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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
---|---|
국제특허분류(IPC7판) |
|
출원번호 | US-0093744 (1993-07-20) |
우선권정보 | CH-0002299 (1992-07-21) |
발명자 / 주소 |
|
인용정보 | 피인용 횟수 : 4 인용 특허 : 0 |
A cryopump includes a housing in which is mounted a cooling head having a first, 80°K. cooling stage and a second, 20°K. cooling stage. A shield mounted on the cooling head surrounds the two stages, and a cooling surface within the housing and within the shield surrounds the second stage. The housin
A cryopump comprising: a housing having a first input opening; a cooling head having first and second stages within said housing; at least one cooling surface connected to said second stage; a shield for said cooling surface, said shield having a second input opening; a diaphragm mounted within said
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