초록 ▼

Temperature controller apparatus for generating a control signal for supply to a control device which controls the temperature inside a chamber. The apparatus includes a plurality of input devices each receiving an indication of the temperature at a respective location in the chamber. Each of the re

Temperature controller apparatus for generating a control signal for supply to a control device which controls the temperature inside a chamber. The apparatus includes a plurality of input devices each receiving an indication of the temperature at a respective location in the chamber. Each of the received temperature indications is processed so as to form the control signal. In the event that any of the input devices fails to receive the respective temperature indication, output signals from such input devices are not utilized in forming the control signal. If all of the input devices fail to receive the respective temperature indications, the control signal is obtained from either previous control signals or previously stored control data.

대표청구항 ▼

Temperature controller apparatus for generating a temperature control signal for supply to a device which regulates flow of a coolant into a chamber so as to control the temperature of said chamber so as to maintain said chamber at a desired one of a plurality of set temperatures, said apparatus com

Temperature controller apparatus for generating a temperature control signal for supply to a device which regulates flow of a coolant into a chamber so as to control the temperature of said chamber so as to maintain said chamber at a desired one of a plurality of set temperatures, said apparatus comprising: memory means for storing predetermined control data, said predetermined control data being related to said set temperatures; a plurality of input means for receiving input signals representing temperatures at respective locations in said chamber and for processing each of said respective input signals so as to form respective temperature signals and for outputting the same therefrom; means for determining whether each of said input means receives the respective input signal; means for producing a fail signal in response to any of said input means failing to receive the respective input signal; means responsive to said fail signal for selecting only the respective output temperature signal from each of said input means which received the respective input signal; and means for processing each selected temperature signal so as to produce said temperature control signal without utilizing said predetermined control data, said means for processing including means for generating said temperature control signal from said predetermined control data stored in said memory means based upon the desired set temperature when none of said input means receives the respective input signal.