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Process for sorption of hazardous waste products from exhaust gas streams 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C01C-003/00
  • B01D-047/00
  • C01B-007/00
  • B01J-008/00
출원번호 US-0937243 (1992-08-28)
발명자 / 주소
  • Hardwick, Steven
  • McManus, James V.
출원인 / 주소
  • Novapure Corporation
대리인 / 주소
    Hultquist, Steven J.
인용정보 피인용 횟수 : 78  인용 특허 : 9

초록

A method for cleaning an exhaust gas containing ammonia and at least one silicon-containing compound selected from the group consisting of silane and chlorosilanes, which comprises contacting the exhaust gas with a scavenger comprising a metal salt which forms tight complexes with ammonia. This ammi

대표청구항

1. A dry scrubbing method for cleaning a gas mixture containing ammonia and least one silicon-containing gaseous component selected from the group consisting of silane and chlorosilanes, wherein the ratio R of the concentration of ammonia to the concentration of said at least one silicon-containing

이 특허에 인용된 특허 (9)

  1. Kitayama Masayasu (Kawasaki JPX) Sugimori Yoshiaki (Tokyo JPX) Ohta Schunich (Fujisawa JPX), Absorbent for treating gases containing the materials used for semiconductor products and process of treating such gases.
  2. Tom Glenn M. (New Milford CT), Bulk gas sorption and apparatus, gas containment/treatment system comprising same, and sorbent composition therefor.
  3. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT) Luxon Bruce A. (Stamford CT), Composition, apparatus, and process, for sorption of gaseous compounds of group II-VII elements.
  4. Tom Glenn M. (New Milford CT) McManus James V. (Danbury CT), Composition, process, and apparatus, for removal of water and silicon mu-oxides from chlorosilanes.
  5. Gkcek Cetin (Muhlheim DEX), Copper sulfate absorption mass to remove AsH3, PH3, B2H6, GeH 상세보기
  • Tom Glenn M. (New Milford CT) Brown Duncan W. (Wilton CT), Process and composition for purifying arsine, phosphine, ammonia, and inert gases to remove Lewis acid and oxidant impur.
  • Chao Chien C. (Millwood NY) Rastelli Henry (New Fairfield CT), Process for purification of hydrocarbons.
  • Nowack G. P. (Bartlesville OK) Johnson M. M. (Bartlesville OK), Process for removal of arsenic from gases.
  • Schwarzenbek Eugene F. (3230 Seacrest Dr. Lavallette NJ 08735), Synthetic ammonia process.
  • 이 특허를 인용한 특허 (78)

