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Method and apparatus for delivering a continuous quantity of gas over a wide range of flow rates 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F17C-013/00
출원번호 US-0720119 (1991-06-24)
발명자 / 주소
  • Schuck Thomas W. (Easton PA) VanOmmeren James (New Tripoli PA)
출원인 / 주소
  • Air Products and Chemicals, Inc. (Allentown PA 02)
인용정보 피인용 횟수 : 68  인용 특허 : 0

초록

Method and apparatus for delivering high pressure gas to a point of use over a wide range of flowrates by storing said gas as a cryogenic fluid, removing said cryogenic fluid by means of a single stage reciprocating piston-type pump/compressor adapted to utilize liquid, vaporized liquid, a mixture o

대표청구항

A system for delivering a high pressure gas to a point of use over a wide range of flowrates comprising in combination a storage container capable of storing said gas as liquid or liquid and vaporized liquid or as a supercritical fluid; means to transfer fluid being liquid, vaporized liquid, supercr

이 특허를 인용한 특허 (68)

  1. Pagaza-Melero Gerardo (Paseo de la Reforma No. 2971-12 Lomas de Vista Hermosa Cuajimalpa ; C.P. 05100 MXX) Fernandez-Y-Sosa Raymundo (Naucalpan de Juarez MXX) Bastida-Sanchez Santiago (Almoloya de Ju, Apparatus for cryogenically separating elastomeric materials from metallic and textile materials forming composites ther.
  2. Fan Chiko (810 El Quanito Dr. Danville CA 94526) Pearson Anthony (498 Los Pinos Way San Jose CA 95123) Chen J. James (2304 Maximilian Dr. Campbell CA 95008) White ; Jr. James L. (392 Eagle Trace Half, Apparatus for fluid delivery in chemical vapor deposition systems.
  3. Taube, Joel A.; Khan, Mohamed H.; Cole, James A., Apparatus for producing nano-particles of molybdenum oxide.
  4. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Apparatus for supercritical processing of a workpiece.
  5. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Apparatus for supercritical processing of multiple workpieces.
  6. Curbow Jeffery L. ; Cook Marion T., Carbon dioxide vaporizer.
  7. Da Silva,Jader Matos; Lindner,Markus; Immel,Rainer, Closed pressure-keeping system for liquid hydrogen storage.
  8. White, Norman Henry, Compressed gas stream introduction method and filling station.
  9. Farese, David John; Cohen, Joseph Perry, Compressor fill method and apparatus.
  10. Vander Woude, David J.; Viegas, Herman H.; Seshadri, Jayaram; Glentz, Joseph Louis; Schwichtenberg, Bryan Edward; Stuart, William Ehrich, Control method for a self-powered cryogen based refrigeration system.
  11. Jones,William Dale, Control of fluid flow in the processing of an object with a fluid.
  12. Emmer, Claus; Drube, Thomas K.; Gamble, Jesse, Cryogenic fluid delivery system.
  13. Gustafson, Keith; Gustafson, Erik, Cryogenic liquid delivery system and method with active pressure building capabilities.
  14. Gier, Harold L.; Jetley, Richard L., Cryogenic mixed gas single phase storage and delivery.
  15. Iarocci,Michael; Valentine,Stephen; Wowk,Brian, Cryogenic storage system with improved temperature control.
  16. VanderWoude, David J.; Viegas, Herman H.; Seshadri, Jayaram; Glentz, Joseph Louis; Schwichtenberg, Bryan Edward; Shaw, J. J., Cryogenic temperature control apparatus and method.
  17. Viegas, Herman H.; Vander Woude, David J.; Seshadri, Jayaram; Shaw, John J., Cryogenic temperature control apparatus and method.
  18. Hughes, Michael F.; Lutes, Paul J.; Crowder, Don D.; Tiefenbrun, Alan P., Delivery system for liquefied gas with maintained delivery tank pressure.
  19. Allidieres, Laurent, Device and method for pumping a cryogenic fluid.
  20. Kim, Hoisan; Sommars, Mark F.; Stockner, Alan R., Dual fuel engine and evaporated natural gas system.
  21. Viegas, Herman H.; Seshadri, Jayaram, Environmentally friendly method and apparatus for cooling a temperature controlled space.
  22. Taube, Joel A., Gaseous fluid production apparatus and method.
  23. Taube,Joel A., Gaseous fluid production apparatus and method.
  24. Sheydayi,Alexei; Sutton,Thomas, Gate valve for plus-atmospheric pressure semiconductor process vessels.
  25. Sutton, Thomas R.; Biberger, Maximilan A., High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism.
  26. Jones, William D., High pressure fourier transform infrared cell.
  27. Biberger, Maximilian A.; Layman, Frederick Paul; Sutton, Thomas Robert, High pressure processing chamber for semiconductor substrate.
  28. Biberger,Maximilian A.; Layman,Frederick Paul; Sutton,Thomas Robert, High pressure processing chamber for semiconductor substrate.
  29. Gram, Anker; Noble, Stephen Duncan, High pressure pump system for supplying a cryogenic fluid from a storage tank.
