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Heating of fluidized bed reactor by microwaves

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C01B-033/021
  • C01B-033/023
  • C01B-033/03
출원번호 US-0055240 (1993-04-28)
발명자 / 주소
  • Kim Hee Y. (Daejeon KRX) Song Yong M. (Daejeon KRX) Jeon Jong Y. (Daejeon KRX) Kwon Dae H. (Daejeon KRX) Lee Kang M. (Daejeon KRX) Lee Jae S. (Daejeon KRX) Park Dong S. (Daejeon KRX)
출원인 / 주소
  • Korea Research Institute of Chemical Technology (Daejeon KRX 03)
인용정보 피인용 횟수 : 54  인용 특허 : 0

초록

An improved method is provided for the deposition of high-purity silicon on silicon particles from silicon source gases in a fluidized bed reactor which is divided into a heating zone and a reaction zone by a partition. Silicon particles in the heating zone are fluidized by a carrier gas such as hyd

대표청구항

A method of operating a fluidized bed reactor in which a reaction gas comprising a source material is brought into a fluidized-bed relationship with seed particles on which said source material is to be deposited, comprising the steps of: providing a fluidized bed reactor vessel having a reaction zo

이 특허를 인용한 특허 (54)

  1. Sansegundo-Sanchez, Javier; Benavides-Rel, Xavier; Vales-Canle, Manuel; Tomas-Martinez, Maria, Cooled gas distribution plate, thermal bridge breaking system, and related methods.
  2. Kambe, Nobuyuki; Chiruvolu, Shivkumar, Dispersions of blends of silicon nanoparticles and silica nanoparticles.
  3. Kambe, Nobuyuki; Chiruvol, Shivkumar, Dispersions of silicon nanoparticles.
  4. Kambe, Nobuyuki, Dispersions of submicron doped silicon particles.
  5. Kambe, Nobuyuki; Chiruvolu, Shivkumar, Dispersions of submicron doped silicon particles.
  6. Osborne, E. Wayne; Spangler, Michael V.; Allen, Levi C.; Geertsen, Robert J.; Ege, Paul E.; Stupin, Walter J.; Zeininger, Gerald, Fluid bed reactor.
  7. Osborne, E. Wayne; Spangler, Michael V.; Allen, Levi C.; Geertsen, Robert J.; Ege, Paul E.; Stupin, Walter J.; Zeininger, Gerald, Fluid bed reactor.
  8. Nuber, Dirk; Ströder, Michael; Stockhausen, Werner; Beyzavi, Ali-Naghi; Formanek, Lothar; Hirsch, Martin, Fluidized bed method and plant for the heat treatment of solids containing titanium.
  9. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas, Fluidized bed reactor for production of high purity silicon.
  10. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas, Fluidized bed reactor for production of high purity silicon.
  11. Angel Sanjurjo ; Kai Hung Lau, Fluidized bed reactor having a centrally positioned internal heat source.
  12. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi, Fluidized bed reactor systems.
  13. Erk, Henry F., Fluidized bed reactor systems and distributors for use in same.
  14. Lord, Stephen M, Machine for production of granular silicon.
  15. Nuber, Dirk; Stockhausen, Werner; Ströder, Michael, Method and apparatus for heat treatment in a fluidized bed.
  16. Kim, Hee Young; Yoon, Kyung Koo; Park, Yong Ki; Choi, Won Choon, Method and apparatus for preparation of granular polysilicon.
  17. Kim, Hee Young; Yoon, Kyung Koo; Park, Yong Ki; Choi, Won Choon, Method and apparatus for preparation of granular polysilicon.
  18. Kim, Hee Young; Yoon, Kyung Koo; Park, Yong Ki; Choi, Won Choon, Method and apparatus for preparation of granular polysilicon.
  19. Fuchs, Paul; Weidhaus, Dieter, Method and apparatus for the contamination-free heating of gases.
  20. Orth, Andreas; Hirsch, Martin; Weber, Peter, Method and plant for producing low-temperature coke.
  21. Freytag, Jochen; Hirsch, Martin; Ströder, Michael, Method and plant for the conveyance of fine-grained solids.
  22. Hirsch, Martin; Stroeder, Michael; Weber, Peter, Method and plant for the heat treatment of solids containing iron oxide.
  23. Hirsch, Martin; Ströder, Michael; Weber, Peter, Method and plant for the heat treatment of solids containing iron oxide.
