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Dual cassette load lock

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-049/05
출원번호 US-0511481 (1990-04-19)
발명자 / 주소
  • Toshima Masato M. (Sunnyvale CA) Salzman Phil M. (San Jose CA) Murdoch Steven C. (Palo Alto CA) Wang Cheng (San Jose CA) Stenholm Mark A. (San Jose CA) Howard James (San Jose CA) Hall Leonard (San Jo
출원인 / 주소
  • Applied Materials, Inc. (Santa Clara CA 02)
인용정보 피인용 횟수 : 85  인용 특허 : 0

초록

A workpiece loading interface is included within a workpiece processing system which processes workpieces, typically wafers, in a vacuum. The workpiece loading interface includes two separate chambers. Each chamber may be separately pumped down. Thus, while a first cassette of wafers, from a first c

대표청구항

In a workpiece processing system comprising multiple vacuum chambers connected to a central chamber, a workpiece loading interface comprising: dual external chambers each having an opening for receiving workpieces held in a cassette and for forwarding the workpieces to the central chamber of the wor

이 특허를 인용한 특허 (85)

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