    1. Holst, Mark; Dubois, Ray; Arno, Jose; Faller, Rebecca; Tom, Glenn, Abatement of effluents from chemical vapor deposition processes using organometallic source reagents.
    2. Holst, Mark; Dubois, Ray; Arno, Jose; Faller, Rebecca; Tom, Glenn, Abatement of effluents from chemical vapor deposition processes using organometallic source reagents.
    3. Baldrey, Kenneth E.; Sjostrom, Sharon; French, Nina Bergan; Durham, Michael D., Additives for mercury oxidation in coal-fired power plants.
    4. Baldrey, Kenneth E.; Sjostrom, Sharon; French, Nina Bergan; Durham, Michael D., Additives for mercury oxidation in coal-fired power plants.
    5. Dillon, Martin A.; Filippelli, Gregory M., Air treatment process for dilute phase injection of dry alkaline materials.
    6. Dillon, Martin A.; Filippelli, Gregory M., Air treatment process for dilute phase injection of dry alkaline materials.
    7. Croll, Lisa M.; Dahn, Jeffrey R.; Siedle, Allen R.; Smith, Jock W. H.; Westreich, Philippe; Wood, Thomas E., Ammonia-free gaseous air filter.
    8. Crisp, III, Harry Lee, Appliance having a user interface panel and a beverage dispenser.
    9. Crisp, III, Harry Lee, Appliance having a user interface panel and a beverage dispenser.
    10. Crisp, III, Harry Lee, Appliance having a user interface panel and a beverage dispenser.
    11. Crisp, III, Harry Lee, Appliance having a user interface panel and a beverage dispenser.
    12. Crisp, III, Harry Lee, Appliance having a user interface panel and a beverage dispenser.
    13. Crisp, III, Harry Lee, Appliance having a user interface panel and a beverage dispenser.
    14. Crisp, III, Harry Lee, Appliance having a user interface panel and a beverage dispenser.
    15. Crisp, III,Harry Lee, Appliance operable with supply distribution, dispensing and use system and method.
    16. Crisp, Harry Lee, Appliance with dispenser.
    17. Crisp, III, Harry Lee, Appliance with dispenser.
    18. Crisp, III, Harry Lee, Appliance with dispenser.
    19. Crisp, III, Harry Lee; Ramsey, Christopher Paul; Tanner, Roger, Appliance with dispenser.
    20. Crisp, III, Harry Lee; Duff, Todd Erik, Beverage dispensing apparatus having a valve actuator control system.
    21. Crisp, III,Harry Lee; Duff,Todd Erik, Beverage dispensing apparatus having drink supply canister holder.
    22. Crisp, III, Harry Lee; Duff, Todd Erik, Beverage dispensing apparatus having fluid director.
    23. Hino, Yuko; Ishida, Kazushige; Usui, Naoshi, Boiling water nuclear plant and steam dryer.
    24. Brey,Larry A.; Smith,Simon J.; Weagle,Glenn E., Broad spectrum filter system including tungsten-based impregnant and being useful for filtering contaminants from air or other gases.
    25. Brey,Larry A.; Smith,Simon J.; Weagle,Glenn E., Broad spectrum filter system including tungsten-based impregnant and being useful for filtering contaminants from air or other gases.
    26. Regits, Michael A.; Luftman, Henry S.; Lorcheim, Paul W., Chlorine dioxide decontamination system and method.
    27. Ishii Yasu (Kanagawa JPX) Akita Noboru (Kanagawa JPX), Cleaning method for exhaust gas containing ammonia and silane.
    28. Sjostrom, Sharon; Baldrey, Kenneth E.; Senior, Constance, Control of wet scrubber oxidation inhibitor and byproduct recovery.
    29. Sjostrom, Sharon; Baldrey, Kenneth E.; Senior, Constance, Control of wet scrubber oxidation inhibitor and byproduct recovery.
    30. Sjostrom, Sharon; Baldrey, Kenneth E.; Senior, Constance, Control of wet scrubber oxidation inhibitor and byproduct recovery.
    31. Sjostrom, Sharon; Baldrey, Kenneth E.; Senior, Constance, Control of wet scrubber oxidation inhibitor and byproduct recovery.
    32. Crisp, III,Harry Lee, Dishwasher operable with supply distribution, dispensing and use system method.
    33. Crisp, III, Harry Lee, Drink supply canister for beverage dispensing apparatus.
    34. Crisp, III,Harry Lee; Ramsey,Christopher Paul; Tanner,Roger, Drink supply canister for beverage dispensing apparatus.
    35. Crisp, III,Harry Lee, Drink supply canister having a drink supply outlet valve with a rotatable member.
    36. Crisp, III,Harry Lee, Drink supply canister having a self-closing pressurization valve operable to receive a pressurization pin.
    37. Crisp, III, Harry Lee; Ramsey, Christopher Paul; Tanner, Roger, Drink supply container having an end member supporting gas inlet and outlet valves which extend perpendicular to the end member.
    38. Crisp, III,Harry Lee; Ramsey,Christopher Paul; Tanner,Roger, Drink supply container valve assembly.
    39. Holst, Mark; Carpenter, Kent; Lane, Scott; Arya, Prakash V., Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases.
    40. Horiuchi Takashi,JPX ; Kobayashi Sensho,JPX ; Itoh Masahide,JPX ; Gomi Hisashi,JPX, Exhaust system for film forming apparatus.
