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High dielectric constant capacitor and method for manufacturing the same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01G-007/00
  • H01G-009/00
  • H01G-004/06
출원번호 US-0899973 (1992-06-17)
우선권정보 KR-0011272 (1991-07-03)
발명자 / 주소
  • Kwon Keewon (Suwon) Kim Youngwug (Suwon KRX)
출원인 / 주소
  • Samsung Electronics Co., Ltd. (Suwon KRX 03)
인용정보 피인용 횟수 : 78  인용 특허 : 0

초록

A high dielectric constant film comprised of at least a first dual-film layer, which includes a first tantalum oxide film, and a first metal oxide film which is made of a metal oxide whose valence is smaller than that of tantalum, and whose dielectric constant is equal to or greater than that of tan

대표청구항

A high dielectric constant capacitor, including: a substrate; a first electrode film formed on said substrate; a first tantalum oxide film formed on said first electrode film; a first metal oxide film formed on said first tantalum oxide film, wherein said first metal oxide film is made of a metal ox

이 특허를 인용한 특허 (78)

  1. Petite, Thomas David; Huff, Richard M, Automotive diagnostic data monitoring systems and methods.
  2. Harald Bachhofer DE; Thomas Haneder DE; Reinhard Stengl DE; Wolfgang Honlein DE; Hans Reisinger DE, Capacitor for semiconductor configuration and method for fabricating a dielectric layer therefor.
  3. Derryl D. J. Allman ; Brian Bystedt, Capacitor with multiple-component dielectric and method of fabricating same.
  4. Allman, Derryl D. J.; Mansour, Nabil; Saopraseuth, Ponce, Capacitor with stoichiometrically adjusted dielectric and method of fabricating same.
  5. Bhat, Vishwanath; Carlson, Chris M.; Gealy, F. Daniel, Capacitors comprising dielectric regions having first and second oxide material portions of the same chemical compositon but different densities.
  6. Petite, Thomas David; Huff, Richard M; Aldoretta, David P, Dual-mode communication devices, methods and systems.
  7. Drab, John J.; Dougherty, Thomas K.; Kehle, Kathleen A., Electrode for thin film capacitor devices.
  8. Gregory A. Johnson ; Kunal Taravade ; Gayle Miller, Encapsulated-metal vertical-interdigitated capacitor and damascene method of manufacturing same.
  9. Govindarajan, Shrinivas, High dielectric constant materials.
  10. Govindarajan,Shrinivas, High dielectric constant materials.
  11. Lu, Jiong-Ping; Hwang, Ming-Jang, High-K dielectric materials and processes for manufacturing them.
  12. Lu, Jiong-Ping; Hwang, Ming-Jang, High-K dielectric materials and processes for manufacturing them.
  13. Lu, Jiong Ping; Hwang, Ming Jang, High-k dielectric materials and processes for manufacturing them.
  14. Lu, Jiong-Ping; Hwang, Ming-Jang, High-k dielectric materials and processes for manufacturing them.
  15. Allman, Derryl D. J.; Fuchs, Kenneth, Interconnect-embedded metal-insulator-metal capacitor.
  16. Derryl D. J. Allman ; John Q. Walker ; Verne C. Hornback ; Todd A. Randazzo, Interconnect-integrated metal-insulator-metal capacitor and method of fabricating same.
  17. Maria, Jon-Paul; Kingon, Angus Ian, Lanthanum oxide-based dielectrics for integrated circuit capacitors.
  18. Maria, Jon-Paul; Kingon, Angus Ian, Lanthanum oxide-based gate dielectrics for integrated circuit field effect transistors.
  19. Yang, Sam, Low leakage MIM capacitor.
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  24. Ruff, Alexander; Kegel, Wilhelm; Karcher, Wolfram; Schrems, Martin, Method for increasing the capacitance in a storage trench.
  25. Hirao Shuji (Osaka JPX) Ogawa Hisashi (Katano JPX) Terai Yuka (Osaka JPX) Sekiguchi Mitsuru (Hirakata JPX) Fukumoto Masanori (Osaka JPX) Miyanaga Isao (Moriguchi JPX), Method of fabricating a semiconductor device.
  26. Ma, Yanjun; Ono, Yoshi, Method of forming a multilayer dielectric stack.
  27. Lu, Jiong-Ping; Hwang, Ming-Jang, Method of forming capacitors.
  28. Merchant Sailesh Mansinh ; Roy Pradip Kumar, Methods of fabricating an integrated circuit device with composite oxide dielectric.
  29. Petite, Thomas David; Huff, Richard M, Mobile inventory unit monitoring systems and methods.
  30. Petite,Thomas D., Multi-function general purpose transceiver.
  31. Reinberg, Alan R., Oxidative conditioning compositions for metal oxide layer and applications thereof.
  32. Reinberg, Alan R., Oxidative conditioning compositions for metal oxide layer and applications thereof.
  33. Alan R. Reinberg, Oxidative conditioning method for metal oxide layer and applications thereof.
  34. Nasu,Hayato; Usui,Takamasa; Shibata,Hideki, Semiconductor device and method having capacitor and capacitor insulating film that includes preset metal element.
  35. Yamaguchi, Hiromu, Semiconductor device provided with a capacitor having a high-permittivity insulator film.
  36. Petite,Thomas David, Smoke detection methods, devices, and systems.
