semiconductor device and manufacturing method thereof.
  50. Suzawa,Hideomi; Ono,Koji; Takayama,Toru; Arao,Tatsuya; Yamazaki,Shunpei, Semiconductor device and manufacturing method thereof.
  51. Suzawa,Hideomi; Ono,Koji; Takayama,Toru; Arao,Tatsuya; Yamazaki,Shunpei, Semiconductor device and manufacturing method thereof.
  52. Cheong, Yeon Woo; Back, Young Kum, Semiconductor device and method for fabricating same.
  53. Suzawa, Hideomi; Ono, Koji; Takayama, Toru, Semiconductor device and method for manufacturing same.
  54. Suzawa, Hideomi; Ono, Koji; Takayama, Toru, Semiconductor device and method for manufacturing same.
  55. Konuma, Toshimitsu; Sugawara, Akira; Uehara, Yukiko; Zhang, Hongyong; Suzuki, Atsunori; Ohnuma, Hideto; Yamaguchi, Naoaki; Suzawa, Hideomi; Uochi, Hideki; Takemura, Yasuhiko, Semiconductor device and method for manufacturing the same.
  56. Konuma,Toshimitsu; Sugawara,Akira; Uehara,Yukiko; Zhang,Hongyong; Suzuki,Atsunori; Ohnuma,Hideto; Yamaguchi,Naoaki; Suzawa,Hideomi; Uochi,Hideki; Takemura,Yasuhiko, Semiconductor device and method for manufacturing the same.
  57. Suzawa, Hideomi; Ono, Koji; Takayama, Toru, Semiconductor device and method for manufacturing the same.
  58. Shunpei Yamazaki JP; Jun Koyama JP, Semiconductor device and method of fabricating the same.
  59. Yamazaki, Shunpei; Koyama, Jun, Semiconductor device and method of fabricating the same.
  60. Yamazaki, Shunpei; Koyama, Jun, Semiconductor device and method of fabricating the same.
  61. Yamazaki, Shunpei; Koyama, Jun, Semiconductor device and method of fabricating the same.
  62. Yamazaki, Shunpei; Koyama, Jun, Semiconductor device and method of fabricating the same.
  63. Yamazaki, Shunpei; Koyama, Jun, Semiconductor device and method of fabricating the same.
  64. Yamazaki, Shunpei; Koyama, Jun, Semiconductor device and method of fabricating the same.
  65. Yamazaki,Shunpei; Koyama,Jun, Semiconductor device and method of fabricating the same.
  66. Yamazaki,Shunpei; Ohtani,Hisashi; Suzawa,Hideomi; Takayama,Toru, Semiconductor device and method of fabricating the same.
  67. Aiso,Fumiki, Semiconductor device and method of manufacturing the same.
  68. Yamazaki, Shunpei; Arai, Yasuyuki; Koyama, Jun, Semiconductor device comprising a pixel unit including an auxiliary capacitor.
  69. Yamazaki,Shunpei, Semiconductor device comprising thin film transistor comprising conductive film having tapered edge.
  70. Gardner Mark I. ; Cheek Jon ; Bush John, Semiconductor device having elevated gate electrode and elevated active regions and method of manufacture thereof.
  71. Yokoyama, Yuji, Semiconductor device having interconnection layer with multiply layered sidewall insulation film.
  72. Yokoyama, Yuji, Semiconductor device having interconnection layer with multiply layered sidewall insulation film.
  73. Konuma, Toshimitsu; Sugawara, Akira; Uehara, Yukiko; Zhang, Hongyong; Suzuki, Atsunori; Ohnuma, Hideto; Yamaguchi, Naoaki; Suzawa, Hideomi; Uochi, Hideki; Takemura, Yasuhiko, Semiconductor device having pixel electrode and peripheral circuit.
  74. Ono Atsuki,JPX, Semiconductor device having shallow impurity region without short-circuit between gate electrode and source and drain re.
  75. Konuma, Toshimitsu; Sugawara, Akira; Uehara, Yukiko; Zhang, Hongyong; Suzuki, Atsunori; Ohnuma, Hideto; Yamaguchi, Naoaki; Suzawa, Hideomi; Uochi, Hideki; Takemura, Yasuhiko, Semiconductor device including transistors with silicided impurity regions.
  76. Konuma, Toshimitsu; Sugawara, Akira; Uehara, Yukiko; Zhang, Hongyong; Suzuki, Atsunori; Ohnuma, Hideto; Yamaguchi, Naoaki; Suzawa, Hideomi; Uochi, Hideki; Takemura, Yasuhiko, Semiconductor device including transistors with silicided impurity regions.
  77. Suzawa,Hideomi; Ono,Koji; Takayama,Toru, Semiconductor device that includes a gate insulating layer with three different thicknesses.
  78. Wu Shye-Lin,TWX, Semiconductor device with an inverse-T gate lightly-doped drain structure.
  79. Asai Akiyoshi,JPX ; Ohya Nobuyuki,JPX ; Katada Mitsutaka,JPX, Semiconductor device with conductive connecting layer and abutting insulator section made of oxide of same material.
  80. Choi Ki Soo,KRX, Semiconductor device with gate electrode having end portions to reduce hot carrier effects.
  81. Lee, Chang Huhn; Jeong, Mun Mo; Kim, Wook je, Semiconductor device with gate spacer of positive slope and fabrication method thereof.
  82. Lee,Jae Kyu, Semiconductor device with source/drain extension layer.
  83. Yamazaki, Shunpei, Semiconductor device with tapered gates.
  84. Ohnuma, Hideto, Semiconductor display device and manufacturing method thereof.
  85. Takayama, Toru; Yamazaki, Shunpei; Akimoto, Kengo, Silicon nitride film and semiconductor device.
  86. Takayama,Toru; Yamazaki,Shunpei; Akimoto,Kengo, Silicon nitride film and semiconductor device, and manufacturing method thereof.
  87. Takayama, Toru; Yamazaki, Shunpei; Akimoto, Kengo, Silicon nitride film, and semiconductor device.
  88. Takayama, Toru; Yamazaki, Shunpei; Akimoto, Kengo, Silicon nitride film, and semiconductor device.
  89. Thomas, Shawn; Tomasini, Pierre, Stressor for engineered strain on channel.
  90. Takayama, Toru; Yamazaki, Shunpei; Akimoto, Kengo, Thin film semiconductor device having silicon nitride film.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로