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Electric probing-test machine having a cooling system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01R-001/02
출원번호 US-0738304 (1991-07-31)
우선권정보 JP-0135000 U (1987-09-02)
발명자 / 주소
  • Miyata Eiji (Fuchu) Sugiyama Masahiko (Nirasaki) Kohno Masahiko (Yamanashi) Hatta Masataka (Yamanashi JPX)
출원인 / 주소
  • Tokyo Electron Limited (Tokyo JPX 03)
인용정보 피인용 횟수 : 152  인용 특허 : 0

초록 ▼

An electric probing-test machine comprises a probe card having a plurality of probes contacted with chips of a semiconductor wafer and serving to apply test signal to a tester which judges whether circuits on the chips of the wafer are correct or deficient, a main chuck for holding the wafer at a te

대표청구항 ▼

An apparatus for cooling a semiconductor wafer comprising: a wafer stage on which a semiconductor wafer is placed; a heat exchange jacket arranged so as to conduct heat exchange between itself and said wafer stage; a coolant tank in which a coolant is reserved; a supply passage communicating said he

이 특허를 인용한 특허 (152)

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