    41. Kasai, Hitoshi; Okahisa, Takuji; Fujita, Shunsuke; Matsumoto, Naoki; Ijiri, Hideyuki; Sato, Fumitaka; Motoki, Kensaku; Nakahata, Seiji; Uematsu, Koji; Hirota, Ryu, Fabrication method and fabrication apparatus of group III nitride crystal substance.
    42. Grözinger, Stefan; Simonovic, Denis; Beigl, Martin, Gas cabinet.
    43. Durham, Michael D.; Sjostrom, Sharon; Baldrey, Kenneth E., Hot-side method and system.
    44. Durham, Michael D.; Sjostrom, Sharon; Baldrey, Kenneth E., Hot-side method and system.
    45. Durham, Michael D.; Sjostrom, Sharon; Baldrey, Kenneth E., Hot-side method and system.
    46. Durham, Michael D.; Sjostrom, Sharon; Baldrey, Kenneth E., Hot-side method and system.
    47. Tabler Terry A. ; Lurcott Steven M., Leak detection device, and fluid vessel assembly comprising same.
    48. Durham, Michael D.; Sjostrom, Sharon; Baldrey, Kenneth E., Method and system for controlling mercury emissions from coal-fired thermal processes.
    49. Durham, Michael D.; Sjostrom, Sharon; Baldrey, Kenneth E.; French, Nina Bergan; Bisque, Ramon, Method and system for controlling mercury emissions from coal-fired thermal processes.
    50. Durham, Michael; French, Nina Bergan; Bisque, Ramon E.; Baldrey, Kenneth E., Method and system for controlling mercury emissions from coal-fired thermal processes.
    51. Sjostrom, Sharon; Senior, Connie; Lagarenne, Jon, Method and system for controlling mercury emissions from coal-fired thermal processes.
    52. Sjostrom, Sharon; Senior, Connie; Lagarenne, Jon; Baldrey, Kenneth E.; Bisque, Ramon; Durham, Michael D.; French, Nina Bergan, Method and system for controlling mercury emissions from coal-fired thermal processes.
    53. Mark Holst ; Ray Dubois ; Jose Arno ; Rebecca Faller ; Glenn Tom, Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents.
    54. Tom Glenn M. ; Miller Cynthia A., Piezoelectric end point sensor for detection of breakthrough of fluid, and fluid processing apparatus comprising same.
    55. Tom Glenn M., Piezoelectric quartz crystal hydrogen sensor, and hydrogen sensing method utilizing same.
    56. Shimada Takashi (Hiratsuka JPX) Okumura Toshio (Hiratsuka JPX) Hatakeyama Toshiya (Hiratsuka JPX), Process for cleaning harmful gas.
    57. Dillon, Martin A.; Filippelli, Gregory M., Process for dilute phase injection of dry alkaline materials.
    58. Rauleder, Hartwig; Bollenrath, Franz-Michael; Seiler, Harald; Kuzma, Mieczyslaw; Koopmann, Christoph, Process for the separation of chlorosilanes from gas streams.
    59. Rauleder,Hartwig; Bollenrath,Franz Michael; Seiler,Harald; Kuzma,Mieczyslaw; Koopmann,Christoph, Process for the separation of chlorosilanes from gas streams.
    60. Martin, Cameron E., Process to enhance mixing of dry sorbents and flue gas for air pollution control.
    61. Tom Glenn M. ; King Mackenzie E., Quartz crystal microbalance sensors and semiconductor manufacturing process systems comprising same.
    62. Tom Glenn M., Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream.
    63. Crisp, III,Harry Lee, Refrigerator having a beverage dispenser and a display device.
    64. Crisp, III,Harry Lee; Duff,Todd Erik, Refrigerator having a beverage dispensing apparatus with a drink supply canister holder.
    65. Crisp, III,Harry Lee; Duff,Todd Erik, Refrigerator having a fluid director access door.
    66. Crisp, III,Harry Lee; Duff,Todd Erik, Refrigerator having a gas line which pressurizes a drink supply container for producing beverages.
    67. Crisp, III, Harry Lee; Duff, Todd Erik, Refrigerator having a gas supply apparatus for pressurizing drink supply canisters.
    68. Crisp, III,Harry Lee, Refrigerator operable to display an image and output a carbonated beverage.
    69. Crisp, III,Harry Lee, Refrigerator that displays beverage images, reads beverage data files and produces beverages.
    70. Crisp, III,Harry Lee; Duff,Todd Erik, Refrigerator which removably holds a drink supply container having a valve co-acting with an engager.
    71. Choate Charles A. ; Lunn Michael R, Silane oxidation exhaust trap.
    72. Choate, Charles A.; Lunn, Michael R., Silane oxidation exhaust trap.
    73. Nelson, Jr., Sidney G., Sorbents and methods for the removal of mercury from combustion gases.
    74. Hanson, Ronald D.; Martin, Cameron E.; Wewer, Robert W.; Boerema, Randall J.; Derritt, Tyler J.; McCann, Nicole M., System and method for dense phase sorbent injection.
    75. Crisp, III,Harry Lee, System and method for distributing drink supply containers.
    76. Crisp, III, Harry Lee, Washing machine operable with supply distribution, dispensing and use system method.
    77. Crisp, III,Harry Lee, Water supplier for a beverage dispensing apparatus of a refrigerator.
    78. Tong, Lee Kok; Chee, Chong Peng, Wet abatement system for waste SiH4.

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