  24. Orth, Andreas; Hirsch, Martin; Weber, Peter; Sneyd, Stuart; Nuber, Dirk; Stroeder, Michael, Method and plant for the heat treatment of solids containing iron oxide.
  25. Orth, Andreas; Hirsch, Martin; Weber, Peter; Sneyd, Stuart; Nuber, Dirk; Ströder, Michael, Method and plant for the heat treatment of solids containing iron oxide using a fluidized bed reactor.
  26. Stephen M Lord, Method for improving the efficiency of a silicon purification process.
  27. Auner, Norbert, Method for the production of silicon from silyl halides.
  28. Auner, Norbert, Method for the production of silicon from silyl halides.
  29. Stephen M Lord, Method of improving the efficiency of a silicon purification process.
  30. Froehlich, Robert; Mixon, David, Methods and system for cooling a reaction effluent gas.
  31. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi, Methods for introducing a first gas and a second gas into a reaction chamber.
  32. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi, Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls.
  33. Bi, Xiangxin; Kambe, Nobuyuki; Gardner, James T.; Mosso, Ronald J.; Chiruvolu, Shivkumar; Kumar, Sujeet; McGovern, William E., Methods for synthesizing submicron doped silicon particles.
  34. Al-Quraishi, Saleh I., Microwave spent catalyst decoking method.
  35. Nuber, Dirk; Stroeder, Michael; Stockhausen, Werner; Formanek, Lothar; Hirsch, Martin; Beyzavi, Ali-Naghi, Plant for the heat treatment of solids containing titanium.
  36. Li, Weidong; Soeda, Masaya; Pengra-Leung, Gina Elizabeth; Chiruvolu, Shivkumar, Printable inks with silicon/germanium based nanoparticles with high viscosity alcohol solvents.
  37. Hirsch, Martin; Stockhausen, Werner; Stroeder, Michael, Process and plant for producing metal oxide from metal compounds.
  38. Hirsch, Martin; Stockhausen, Werner; Ströder, Michael, Process and plant for producing metal oxide from metal compounds.
  39. Schreieder Franz,DEX ; Kim Hee Young,KRX, Process for preparing highly pure silicon granules.
  40. Hee-Young Kim KR, Process for preparing polysilicon using exothermic reaction.
  41. Weidhaus, Dieter; Hauswirth, Rainer; Hertlein, Harald, Process for the continuous production of polycrystalline high-purity silicon granules.
  42. Purta, David A.; Portnoff, Marc A., Processing apparatus with an electromagnetic launch.
  43. Chu, Xi, Reactor and method for producing high-purity granular silicon.
  44. Froehlich, Robert; Fieselmann, Ben; Mixon, David; Tsuo, York, Reactor with silicide-coated metal surfaces.
  45. Chinn, Wenjun L; Fahrenbruck, F. Scott; Skinner, Shawn D; Moran, Laura E; Gum, Jeffrey C., Reverse circulation fluidized bed reactor for granular polysilicon production.
  46. Lord Stephen M. ; Milligan Robert J., Silicon deposition reactor apparatus.
  47. Kambe, Nobuyuki, Silicon nanoparticle dispersions.
  48. Kambe, Nobuyuki, Silicon nanoparticle dispersions.
  49. Chiruvolu, Shivkumar; Altman, Igor; Frey, Bernard M.; Li, Weidong; Liu, Guojun; Lynch, Robert B.; Pengra-Leung, Gina Elizabeth; Srinivasan, Uma, Silicon/germanium nanoparticle inks, laser pyrolysis reactors for the synthesis of nanoparticles and associated methods.
  50. Chiruvolu, Shivkumar; Altman, Igor; Frey, Bernard M.; Li, Weidong; Liu, Guojun; Lynch, Robert B.; Pengra-Leung, Gina Elizabeth; Srinivasan, Uma, Silicon/germanium nanoparticles and inks having low metal contamination.
  51. Hieslmair, Henry; Chiruvolu, Shivkumar; Du, Hui, Silicon/germanium oxide particle inks and processes for forming solar cell components and for forming optical components.
  52. Hieslmair, Henry; Dioumaev, Vladimir K.; Chiruvolu, Shivkumar; Du, Hui, Silicon/germanium particle inks, doped particles, printing and processes for semiconductor applications.
  53. Auner, Norbert; Holl, Sven; Bauch, Christian; Lippold, Gerd; Deltschew, Rumen, Solid polysilane mixtures.
  54. Qin, Wenjun, Systems and methods for distributing gas in a chemical vapor deposition reactor.
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