  37. Peters Michael G. ; Lee Michael G. ; Beilin Solomon I. ; Takahashi Yasuhito, Sputtered and anodized capacitors capable of withstanding exposure to high temperatures.
  38. Petite,Thomas D.; Davis,James, System and method for communicating with a remote communication unit via the public switched telephone network (PSTN).
  39. Davis, James; Petite, Thomas D., System and method for controlling communication between a host computer and communication devices associated with remote devices in an automated monitoring system.
  40. Petite, Thomas D.; Huff, Richard; Aldoretta, David P.; Stevens, Candida, System and method for monitoring remote devices with a dual-mode wireless communication protocol.
  41. Petite, Thomas David; Huff, Richard M; Aldoretta, David P; Stevens, Candida, System and method for monitoring remote devices with a dual-mode wireless communication protocol.
  42. Petite, Thomas David, System and method for transmitting an emergency message over an integrated wireless network.
  43. Petite, Thomas David, System and method for transmitting an emergency message over an integrated wireless network.
  44. Petite, Thomas David, System and method for transmitting an emergency message over an integrated wireless network.
  45. Petite, Thomas D., System and method for transmitting pollution information over an integrated wireless network.
  46. Petite, Thomas D., System and method for transmitting pollution information over an integrated wireless network.
  47. Petite, Thomas David, System and method for transmitting pollution information over an integrated wireless network.
  48. Petite,Thomas D., System and method for transmitting pollution information over an integrated wireless network.
  49. Petite, Thomas D., Systems and methods for controlling communication between a host computer and communication devices.
  50. Petite, Thomas David, Systems and methods for controlling communication between a host computer and communication devices.
  51. Petite, Thomas David, Systems and methods for controlling communication between a host computer and communication devices.
  52. Petite,Thomas D.; Davis,James, Systems and methods for enabling a mobile user to notify an automated monitoring system of an emergency situation.
  53. Brownrigg, Edwin B., Systems and methods for facilitating wireless network communication, satellite-based wireless network systems, and aircraft-based wireless network systems, and related methods.
  54. Brownrigg, Edwin B., Systems and methods for facilitating wireless network communication, satellite-based wireless network systems, and aircraft-based wireless network systems, and related methods.
  55. Vaartstra,Brian A., Systems and methods for forming metal oxides using alcohols.
  56. Vaartstra,Brian A., Systems and methods for forming metal oxides using alcohols.
  57. Vaartstra, Brian A.; Westmoreland, Donald L., Systems and methods for forming metal oxides using metal organo-amines and metal organo-oxides.
  58. Vaartstra, Brian A., Systems and methods for forming zirconium and/or hafnium-containing layers.
  59. Vaartstra,Brian A., Systems and methods for forming zirconium and/or hafnium-containing layers.
  60. Petite, Thomas D., Systems and methods for monitoring and controlling remote devices.
  61. Petite, Thomas D., Systems and methods for monitoring and controlling remote devices.
  62. Petite, Thomas David, Systems and methods for monitoring and controlling remote devices.
  63. Petite, Thomas David; Huff, Richard M, Systems and methods for monitoring and controlling remote devices.
  64. Petite, Thomas David; Huff, Richard M., Systems and methods for monitoring and controlling remote devices.
  65. Petite, Thomas D., Systems and methods for monitoring conditions.
  66. Petite, Thomas D., Systems and methods for monitoring conditions.
  67. Petite, Thomas David, Systems and methods for monitoring conditions.
  68. Petite, Thomas David; Huff, Richard M, Systems and methods for monitoring vehicle parking.
  69. Petite, Thomas David, Systems and methods for providing emergency messages to a mobile device.
  70. Petite, Thomas David, Systems and methods for providing emergency messages to a mobile device.
  71. Petite,Thomas D., Transmitter for accessing automated financial transaction machines.
  72. Gregory A. Johnson ; Kunal N. Taravade, Vertical interdigitated metal-insulator-metal capacitor for an integrated circuit.
  73. Petite,Thomas D., Wireless communication networks for providing remote monitoring of devices.
  74. Petite, David, Wireless network protocol system and methods.
  75. Petite, David, Wireless network protocol systems and methods.
  76. Brownrigg, Edwin B.; Wilson, Thomas W., Wireless network system and method for providing same.
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