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Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-003/06
출원번호 US-0695552 (1991-05-03)
발명자 / 주소
  • Dorfman Veniamin (8 Norman Dr. Shoreham NY 11786) Pypkin Boris (Moscow SUX)
출원인 / 주소
  • Dorfman
  • Veniamin (Shoreham NY 04)
인용정보 피인용 횟수 : 108  인용 특허 : 0

초록

The present invention relates to the formation of a class of nanocomposite amorphous materials consisting of interpenetrating random networks of predominantly sp3 bonded carbon stabilized by hydrogen, glass-like silicon stabilized by oxygen and random networks of elements from the 1-7b and 8 groups

대표청구항

A method of fabricating diamond-like nanocomposite or doped-diamond-like nanocomposite films containing the constituent elements carbon, hydrogen, silicon, oxygen and metal, comprising: depositing onto a substrate by co-deposition a clusterless particle beams comprised of ions, atoms and/or radicals

이 특허를 인용한 특허 (108)

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