[특허]Monolithic accelerometer

Monolithic accelerometer 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G01P-015/125
출원번호	US-0028922 (1993-03-04)
발명자 / 주소	Sherman Steven J. (Andover MA) Brokaw A. Paul (Burlington MA) Tsang Robert W. K. (Bedford MA) Core Theresa (Framington MA)
출원인 / 주소	Analog Devices, Inc. (Norwood MA 02)
인용정보	피인용 횟수 : 134 인용 특허 : 0

초록 ▼

An accelerometer comprising a microfabricated acceleration sensor and monolithically fabricated signal conditioning circuitry. The sensor comprises a differential capacitor arrangement formed by a pair of capacitors. Each capacitor has two electrodes, one of which it shares electrically in common with the other capacitor. One of the electrodes (e.g., the common electrode) is movable and one of the electrodes is stationary in response to applied acceleration. The electrodes are all formed of polysilicon members suspended above a silicon substrate. Each of the capacitors is formed of a plurality of pairs of electrode segments electrically connected in parallel and, in the case of the movable electrodes, mechanically connected to move in unison. When the substrate is accelerated, the movable electrodes move such that the capacitance of one of the capacitors increases, while that of the other capacitor decreases. The two capacitors are connected to signal conditioning circuitry which converts this differential capacitance into a corresponding voltage. Both open loop and force-balance operation are shown.

대표청구항 ▼

A monolithic semiconductor capacitance-type accelerometer comprising; a semiconductor substrate comprising a surface, a plurality of posts extending from the surface of said substrate, a polysilicon bridge suspended from said posts, said bridge comprising a plurality of moveable fingers, a plurality of electrically conductive substantially stationary fingers, each of said substantially stationary fingers corresponding to one of said moveable fingers and positioned relative to said corresponding moveable finger such that said moveable finger and said corresponding substantially stationary finger form a capacitor, whereby movement of said bridge under an accelerative force causes said moveable fingers to move relative to said substantially stationary fingers and alter the capacitance between said moveable fingers and said corresponding stationary fingers, and circuitry disposed on said substrate and coupled to said moveable fingers and said substantially stationary fingers for generating a signal indicative of acceleration.

이 특허를 인용한 특허 (134)

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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