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Monolithic circuit with integrated bulk structure resonator

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/66
  • H01L-029/96
출원번호 US-0681258 (1991-04-08)
발명자 / 주소
  • Dunn William C. (Mesa AZ) Liaw H. Ming (Scottsdale AZ) Ristic Ljubisa (Phoenix AZ) Roop Raymond M. (Scottsdale AZ)
출원인 / 주소
  • Motorola, Inc. (Schaumburg IL 02)
인용정보 피인용 횟수 : 85  인용 특허 : 0

초록

A structure is provided to integrate bulk structure resonators into a monolithic integrated circuit chip. The chip also contains the remaining circuit components (17, 21, 24) required for the desired system function. Micromachining techniques are used to fabricate both support and a cavity (11, 27,

대표청구항

A monolithic circuit with integrated bulk structure resonator, comprising: a semiconductor substrate; a plurality of integrated circuit components fabricated as part of the semiconductor substrate; a mass supported by a spring directly mounted on the semiconductor substrate; exciting means for apply

이 특허를 인용한 특허 (85)

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