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Apparatus for clean transfer of objects 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-065/00
출원번호 US-0902720 (1992-06-23)
우선권정보 JP-0177803 (1991-06-24)
발명자 / 주소
  • Takahashi Tetsuo (Akita JPX) Miyauchi Eisaku (Akita JPX) Miyajima Toshihiko (Saku JPX) Watanabe Hideaki (Akita JPX)
출원인 / 주소
  • TDK Corporation (JPX 03)
인용정보 피인용 횟수 : 111  인용 특허 : 0

초록 ▼

A clean transfer system having a first vacuum chamber with a first transfer port, a first shutter for opening and closing the first transfer port and a first connecting member surrounding the first transfer port. The first connecting member is provided with at least an exterior portion. A second vac

대표청구항 ▼

A clean transfer system, comprising: a first vacuum chamber having a first transfer port, a first movable shutter for opening and closing said first transfer port, a first connecting member surrounding said first transfer port, said first connecting member having at least an exterior portion; a seco

이 특허를 인용한 특허 (111)

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