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Shape memory alloy film actuated microvalve

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-031/00
출원번호 US-0049572 (1993-04-19)
발명자 / 주소
  • Johnson A. David (San Leandro CA) Ray Curtis A. (Alamo CA)
출원인 / 주소
  • TiNi Alloy Company (San Leandro CA 02)
인용정보 피인용 횟수 : 196  인용 특허 : 0

초록

A sub-miniature valve which provides an actuator of shape memory alloy film coupled so as to move a poppet adjacent to a valve port. The shape memory alloy film actuator is thermally cycled through its phase change transition temperature, resulting in either a contraction or elongation of the actuat

대표청구항

A method of controlling the flow of fluid through a valve having a port which communicates with a flow passage, the method comprising the steps of providing a thin film control element which is comprised of a deformable thin film portion formed of a shape memory alloy material having a certain phase

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