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Atomic force microscope having cantilever with piezoresistive deflection sensor

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01B-007/34
출원번호 US-0954695 (1992-09-30)
발명자 / 주소
  • Albrecht Thomas (San Jose CA) Tortonese Marco (Stanford CA) Barrett Robert (Mountain View CA)
출원인 / 주소
  • Board of Trustees, Leland Stanford Jr. University (Palo Alto CA 02)
인용정보 피인용 횟수 : 65  인용 특허 : 0

초록

A microminiature cantilever structure is provided having a cantilever arm with a piezoresistive resistor embedded in at least the fixed end of the cantilever arm. Deflection of the free end of the cantilever arm produces stress in the base of the cantilever. That stress changes the piezoresistive re

대표청구항

An atomic force microscope comprising: a sample holder; a cantilever arm having a fixed end and a free end and a piezoresistive element included within the cantilever arm, deflection of the free end of the cantilever arm changing the resistance of the piezoresistive element; scanning means for movin

이 특허를 인용한 특허 (65)

  1. Xu Shaohua ; Arnsdorf Morton F., Atomic force microscope for biological specimens.
  2. Minne Stephen Charles ; Quate Calvin F. ; Manalis Scott, Atomic force microscope for high speed imaging including integral actuator and sensor.
  3. Mamin Harry Jonathon ; Ried Robert Paul ; Rugar Daniel ; Terris Bruce David, Atomic force microscope system with angled cantilever having integral in-plane tip.
  4. Mamin Harry Jonathon ; Rugar Daniel ; Terris Bruce David, Atomic force microscope system with multi-directional voice coil actuator for controlling the stylus.
  5. Alexander John D. ; Tortonese Marco ; Nguyen Thai, Atomic force microscope with integrated optics for attachment to optical microscope.
  6. Mamin Harry Jonathon ; Rugar Daniel ; Chui Benjamin Wai-Ho ; Kenny Thomas William, Atomic force microscopy data storage system with tracking servo from lateral force-sensing cantilever.
  7. Rugar Daniel ; Terris Bruce David, Atomic force microscopy disk data storage system with nonradial tracking lines.
  8. Shivaram Bellave S. ; Chaparala Murali V. ; Jones Stephen H., Cantilever having sensor system for independent measurement of force and torque.
  9. Binnig Gerd Karl,CHX ; Rohrer Heinrich,CHX ; Vettiger Peter,CHX, Cantilever with integrated deflection sensor.
  10. van der Weide Daniel Warren, Combined topography and electromagnetic field scanning probe microscope.
  11. Mejia,Robert G.; Hilton,Richard L., Compensating for variations in the temperature of a probe of a storage device.
  12. Mejia,Robert G.; Van Lydegraf,Curt Nelson, Contact probe storage FET sensor.
  13. Mejia,Robert G., Contact probe storage sensor pod.
  14. Gibson,Gary A., Data readout arrangement.
  15. Sahin, Ozgur; Quate, Calvin F.; Solgaard, Olav; Persson, Henrik, Detection of macromolecular complexes on ultraflat surfaces with harmonic cantilevers.
  16. Sahin, Ozgur; Quate, Calvin F.; Solgaard, Olav, Detection of macromolecular complexes with harmonic cantilevers.
  17. King, William P.; Lee, Jungchul, Device for calorimetric measurement.
  18. Champion,Corbin L.; Brandenberger,Sarah M., Heating elements for a storage device.
  19. Lin Yung-Shi,TWX, High-sensitivity strain probe.
  20. Lin Yung-Shi,TWX, High-sensitivity strain probe.
  21. Lindsay Stuart M. ; Jing Tianwei, Hybrid control system for scanning probe microscopes.
  22. Lawrence P. Muray ; Ho-Seob Kim KR; T. H. Philip Chang, Integrated microcolumn and scanning probe microscope arrays.
  23. Houston, Jack E.; Smith, William L., Laser interferometry force-feedback sensor for an interfacial force microscope.
  24. King, William P.; Prater, Craig; Lee, Byeonghee, Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy.
  25. King, William P.; Prater, Craig; Lee, Byeonghee; Gotthard, Doug, Magnetic actuation and thermal cantilevers for temperature and frequency dependent atomic force microscopy.
  26. Gibson,Gary; Kiyama,Lennie, Method and device enabling capacitive probe-based data storage readout.
  27. Proksch, Roger; Cavazos, Hector, Method for microfabricating a probe with integrated handle, cantilever, tip and circuit.
  28. Quate Calvin F. (Stanford CA), Method of detecting particles of semiconductor wafers.
  29. Soh Hyongsok (Stanford CA) Minne Stephen C. (Danville IL) Quate Calvin F. (Stanford CA), Method of etching a pattern on a substrate using a scanning probe microscope.
