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Micromechanical actuator 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-031/08
출원번호 US-0634154 (1990-12-11)
우선권정보 DE-3914031 (1989-12-28)
국제출원번호 PCT/EP90/00634 (1990-04-19)
§371/§102 date 19901211 (19901211)
국제공개번호 WO-9013750 (1990-11-15)
발명자 / 주소
  • Bosch Dieter (Mnchen DEX) Seidel Helmut (Starnbert DEX) Mck Gunter (Holzkirchen DEX)
출원인 / 주소
  • Messerschmitt-Blkow-Blohm GmbH (DEX 03)
인용정보 피인용 횟수 : 92  인용 특허 : 0

초록 ▼

A micromechanical actuator is suggested, the movable part of which, such as the diaphragm, the bending bar or a similar device, can be moved relative to a stationary part by a combination of electromagnetic and electrostatic forces. The manufacturing techniques and the applications of the actuator a

대표청구항 ▼

In a micromechanical actuator, apparatus comprising: a stationary part; a movable part having a relatively small thickness in relation to a longitudinal dimension and surface dimensions thereof; said movable part having at least a rest position and a deflected position; an electrostatic field genera

이 특허를 인용한 특허 (92)

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