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Liquid vaporizer/feeder

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01F-003/04
출원번호 US-0025500 (1993-03-03)
우선권정보 JP-0082860 (1992-03-03)
발명자 / 주소
  • Ono Hirofumi (Shiga JPX)
출원인 / 주소
  • Lintec Co., Ltd. (Shiga JPX 03)
인용정보 피인용 횟수 : 70  인용 특허 : 0

초록

In a liquid vaporizing/feeding method of the present invention, carrier gas is forced out at a very high speed against a mass flow controlled liquid feedstock to change the liquid feedstock into a mist; after that, the mist of the feedstock is vaporized and mixed with the carrier gas, and a mixture

대표청구항

A liquid vaporizer/feeder comprising a main vaporizer unit including a heating and thermal insulating unit which has a heating cylinder in an innermost position, a heater enclosing the heating cylinder, and a heat insulator further enclosing the heater, and flanges attached to an inlet and an outlet

이 특허를 인용한 특허 (70)

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  21. Bertram, Jr., Ronald Thomas, Direct liquid injection for halide vapor phase epitaxy systems and methods.
  22. Asai, Goro, Electronic mirror apparatus.
  23. Atwell David R. ; Vaartstra Brian A., Electrostatic method and apparatus for vaporizing precursors and system for using same.
  24. Badeke, Klaus-Uwe; Trommer, Martin, Evaporator and method for producing synthetic fused quartz.
  25. Tsunashima Yoshitaka,JPX ; Okumura Katsuya,JPX, Evaporator for liquid raw material and evaporation method therefor.
  26. Beshore David G. (Newbury Park CA) Ullman Alan Z. (Northridge CA), Fast response iodine vaporization with an integrated atomizer and mixer.
  27. Hara, Masamichi, Film forming apparatus and film forming method.
  28. Rius, Jean-Michel, Gas feed installation for machines depositing a barrier layer on containers.
  29. Zhao, Jun; Dornfest, Charles; Chang, Frank; Jin, Xiaoliang; Tang, Po, High temperature filter for CVD apparatus.
  30. Xia,Li Qun; Xu,Huiwen; Witty,Derek R.; M'Saad,Hichem, In-situ oxide capping after CVD low k deposition.
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  32. Tue Nguyen, Liquid delivery system emulsifier.
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  38. Gauthier Scott, Liquid precursor delivery system.
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