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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0633547 (1990-12-24) |
발명자 / 주소 |
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출원인 / 주소 |
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인용정보 | 피인용 횟수 : 9 인용 특허 : 0 |
The present invention includes a plasma reactor chamber, which is generally constructed such that a large opening exists in a wall of the chamber. The reactor chamber is deployed remotely from a control console, such as on a robotic arm. A plasma generating means, such as RF electrodes is disposed w
A plasma reactor comprising: a reactor chamber being formed by at least one chamber wall, said chamber wall having a treatment opening formed therein, said opening being identified by edges of said chamber wall; a vacuum seal being disposed upon said edges of said chamber wall to surround said openi
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