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Method and apparatus for recovering multicomponent vapor mixtures

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-008/00
  • A61L-002/00
  • F25J-001/00
출원번호 US-0028742 (1993-03-09)
발명자 / 주소
  • Missimer Dale J. (San Anselmo CA)
출원인 / 주소
  • Polycold Systems International (San Rafael CA 02)
인용정보 피인용 횟수 : 37  인용 특허 : 0

초록

A vapor recovery apparatus which withdraws multicomponent vapor mixtures from processing apparatus (such as gas sterilizers) by condensation at two or more progressively colder levels while maintaining an appropriate balance between components during steps of capture and phase change. Two cold traps

대표청구항

A method for recovering a vapor mixture of chemical compounds used in an enclosed chamber, said method comprising the steps of: providing a recovery apparatus for drawing the mixture from said chamber into a first cold trap; cooling the mixture in said first cold trap to a first temperature level wh

이 특허를 인용한 특허 (37)

  1. DiCenzo, Anthony M.; Bruschi, Joseph P.; Parlett, James G.; Galasso, Douglas Anthony; Crooks, Tab Hunter, CO2 collection methods and systems.
  2. Ji, Chunhai; Reddy, Sirish; Wang, Tuo; Sriram, Mandyam, Carbon deposition-etch-ash gap fill process.
  3. Hall, John C.; Galasso, D. Anthony; Magnuson, Jon A., Carbon dioxide separation system and method.
  4. Zito Richard R. (Tucson AZ), Controlled multiple storage vessel gas trap.
  5. Yu, Yongsik; Subramonium, Pramod; Fang, Zhiyuan; Henri, Jon; Apen, Elizabeth; Vitkavage, Dan, Diffusion barrier and etch stop films.
  6. Galasso, D. Anthony, Dual stream system and method for producing carbon dioxide.
  7. Coyle, Michael J.; Gatchell, Ronald A.; Stewart, Philip Marc; Maalouf, Kimberly S., External condensation tank for a sterilizer.
  8. Coyle, Michael J.; Chow, George; Gatchell, Ronald A.; Stewart, Philip Marc; Maalouf, Kimberly S., Handle for portable sterilizing apparatus.
  9. Reddy, Sirish K.; Ji, Chunhai; Chen, Xinyi; Subramonium, Pramod, High selectivity and low stress carbon hardmask by pulsed low frequency RF power.
  10. Shamma, Nader; van Schravendijk, Bart J.; Reddy, Sirish K.; Ji, Chunhai, Image reversal with AHM gap fill for multiple patterning.
  11. Graff, Wesley P., Method for etching organic hardmasks.
  12. Shamma, Nader; van Schravendijk, Bart; Reddy, Sirish; Ji, Chunhai, Method for forming a mask by etching conformal film on patterned ashable hardmask.
  13. Hsu, Gishun; Merrill, Charles; Stoddard, Scott, Method for purifying acetylene gas for use in semiconductor processes.
  14. Hsu, Gishun; Merrill, Charles; Stoddard, Scott, Method for purifying acetylene gas for use in semiconductor processes.
  15. Klobusnik, Kenneth J, Method of performing sterilization cycle.
  16. Subramonium, Pramod; Bingham, Aaron; Thomas, Tim; Henri, Jon; Farhner, Greg, Methods and apparatus for plasma-based deposition.
  17. Fox, Keith; Hausmann, Dennis, Methods for forming conductive carbon films by PECVD.
  18. Subramonium, Pramod; Fang, Zhiyuan; Henri, Jon, Methods of depositing highly selective transparent ashable hardmask films.
  19. Subramonium, Pramod; Fang, Zhiyuan; Hancock, Shawn; Pierce, Mike; Henri, Jon, Methods of depositing smooth and conformal ashable hard mask films.
  20. Subramonium, Pramod; Fang, Zhiyuan; Hancock, Shawn; Pierce, Mike; Henri, Jon, Methods of depositing smooth and conformal ashable hard mask films.
  21. Subramonium, Pramod; Yu, Yongsik; Fang, Zhiyuan; Henri, Jon, Methods of depositing stable and hermetic ashable hardmask films.
  22. Wallman, Daniel J.; Galasso, D. Anthony; Magnuson, Jon A.; Grayson, Gary D.; Crooks, Tab H., Monolithic contactor and associated system and method for collecting carbon dioxide.
  23. Shamma, Nader; Mountsier, Thomas; Schlosser, Don, PECVD films for EUV lithography.
  24. Shamma, Nader; Mountsier, Thomas; Schlosser, Donald, PECVD films for EUV lithography.
  25. Coyle, Michael J.; Chow, George; Gatchell, Ronald A.; Stewart, Philip Marc; Maalouf, Kimberly S., Portable sterilizing apparatus.
  26. Coyle, Michael J.; Gatchell, Ronald A.; Jones, Richard L.; Stewart, Philip Marc; Clapp, James E.; Harris, Dennis L., Portable sterilizing apparatus for surgical and dental instruments.
  27. Subramonium, Pramod; Fang, Zhiyuan; Henri, Jon, Pulsed PECVD method for modulating hydrogen content in hard mask.
  28. Wayne Thomas McDermott ; Richard Carl Ockovic ; Alexander Schwarz ; Rakesh Agrawal, Reclamation and separation of perfluorocarbons using condensation.
  29. Reddy, Sirish K.; Hollister, Alice G.; Lill, Thorsten, Sulfur doped carbon hard masks.
  30. Galasso, D. Anthony; Magnuson, Jon A., System and method for processing greenhouse gases.
  31. Hall, John C.; Galasso, D. Anthony; Magnuson, Jon A., System and method for producing carbon dioxide.
  32. Bondar, Douglas E., System and method for recycling sterilant gas.
  33. Bondar, Douglas E., System and method for recycling sterilant gas.
  34. Bondar, Douglas E.; Bongiovi, Michael L., System and method for recycling sterilant gas.
  35. Vogel, John S.; Ognibene, Ted J.; Bench, Graham S.; Peaslee, Graham F., System for trapping and storing gases for subsequent chemical reduction to solids.
  36. Ziegler Alex R., Vacuum-insulated refrigerant line for allowing a vaccum chamber system with water-vapor cryocoil compressor to be locatable outside cleanroom.
  37. Coyle, Michael J.; Gatchell, Ronald A.; Jones, Richard L.; Stewart, Philip Marc; Clapp, James E.; Harris, Dennis L., Water management system for sterilizer.
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