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Valve and micropump incorporating said valve 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F04B-017/00
출원번호 US-0838229 (1992-03-04)
우선권정보 CH-0002302 (1990-07-10); CH-0003680 (1990-11-20)
국제출원번호 PCT/EP91/01240 (1991-07-03)
§371/§102 date 19920304 (19920304)
국제공개번호 WO-9201160 (1992-01-23)
발명자 / 주소
  • van Lintel Harald T. G. (Enschede NLX)
출원인 / 주소
  • Westonbridge International Limited (Dublin IEX 03)
인용정보 피인용 횟수 : 91  인용 특허 : 0

초록 ▼

A valve is formed by machining a silicon wafer 18 bonded to a glass wafer 2. This machining forms a membrane 44 and a sealing ring. Part of the surface of the membrane 44 and optionally the sealing ring are oxidized in order to impart a mechanical pre-tension to the membrane holding the valve in a c

대표청구항 ▼

A valve comprising a first wafer in which a deformable membrane is made of a first material, and a second wafer bonded to the first wafer, a sealing ring being provided on the face of one of the wafers and having a free surface capable of contacting the face of the other wafer in a closed position a

이 특허를 인용한 특허 (91)

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