[특허]Integrated tip strain sensor for use in combination with a single axis atomic force microscope

Integrated tip strain sensor for use in combination with a single axis atomic force microscope 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01N-027/00 G01N-023/00
출원번호	US-0157800 (1993-11-24)
발명자 / 주소	Clabes Joachim (Yorktown Heights NY) Khoury Henri A. (Yorktown Heights NY) Landstein Laszlo (Ossining NY)
출원인 / 주소	International Business Machine Corp. (Armonk NY 02)
인용정보	피인용 횟수 : 28 인용 특허 : 0

초록 ▼

An integrated tip strain sensor is combination with a single axis atomic force microscope (AFM) for determining the profile of a surface in three dimensions. A cantilever beam carries an integrated tip stem on which is deposited a piezoelectric film strain sensor. A high-resolution direct electron beam (e-beam) deposition process is used to grow a sharp tip onto the silicon (Si) cantilever structure. The direct e-beam deposition process permits the controllable fabrication of high-aspect ratio, nanometer-scale tip structures. A piezoelectric jacket with four superimposed elements is deposited on the tip stem. The piezoelectric sensors function in a plane perpendicular to that of a probe in the AFM; that is, any tip contact with the linewidth surface will cause tip deflection with a corresponding proportional electrical signal output. This tip strain sensor, coupled to a standard single axis AFM tip, allows for three-dimensional metrology with a much simpler approach while avoiding catastrophic tip “crashes”. Two-dimensional edge detection of the sidewalls is used to calculate the absolute value or the linewidth of overlay, independent of the AFM principle. The technique works on any linewidth surface material, whether conductive, non-conductive or semiconductive.

대표청구항 ▼

A method of manufacturing an integrated tip strain sensor in combination with an atomic force microscope (AFM) for profiling a surface in three dimensions, the method comprising the steps of: using a high resolution direct electron beam (e-beam) deposition process to grow a tip on a tip stem integral with a cantilever beam structure; depositing a continuous piezoelectric material coating on the tip stem; treating said piezoelectric material in an oxygen-containing environment to crystallize said piezoelectric material into a proper phase and to oxidize the exposed cantilever beam structure, thereby achieving an electrical insulating coating on the same; applying a metal film onto the piezoelectric material coating and at least a bottom surface of the cantilever beam structure as an overcoat to form strain sensor contacts; and patterning the metal film to yield electrical conductors which extend along the tip stem and along a bottom length of the cantilever beam structure to provide output signal lines from the strain sensor contacts.

이 특허를 인용한 특허 (28)

Bevis,Christopher F.; Tortonese,Marco, Atomic force microscope.
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Gurney Bruce Alvin ; Mamin Harry Jonathon ; Rugar Daniel ; Speriosu Virgil Simon, Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge.
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Bargatin, Igor; Myers, Edward B.; Li, Mo; Arlett, Jessica; Gudlewski, Benjamin; Roukes, Michael L.; Young, Darron K.; Tang, Hong X., Detection of resonator motion using piezoresistive signal downmixing.
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Thundat Thomas G. ; Warmack Robert J. ; Wachter Eric A., Electromagnetic and nuclear radiation detector using micromechanical sensors.
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Chernoff Donald A. ; Lohr Jason D., High precison calibration and feature measurement system for a scanning probe microscope.
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Lindsay Stuart M. ; Jing Tianwei, Hybrid control system for scanning probe microscopes.
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Alden John Christopher, Manipulator for automatic test equipment with active compliance.
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Tang, Hongxing; Li, Mo; Roukes, Michael L., Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes.
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Tang,Hongxing; Li,Mo; Roukes,Michael L., Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes.
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Flecha Edwin ; Klos Martin Allen ; Roessler Kenneth G. ; Stowell Robert Marshall, Method for improving measurement accuracy using active lateral scanning control of a probe.
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Flecha Edwin ; Roessler Kenneth Gilbert ; Stowell Robert Marshall, Method for protecting a probe tip using active lateral scanning control.
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Nasser-Ghodsi, Mehran; Wang, Ying; Chin, Harrison; Testoni, Anne; Burns, R. Chris, Methods and apparatus for electron beam assisted etching at low temperatures.
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Chand,Ami; Okulan,Nihat, Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby.
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Chand,Ami; Okulan,Nihat, Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby.
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Chui Benjamin W. ; Kenny Thomas W., Micromachined cantilever structure providing for independent multidimensional force sensing using high aspect ratio beam.
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Bayer Thomas,DEX ; Greschner Johann,DEX ; Weiss Helga,DEX, Micromechanical sensor for AFM/.
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Thundat Thomas G. ; Oden Patrick I. ; Datskos Panagiotis G., Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors.
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Stewart, Ray F., Phase change sensor.
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Ukraintsev, Vladimir Alexeevich, Rocking Y-shaped probe for critical dimension atomic force microscopy.
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Kitazawa, Masashi; Shiotani, Koichi, SPM cantilever.
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Hough, Paul V. C.; Wang, Chengpu, Sensing mode atomic force microscope.
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Hough, Paul V. C.; Wang, Chengpu, Sensing mode atomic force microscope.
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Samsavar Amin ; Zhuang Jian-Ping ; Schneir Jason, System for locating a feature of a surface.
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Lindsay Stuart M. ; Jing Tianwei ; Lyubchenko Yuri L. ; Gall Alexander A., Tip coating system for scanning probe microscopy.
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Lindsay Stuart M. (Tempe AZ) Jing Tianwei (Tempe AZ) Lyubchenko Yuri L. (Tempe AZ) Gall Alexander A. (Bothell WA), Tip etching system and method for etching platinum-containing wire.
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Kitamura Shinichi (Saitama JPX), Vibrating probe atomic force microscope.
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Oden Patrick Ian, Viscosity measuring using microcantilevers.
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연합인증

Integrated tip strain sensor for use in combination with a single axis atomic force microscope 원문보기

초록 ▼

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Integrated tip strain sensor for use in combination with a single axis atomic force microscope 원문보기

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