  30. Minne Stephen Charles ; Soh Hyongsok ; Quate Calvin F., Method of fabricating transistor or other electronic device using scanning probe microscope.
  31. Popp, Shane M., Methods of interfacing nanomaterials for the monitoring and execution of pharmaceutical manufacturing processes.
  32. Mirkin, Chad A.; Piner, Richard; Hong, Seunghun, Methods utilizing scanning probe microscope tips and products therefor or produced thereby.
  33. Mirkin, Chad A.; Piner, Richard; Hong, Seunghun, Methods utilizing scanning probe microscope tips and products therefor or produced thereby.
  34. Mirkin, Chad A.; Piner, Richard; Hong, Seunghun, Methods utilizing scanning probe microscope tips and products therefor or produced thereby.
  35. Mirkin, Chad A.; Piner, Richard; Hong, Seunghun, Methods utilizing scanning probe microscope tips and products therefor or products thereby.
  36. Kokawa, Ryohei; Tada, Naoya, Micro-material testing apparatus.
  37. King, William P.; Felts, Jonathan R.; Prater, Craig; Kjoller, Kevin, Microcantilever with reduced second harmonic while in contact with a surface and nano scale infrared spectrometer.
  38. Loui, Albert; Sirbuly, Donald J.; Elhadj, Selim; McCall, Scott K.; Hart, Bradley R.; Ratto, Timothy V., Microcantilever-based gas sensor employing two simultaneous physical sensing modes.
  39. Chui Benjamin W. ; Kenny Thomas W., Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beam.
  40. Jakobsen, Henrik, Micromechanical pressure sensing device.
  41. Jakobsen, Henrik, Micromechanical pressure sensing device.
  42. Raravikar, Nachiket R.; Panat, Rahul, Nanolithographic method of manufacturing an embedded passive device for a microelectronic application, and microelectronic device containing same.
  43. Henderson,Eric; Mosher,Curtis, Nanoscale molecular arrayer.
  44. Popp, Shane M., Pharmaceutical dosage forms fabricated with nanomaterials.
  45. Stewart, Ray F., Phase change sensor.
  46. Ried Robert Paul, Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system.
  47. Adelmann,Todd C., Storage device having a probe and a storage cell with moveable parts.
  48. Champion,Corbin L; Brandenberger,Sarah M.; De Brebisson,Cyrille, Storage device having a probe to cooperate with a storage medium to provide a variable resistance.
  49. Hilton,Richard L; Eldredge,Kenneth J., Storage device having a probe to form structures for representing data states.
  50. Champion,Corbin L.; Brandenberger,Sarah M., Storage device having a probe with a first plate that cooperates with a second plate to provide a variable capacitance.
  51. Adelmann,Todd C., Storage device having a probe with a tip to form a groove in a storage medium.
  52. Adelmann,Todd C., Storage device having a probe with plural tips.
  53. Champion,Corbin L.; Brandenberger,Sarah M., Storage device having a probe with plural tips.
  54. Hilton,Richard L., Storage device having a read circuit to detect a storage state based on interaction between a probe and a storage medium.
  55. Adelmann,Todd C., Storage device having a storage cell programmable to one of more than two storage states.
  56. Champion,Corbin L.; Brandenberger,Sarah M., Storage device having first and second magnetic elements that interact magnetically to indicate a storage state.
  57. Champion,Corbin L.; Brandenberger,Sarah M., Storage device including a probe having an electrically conductive tip portion for electrical contact with a storage medium.
  58. Ellis, Arthur W.; Haight, Richard A.; Hannon, James B.; Tromp, Rudolf M., Surface force apparatus based on a spherical lens.
  59. Ellis, Arthur W.; Haight, Richard A.; Hannon, James B.; Tromp, Rudolf M., Surface force apparatus based on a spherical lens.
  60. Su, Chanmin Quanmin; Magonov, Sergei, System for wide frequency dynamic nanomechanical analysis.
  61. Elings Virgil B. ; Gurley John A., Tapping atomic force microscope with phase or frequency detection.
  62. King, William P., Temperature-dependent nanoscale contact potential measurement technique and device.
  63. Lindsay Stuart M. ; Jing Tianwei ; Lyubchenko Yuri L. ; Gall Alexander A., Tip coating system for scanning probe microscopy.
  64. Lindsay Stuart M. (Tempe AZ) Jing Tianwei (Tempe AZ) Lyubchenko Yuri L. (Tempe AZ) Gall Alexander A. (Bothell WA), Tip etching system and method for etching platinum-containing wire.
  65. Minne Stephen Charles ; Quate Calvin F. ; Manalis Scott, Vibrating probe for a scanning probe microscope.
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