이 특허를 인용한 특허 (115)

1. Strid, Eric; Gleason, K. Reed, Active wafer probe.

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2. Strid,Eric; Gleason,K. Reed, Active wafer probe.

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3. Watanabe, Naoki; Tsukada, Masaru; Tagami, Katsunori, Apparatus for generating coarse-grained simulation image of sample to be measured with a probe of a scanning probe microscope.

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4. Xu Shaohua ; Arnsdorf Morton F., Atomic force microscope for biological specimens.

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5. Moon, Christopher Ryan, Automatic gain tuning in atomic force microscopy.

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6. Strid, Eric; Campbell, Richard, Calibration structures for differential signal probing.

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7. Dunklee, John, Chuck for holding a device under test.

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8. Dunklee, John, Chuck for holding a device under test.

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9. Dunklee, John, Chuck for holding a device under test.

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10. Dunklee,John, Chuck for holding a device under test.

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11. Dunklee,John, Chuck for holding a device under test.

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12. Dunklee,John, Chuck for holding a device under test.

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13. Stewart, Craig; Lord, Anthony; Spencer, Jeff; Burcham, Terry; McCann, Peter; Jones, Rod; Dunklee, John; Lesher, Tim; Newton, David, Chuck for holding a device under test.

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14. Stewart,Craig; Lord,Anthony; Spencer,Jeff; Burcham,Terry; McCann,Peter; Jones,Rod; Dunklee,John; Lesher,Tim; Newton,David, Chuck for holding a device under test.

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15. Andrews, Peter; Froemke, Brad; Dunklee, John, Chuck with integrated wafer support.

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16. Andrews,Peter; Froemke,Brad; Dunklee,John, Chuck with integrated wafer support.

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17. Shi, Jian; Prater, Craig; Ma, Ji; Su, Chanmin, Closed loop controller and method for fast scanning probe microscopy.

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18. Campbell, Richard; Strid, Eric W.; Andrews, Mike, Differential signal probe with integral balun.

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19. Strid, Eric; Campbell, Richard, Differential signal probing system.

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20. Campbell, Richard L.; Andrews, Michael, Differential waveguide probe.

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21. Burcham, Terry; McCann, Peter; Jones, Rod, Double sided probing structures.

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22. Burcham,Terry; McCann,Peter; Jones,Rod, Double sided probing structures.

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23. Dunklee, John; Norgden, Greg; Cowan, C. Eugene, Guarded tub enclosure.

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24. David, Paul; Milano, Shaun D., Hall-effect based linear motor controller.

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25. David, Paul; Milano, Shaun D., Hall-effect based linear motor controller.

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26. Russell, William I., High-bandwidth actuator drive for scanning probe microscopy.

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27. Dahlen, Gregory A., Image reconstruction method.

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28. Putman, Matthew C.; Putman, John B., Increasing image resolution method employing known background and specimen.

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29. Andrews, Peter; Hess, David; New, Robert, Interface for testing semiconductors.

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30. Kawakatsu, Hideki, Interferometric apparatus utilizing a cantilever array to measure a surface.

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31. Braunstein David ; Kirk Michael ; Ly Ouoc ; Nguyen Thai, Kinematically mounted probe holder for scanning probe microscope.

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32. McFadden,Bruce, Localizing a temperature of a device for testing.

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33. Gleason, K. Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Membrane probing method using improved contact.

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34. Gleason, Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Membrane probing method using improved contact.

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35. Gleason, K. Reed; Smith, Kenneth R.; Bayne, Mike, Membrane probing structure with laterally scrubbing contacts.

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36. Gleason, Reed; Bayne, Michael A.; Smith, Kenneth; Lesher, Timothy; Koxxy, Martin, Membrane probing system.

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37. Smith,Kenneth; Gleason,Reed, Membrane probing system.

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38. Smith,Kenneth; Gleason,Reed, Membrane probing system.

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39. Tervo,Paul A.; Smith,Kenneth R.; Cowan,Clarence E.; Dauphinais,Mike P.; Koxxy,Martin J., Membrane probing system.

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40. Gleason, K. Reed; Smith, Kenneth R.; Bayne, Mike, Membrane probing system with local contact scrub.

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41. Jarvis Suzanne Philippa,JPX ; Lantz Mark Alfred,JPX ; Duerig Urs,CHX, Method and apparatus for force control of a scanning probe.

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42. Masser, Carl, Method and apparatus for monitoring of a SPM actuator.

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43. Mininni, Paul L., Method and apparatus of scanning a sample using a scanning probe microscope.

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44. Hayden, Leonard; Martin, John; Andrews, Mike, Method of assembling a wafer probe.

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45. Gleason, Reed; Bayne, Michael A.; Smith, Kenneth, Method of constructing a membrane probe.

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46. Ando, Kazunori; Watanabe, Kazutoshi; Shikakura, Yoshiteru; Tsuchihashi, Masaki; Yamaoka, Takehiro, Method of operating scanning probe microscope.

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47. Smith, Kenneth R., Method of replacing an existing contact of a wafer probing assembly.

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48. Lindig,Darin D., Methods and systems for ascertaining the roughness of a print media surface.

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49. Rychen, Joerg, Mount for a scanning probe sensor package, scanning probe sensor package, scanning probe microscope and method of mounting or dismounting a scanning probe sensor package.

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50. Anlage Steven Mark ; Wellstood Frederick Charles ; Vlahacos Kosta ; Steinhauer David E., Near-field scanning microwave microscope having a transmission line with an open end.

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51. Strid,Eric; Campbell,Richard, On-wafer test structures for differential signals.

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52. Braunstein David ; Kirk Michael ; Ly Quoc ; Nguyen Thai, Optical microscope stage for scanning probe microscope.

