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Piezoresistive pressure transducer with a conductive elastomeric seal 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01C-010/10
출원번호 US-0826206 (1992-01-24)
발명자 / 주소
  • Maurer Dean J. (Freeport IL)
출원인 / 주소
  • Honeywell, Inc. (Minneapolis MN 02)
인용정보 피인용 횟수 : 72  인용 특허 : 0

초록 ▼

A low cost piezoresistive pressure transducer utilizing premolded elastomeric seals in which at least one seal is electrically conductive. A piezoresistive stress sensitive element in the form of a diaphragm of semiconductor material having a thickened rim is held at its rim between a pair of premol

대표청구항 ▼

A pressure transducer assembly comprising: a diaphragm of semiconductor material having a central portion with a stress sensitive device formed thereon electrically conductive regions extending from the stress sensitive device to a peripheral portion of said diaphragm; a housing containing said diap

이 특허를 인용한 특허 (72)

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  8. Speldrich, Brian; Wade, Richard, Conductive elastomeric seal and method of fabricating the same.
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  10. Sid, Salim, Current transducer.
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  11. Selvan,Thirumani A.; Shenoy,Gururaj U.; Sadasivan,Saravanan; Muniraju,Raghavendra, Design of a wet/wet amplified differential pressure sensor based on silicon piezoresistive technology.
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  12. Bonne Ulrich (Hopkins MN) Maurer D. Joseph (Pearl City IL), Differential pressure sensor with stress reducing pressure balancing means.
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  14. Sid, Salim, Electrical current transducer.
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  38. Stewart,Carl E.; Davis,Richard A., Method to reduce die edge shorting on pressure sensors using conductive elastomeric seals.
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