[특허]Apparatus for detecting extraneous substances on a glass plate

Apparatus for detecting extraneous substances on a glass plate 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01N-021/00 G01J-004/00
출원번호	US-0813837 (1991-12-27)
우선권정보	JP-0414979 (1990-12-27)
발명자 / 주소	Kato Noboru (Hadano JPX) Horai Izuo (Odawara JPX) Kimura Toshihiro (Fujisawa JPX) Koizumi Mitsuyoshi (Yokohama JPX)
출원인 / 주소	Hitachi Electronics Engineering Co., Ltd. (Tokyo JPX 03)
인용정보	피인용 횟수 : 36 인용 특허 : 0

초록 ▼

An apparatus for detecting extraneous substances on a glass plate includes a first light projecting system arranged above a plane under examination on a glass plate, the surface of which is irradiated with an S-polarized laser beam at a first elevation angle, a second light projecting system arranged above the surface thereof which is irradiated with a P-polarized laser beam at a second elevation angle greater than the first elevation angle, and a light receiving system for receiving scattered light from the surface irradiated with the laser beams respectively emitted from the first and the second light projecting system at an elevation angle smaller than the first elevation angle. The light receiving system is arranged on a side opposite to the direction of irradiation with the normal line set up at the laser beam irradiation point therebetween and the output level of the P-polarized laser beam is set in specific relation to the S-polarized laser beam.

대표청구항 ▼

An apparatus for detecting an extraneous substance on a glass plate, the apparatus comprising a first light projecting system for irradiating the surface of the glass plate with an S-polarized laser beam at a first elevation angle as viewed from the surface thereof under examination for extraneous substance detection, a second light projecting system for irradiating the surface under examination with a P-polarized laser beam at a second elevation angle greater than the first elevation angle, and a light receiving system for receiving scattered light from the surface under examination, which has received laser beams from the first and the second light projecting systems, at a third elevation angle smaller than the first elevation angle, and the light receiving system being arranged so that the normal line to the surface at the laser beam irradiation point is located between the first and second light projecting systems and the light receiving system, wherein a first detection level is defined as a detection level of the scattered light detected in the light receiving system when an extraneous substance having a particle diameter on the surface under examination is irradiated with an S-polarized laser beam, a second detection level is defined as a detection level of the scattered light detected in the light receiving system when the extraneous substance is irradiated, via the glass substrate, with the S-polarized laser beam, with the glass plate being turned upside down, a third detection level is defined as a detection level of the scattered light detected in the light receiving system when the extraneous substance is irradiated with the P-polarized laser beam, and a fourth detection level is defined as a detection level of the scattered light detected in the light receiving system when the extraneous substance is irradiated with the P-polarized laser beam via the glass plate with the glass plate turned upside down; wherein the output level of the P-polarized laser beam is set so that the third and fourth detection levels fall between the first and second detection levels; and wherein when the signal level obtainable by the light receiving system which corresponds to the irradiation of the S-polarized laser beam is greater than the signal level that is obtainable thereby correspondingly to that of the P-polarized laser beam, the extraneous substance is judged to exist on the surface under examination.

이 특허를 인용한 특허 (36)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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Apparatus for detecting extraneous substances on a glass plate 원문보기

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Apparatus for detecting extraneous substances on a glass plate 원문보기

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