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Microstructure design for high IR sensitivity 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01J-005/20
  • G01J-005/22
  • G01J-005/02
출원번호 US-0288701 (1988-11-07)
발명자 / 주소
  • Cole Barrett E. (Bloomington MN)
출원인 / 주소
  • Honeywell Inc. (Minneapolis MN 02)
인용정보 피인용 횟수 : 104  인용 특허 : 0

초록 ▼

A microstructure design for high IR sensitivity having a two level infrared bolometer microstructure, the lower level having a reflective metal film surface such as Pt, Au, or Al to reflect IR penetrating to that level, the upper level being separated from the lower level by an air gap of about 1-2

대표청구항 ▼

A two-level microbridge infrared bolometer structure comprising: a bolometer structure on a semiconductor substrate, said structure having a lower section on the surface of the substrate and a microbridge upper detector plane structure spaced from and immediately above the lower section; an infrared

이 특허를 인용한 특허 (104)

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