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Elastic and plastic deformation of backing plate members in target-backing plate cathode assemblies for cathodic sputter coating apparatus are minimized by the provision of a concave surface portion located at the target/backing plate interface and by provision of a backing plate material having a y

Elastic and plastic deformation of backing plate members in target-backing plate cathode assemblies for cathodic sputter coating apparatus are minimized by the provision of a concave surface portion located at the target/backing plate interface and by provision of a backing plate material having a yield strength of at least about 35 ksi.

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Cathode assembly for use in a cathodic sputter coating apparatus, said assembly including a backing plate in contact with a pressurized flow of cooling fluid and being deformable upon application of pressure thereto by said pressurized cooling fluid, a target member carrying material to be sputter c

Cathode assembly for use in a cathodic sputter coating apparatus, said assembly including a backing plate in contact with a pressurized flow of cooling fluid and being deformable upon application of pressure thereto by said pressurized cooling fluid, a target member carrying material to be sputter coated; cooperating mating means connected to said target and said backing plate for coupling said target in heat exchange relation with said backing plate along a target-backing plate interface, said mating means further comprising coupling securing means in the form of a concave surface area located at said target/backing plate interface for inhibiting uncoupling of said mating means otherwise due to deformation of said backing plate said target comprising a top surface carrying said material to be sputter coated and a bottom surface, said backing plate comprising a top surface and a bottom surface in contact with said cooling fluid, said mating means comprising a first set of annularly disposed teeth formed on the bottom surface of said target and a second set of annularly disposed teeth formed on said top surface of said backing plate for engaging said first set of teeth, said concave surface being provided as said top surface of said backing plate, said first set of teeth comprising teeth having a normal wall member extending normal to said target bottom surface and an inclined wall connected to said normal wall member at an acute angle, said second set of annularly disposed teeth each comprising a normal wall member extending normal to said backing plate top surface and an inclined wall connected to said normal wall member at an acute angle, said first and second sets of teeth each being concentrically arranged as a plurality of annularly disposed neighboring rows of teeth formed in said target and backing plate, respectively, at room temperature, the distance from normal wall to normal wall of neighboring rows of said first set of teeth being slightly less than the distance from normal wall to normal wall on said second set of teeth.