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Method of making atomically sharp tips useful in scanning probe microscopes 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G21K-007/00
출원번호 US-0884482 (1992-05-15)
발명자 / 주소
  • Roe Fred L. (Boise ID) Tjaden Kevin (Boise ID)
출원인 / 주소
  • Micron Technology, Inc. (Boise ID 02)
인용정보 피인용 횟수 : 49  인용 특허 : 0

초록

An in situ plasma dry etching process for the formation of atomically sharp tips for use in high resolution microscopes in which i) a mask layer is deposited on a substrate, ii) a photoresist layer is patterned superjacent the mask layer at the sites where the tips are to be formed, iii) the mask is

대표청구항

A process for the formation of microtips, said process comprising the following steps: exposing a patterned substrate to a plasma, thereby creating microtips having a tip size less than 10Å; and segmenting the substrate in order to separate at least some of the plurality of microtips from each other

이 특허를 인용한 특허 (49)

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  5. Xu Shaohua ; Arnsdorf Morton F., Atomic force microscope for biological specimens.
  6. Itoh Junju (Ibaraki-ken JPX) Toma Yasushi (Ibaraki-ken JPX), Cantilever for use with atomic force microscope and process for the production thereof.
  7. Kley, Victor B., Fluid delivery for scanning probe microscopy.
  8. Kley,Victor B., Fluid delivery for scanning probe microscopy.
  9. Wilson,Amy Hetz, Fuel dispensing system for cash customers.
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  12. Kley, Victor B., Low-friction moving interfaces in micromachines and nanomachines.
  13. Wilson, Amy Hetz, Loyalty rewards for cash customers at a fuel dispensing system.
  14. Kley, Victor B., Manufacturing of micro-objects such as miniature diamond tool tips.
  15. Kley, Victor B., Method and apparatus for micromachines, microstructures, nanomachines and nanostructures.
  16. Kley, Victor B., Method and apparatus for micromachines, microstructures, nanomachines and nanostructures.
  17. Kley,Victor B., Method and apparatus for micromachines, microstructures, nanomachines and nanostructures.
  18. Kley, Victor B., Method and apparatus for scanning in scanning probe microscopy and presenting results.
  19. Kley,Victor B., Method and apparatus for scanning in scanning probe microscopy and presenting results.
  20. Kley, Victor B.; LoBianco, Robert T., Method and apparatus for tool and tip design for nanomachining and measurement.
  21. Krishnan, Mahadevaiyer; Lagus, Mark E.; Petrarca, Kevin S.; Ryan, James G.; Volant, Richard P., Method for fabricating a scanning probe microscope probe.
  22. Aaron R. Wilson, Method for forming uniform sharp tips for use in a field emission array.
  23. Aaron R. Wilson, Method for forming uniform sharp tips for use in a field emission array.
  24. Wilson Aaron R., Method for forming uniform sharp tips for use in a field emission array.
  25. Wilson, Aaron R., Method for forming uniform sharp tips for use in a field emission array.
  26. Wilson, Aaron R., Method for forming uniform sharp tips for use in a field emission array.
  27. Wilson, Aaron R., Method for forming uniform sharp tips for use in a field emission array.
  28. David A. Cathey ; Kevin Tjaden, Methods of making an etch mask and etching a substrate using said etch mask.
  29. Gordon M. Babson ; Anthony M. Palagonia, Micro probe and method of fabricating same.
  30. Cresswell Michael W. ; Ghoshtagore R. N. ; Linholm Loren W. ; Allen Richard A. ; Sniegowski Jeffry J. ; Penzes William B. ; Gaitan Michael, Monocrystalline test and reference structures, and use for calibrating instruments.
  31. Cresswell Michael W. (Frederick MD) Ghoshtagore R. N. (Ellicott City MD) Linholm Loren W. (Ijamsville MD) Allen Richard A. (Germantown MD) Sniegowski Jeffry J. (Albuquerque NM), Monocrystalline test structures, and use for calibrating instruments.
  32. Kley,Victor B., Nanomachining method and apparatus.
  33. Kley, Victor B., Nanometer scale data storage device and associated positioning system.
  34. Kley,Victor B., Nanometer scale data storage device and associated positioning system.
  35. Kley,Victor B., Object inspection and/or modification system and method.
  36. Okulan,Nihat; Chand,Ami, Probes for use in scanning probe microscopes and methods of fabricating such probes.
  37. Bothra Subhas ; Qian Ling Q., Process for manufacturing ultra-sharp atomic force microscope (AFM) and scanning tunneling microscope (STM) tips.
  38. Hartsell ; Jr. Hal Craig, Providing transaction estimates in a fueling and retail system.
  39. Roessler,Kenneth; Chen,Dong, Scan data collection for better overall data accuracy.
  40. Roessler, Kenneth; Chen, Dong, Scan data collection for better overall data accurancy.
  41. Kley,Victor B., Scanning probe microscope assembly.
  42. Kley,Victor B., Scanning probe microscope assembly.
  43. Kley, Victor B., Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements.
  44. Victor B. Kley, Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements.
  45. Kley,Victor B., Scanning probe microscopy inspection and modification system.
  46. Kley,Victor B., Scanning probe microscopy inspection and modification system.
  47. Kley, Victor B., Sharpness testing of micro-objects such as miniature diamond tool tips.
  48. Hartsell ; Jr. Hal Craig, Transponder communication of ORVR presence.
  49. Leatherman, Russel Dean, Wireless nozzle interface for a fuel dispenser.
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