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특허 상세정보

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Apparatus for polishing an article with frozen particles

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B24R-007/00   
미국특허분류(USC) 51/410 ; 51/322 ; 51/436
출원번호 US-0577536 (1990-09-05)
우선권정보 JP-0138277 (1990-05-30)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 47  인용 특허 : 0
초록
▼

A novel and improved polishing apparatus is disclosed which employs ice particles as an abrasive material, the hardness of which can be changed so as to match that of an article being polished for performing polishing operation in a most efficient manner without impairing or marring the polished surface of the article. To this end, the polishing apparatus includes a freezing vessel defining therein an ice particle producing chamber, a coolant supply nozzle mounted on the freezing vessel and connected with a coolant source through a coolant supply line fo...

대표
청구항
▼

A polishing apparatus comprising: frozen particle producing means for producing superfine frozen particles including a freezing vessel containing a frozen particle producing chamber, a coolant supply nozzle mounted on the freezing vessel for spraying a coolant into the frozen particle producing chamber to form a freezing atmosphere in the chamber, and a liquid supply nozzle mounted on the freezing vessel spaced from the coolant supply nozzle for spraying a liquid into the frozen particle producing chamber so that the liquid thus sprayed mixes with, is co...

이 특허를 인용한 특허 피인용횟수: 47

  1. Leach Michael A. (345 Sheridan #204 Palo Alto CA 94306). Block for polishing a wafer during manufacture of integrated circuits. USP1997125702290.
  2. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108545857.
  3. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108563012.
  4. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013108551506.
  5. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for administering compartmentalized frozen particles. USP2013128603494.
  6. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128603495.
  7. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128603496.
  8. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013108545806.
  9. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2014058731842.
  10. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2013128613937.
  11. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for biological remodeling with frozen particle compositions. USP2014078788212.
  12. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069056047.
  13. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069050251.
  14. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2013108545856.
  15. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for delivery of frozen particle adhesives. USP2015069060931.
  16. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2013048409376.
  17. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015079072799.
  18. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058721583.
  19. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058725420.
  20. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2013108545855.
  21. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015069050070.
  22. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2015069060934.
  23. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for surface abrasion with frozen particles. USP2014058722068.
  24. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015079072688.
  25. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015069050317.
  26. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014058731840.
  27. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2015069060926.
  28. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014078793075.
  29. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2014058731841.
  30. Boyden, Edward S.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Compositions and methods for therapeutic delivery with frozen particles. USP2013108551505.
  31. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and array devices thereof. USP2014078784384.
  32. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2014088798932.
  33. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2013108568363.
  34. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2015059040087.
  35. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2014088798933.
  36. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen compositions and methods for piercing a substrate. USP2014108858912.
  37. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Frozen piercing implements and methods for piercing a substrate. USP2014078784385.
  38. Fukano Shuji,JPX ; Fukumoto Hiromichi,JPX ; Kitagawa Hisashi,JPX ; Haishima Akira,JPX ; Kojima Naokatsu,JPX. Method and apparatus for surface processing using ice slurry. USP2001126328631.
  39. Leach Michael A.. Method and structure for polishing a wafer during manufacture of integrated circuits. USP1998115836807.
  40. Leach Michael A. (345 Sheridan #204 Palo Alto CA 94306). Method and structure for polishing a wafer during manufacture of integrated circuits. USP1997035607341.
  41. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Method and system for comparing tissue ablation or abrasion data to data related to administration of a frozen particle composition. USP2014078788211.
  42. Diolaiti, Luigi. Method and system for cooling and effecting a change in state of a liquid mixture. USP2003126666035.
  43. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Methods and systems for ablation or abrasion with frozen particles and comparing tissue surface ablation or abrasion data to clinical outcome data. USP2014068762067.
  44. Kenny Danny ; Lindberg Keith. Solid phase water scrub for defect removal. USP2000106135864.
  45. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Systems, devices and methods for making or administering frozen particles. USP2013088518031.
  46. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Systems, devices, and methods for making or administering frozen particles. USP2013048414356.
  47. Boyden, Edward S.; Cook, Daniel B.; Hyde, Roderick A.; Leuthardt, Eric C.; Myhrvold, Nathan P.; Sweeney, Elizabeth A.; Wood, Jr., Lowell L.. Systems, devices, and methods for making or administering frozen particles. USP2013078485861.

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