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Micro-electrochemical valves and method

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C25F-003/00
  • C25F-007/00
출원번호 US-0103274 (1993-08-06)
발명자 / 주소
  • Madou Marc J. (Palo Alto CA) Tierney Michael J. (San Jose CA)
출원인 / 주소
  • Teknekron Corporation (Incline Village NV 02)
인용정보 피인용 횟수 : 114  인용 특허 : 0

초록

A micromachined valve and valve array having one or more pores which are electrochemically opened and closed by dissolving and redepositing a barrier layer across a tiny opening or pore in substrate. The pore is spanned by two electrodes which apply a voltage to an electrolytic barrier layer materia

대표청구항

A method for producing quantitatively variable flow communication between major surfaces of a monolithic substrate comprising: forming a series of n passages through said substrate, each of said passages having a different size defined by its minimum cross-sectional area, said series being character

이 특허를 인용한 특허 (114)

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