  30. Gram, Anker; Noble, Stephen Duncan, High pressure pump system for supplying a cryogenic fluid from a storage tank.
  31. Jones,William Dale, High-pressure processing chamber for a semiconductor wafer.
  32. Jones,William Dale, High-pressure processing chamber for a semiconductor wafer.
  33. Viegas, Herman H.; Vander Woude, David J.; Nilsson, Hans-Olof, Hybrid temperature control system.
  34. Buysse, John; Story, Rick, Hydraulic oil cooler and supplying vessel pressure stabilizer.
  35. Sheydayi,Alexei, Method and apparatus for clamping a substrate in a high pressure processing system.
  36. Goshi,Gentaro, Method and apparatus for cooling motor bearings of a high pressure pump.
  37. Forgash David John (Naperville IL) Korzonas Raymond (Palos Hills IL) Neuhalfen Bryan Patrick (Lake Charles LA) Rhoades George D. (LaGrange IL) Sudduth Jack Wayne (Clarendon Hills IL) Conrad Mervyn La, Method and apparatus for fueling vehicles with liquefied cryogenic fuel.
  38. Kooy Richard John ; Conrad Mervyn Ladd ; Forgash David John ; Korzonas Raymond ; Neuhalfen Bryan Patrick ; Rhoades George D. ; Sudduth Jack Wayne, Method and apparatus for fueling vehicles with liquefied cryogenic fuel.
  39. Waldschmidt, John E.; Shaw, John J.; VanderWoude, David J., Method and apparatus for moving air through a heat exchanger.
  40. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Method and apparatus for supercritical processing of multiple workpieces.
  41. Parent,Wayne M.; Goshi,Gentaro, Method and system for cooling a pump.
  42. Parent,Wayne M., Method and system for determining flow conditions in a high pressure processing system.
  43. Parent, Wayne M.; Geshell, Dan R., Method and system for passivating a processing chamber.
  44. Hansen,Brandon; Lowe,Marie, Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid.
  45. Faudou, Jean-Yves; Lehman, Jean-Yves; Pregassame, Jaya-Sitra, Method for controlled filling of pressurized gas tanks.
  46. Woodall Robert M. ; Minta Moses, Method for displacing pressurized liquefied gas from containers.
  47. Kawamura,Kohei; Asano,Akira; Miyatani,Koutarou; Hillman,Joseph T.; Palmer,Bentley, Method for supercritical carbon dioxide processing of fluoro-carbon films.
  48. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Method for supercritical processing of multiple workpieces.
  49. Biberger,Maximilian Albert; Layman,Frederick Paul; Sutton,Thomas Robert, Method of supercritical processing of a workpiece.
  50. Chalk,David Jonathan; Farese,David John, Multi-speed compressor/pump apparatus.
  51. Sheydayi,Alexei, Non-contact shuttle valve for flow diversion in high pressure systems.
  52. Castellanet Frederic,FRX, Plant and process for supplying helium to a plurality of production lines.
  53. Sheydayi,Alexei, Pressure energized pressure vessel opening and closing device and method of providing therefor.
  54. Rhoades George D. (LaGrange IL), Process and apparatus for conditioning cryogenic fuel to establish a selected equilibrium pressure.
  55. Aspelund, Audun; Krogstad, Henrik; Sandvik, Tor Erling; Fivelstad, Jan Einar; Henningsen, Roar Frode; Wongraven, Leif Roar; Hilden, Tor Erik; Oma, Narve, Process and apparatus for injecting LCD into an offshore injection well.
  56. Wuester,Christopher D., Process flow thermocouple.
  57. Kimble E. Lawrence, Process for producing a displacement gas to unload pressurized liquefied gas from containers.
  58. Rigby James R., Process for unloading pressurized liquefied natural gas from containers.
  59. Moffitt, Jr., Roy Malcolm, Refueling method for supplying fuel to fracturing equipment.
  60. Moffitt, Jr., Roy Malcolm, Refueling method for supplying fuel to fracturing equipment.
  61. Moffitt, Jr., Roy Malcolm, Refueling system for supplying fuel to fracturing equipment.
  62. Moffitt, Jr., Roy Malcolm, Refueling system for supplying fuel to fracturing equipment.
  63. Mullee, William H., Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process.
  64. Gale,Glenn; Hillman,Joseph T.; Jacobson,Gunilla; Palmer,Bentley, System and method for processing a substrate using supercritical carbon dioxide processing.
  65. Diggins, David A., System and method for unloading compressed natural gas.
  66. Jacobson,Gunilla; Yellowaga,Deborah, Treatment of a dielectric layer using supercritical CO.
  67. Kevwitch, Robert, Treatment of substrate using functionalizing agent in supercritical carbon dioxide.
  68. Sheydayi,Alexei, Vacuum chuck utilizing sintered material and method of providing thereof.
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