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53. Stewart, Ray F., Phase change sensor.

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54. Tong Yi,JPX, Position control system for scanning probe microscope.

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55. Hayden,Leonard; Rumbaugh,Scott; Andrews,Mike, Probe for combined signals.

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56. Hayden,Leonard; Rumbaugh,Scott; Andrews,Mike, Probe for combined signals.

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57. Hayden,Leonard; Rumbaugh,Scott; Andrews,Mike, Probe for combined signals.

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58. Campbell,Richard L.; Andrews,Michael; Bui,Lynh, Probe for high frequency signals.

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59. Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Probe for testing a device under test.

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60. Smith, Kenneth; Jolley, Michael; Van Syckel, Victoria, Probe head having a membrane suspended probe.

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61. Smith,Kenneth; Jolley,Michael; Van Syckel,Victoria, Probe head having a membrane suspended probe.

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62. Schwindt,Randy, Probe holder for testing of a test device.

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63. Nordgren, Greg; Dunklee, John, Probe station.

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64. Nordgren, Greg; Dunklee, John, Probe station.

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65. Peters, Ron A.; Hayden, Leonard A.; Hawkins, Jeffrey A.; Dougherty, R. Mark, Probe station having multiple enclosures.

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66. Peters,Ron A.; Hayden,Leonard A.; Hawkins,Jeffrey A.; Dougherty,R. Mark, Probe station having multiple enclosures.

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67. Cowan, Clarence E.; Tervo, Paul A.; Dunklee, John L., Probe station thermal chuck with shielding for capacitive current.

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68. Dunklee,John; Cowan,Clarence E., Probe station with low inductance path.

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69. Lesher, Timothy; Miller, Brad; Cowan, Clarence E.; Simmons, Michael; Gray, Frank; McDonald, Cynthia L., Probe station with low noise characteristics.

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70. Navratil,Peter; Froemke,Brad; Stewart,Craig; Lord,Anthony; Spencer,Jeff; Runbaugh,Scott; Fisher,Gavin; McCann,Pete; Jones,Rod, Probe station with two platens.

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71. Lesher, Timothy E., Probe testing structure.

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72. Haydon Philip G., Probe-type near-field confocal having feedback for adjusting probe distance.

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73. Smith, Kenneth R.; Hayward, Roger, Probing apparatus with impedance optimized interface.

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74. Smith, Kenneth R., Replaceable coupon for a probing apparatus.

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75. Toda Akitoshi,JPX ; Ito Shuichi,JPX ; Miyamoto Hirofumi,JPX ; Yagi Akira,JPX, Scanner system.

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76. Hiroyoshi Yamamoto JP, Scanning probe microscope.

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77. Honma Akihiko,JPX ; Umemoto Takeshi,JPX ; Inoue Akira,JPX, Scanning probe microscope.

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78. Matsuyama Katsuhiro,JPX ; Sakai Nobuaki,JPX ; Morita Seizo,JPX ; Sugawara Yasuhiro,JPX, Scanning probe microscope.

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79. Braunstein David ; Kirk Michael ; Ly Quoc ; Nguyen Thai, Scanning probe microscope providing unobstructed top down and bottom up views.

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80. Jo, Hyeong Chan; Lim, Hong Jae; Shin, Seung Jun; Kim, Joon Hui; Kim, Yong Seok; Park, Sang-il, Scanning probe microscope with automatic probe replacement function.

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81. Park, Sang-il; Noh, Hanaul, Scanning probe microscope with drift compensation.

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82. Kwon, Joonhyung; Kim, Young Seok; Park, Sang-il, Scanning probe microscope with improved probe head mount.

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83. Kwon, Joonhyung; Kim, Young Seok; Park, Sang-il, Scanning probe microscope with improved probe tip mount.

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84. Hong, Jaewan; Kwon, Joonhyung; Park, Sang-il, Scanning probe microscope with improved scan accuracy, scan speed, and optical vision.

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85. Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Shielded probe for high-frequency testing of a device under test.

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86. Gleason, K. Reed; Lesher, Tim; Strid, Eric W.; Andrews, Mike; Martin, John; Dunklee, John; Hayden, Leonard; Safwat, Amr M. E., Shielded probe for testing a device under test.

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87. Gleason,K. Reed; Lesher,Tim; Andrews,Mike; Martin,John, Shielded probe for testing a device under test.

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88. Gleason,K. Reed; Lesher,Tim; Andrews,Mike; Martin,John, Shielded probe for testing a device under test.

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89. Gleason,K. Reed; Lesher,Tim; Andrews,Mike; Martin,John, Shielded probe for testing a device under test.

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90. Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Shielded probe for testing a device under test.

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91. Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Shielded probe for testing a device under test.

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92. Gleason,K. Reed; Lesher,Tim; Strid,Eric W.; Andrews,Mike; Martin,John; Dunklee,John; Hayden,Leonard; Safwat,Amr M. E., Shielded probe with low contact resistance for testing a device under test.

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93. Alexander John D. ; Kirk Michael D., Single axis vibration reducing system.

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94. Lundin, Johan, Slide holder for an optical microscope.

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95. Dunklee,John, Switched suspended conductor and connection.

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96. Sadeghian Marnani, Hamed; Winters, Jasper; Crowcombe, William Edward; van den Dool, Teunis Cornelis; Kramer, Geerten Frans Ijsbrand, System and method of performing scanning probe microscopy on a substrate surface.

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97. Strid,Eric W.; Schappacher,Jerry B.; Carlton,Dale E.; Gleason,K. Reed, System for evaluating probing networks.

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98. Workman, Richard K.; Fromm, David Patrick, System for scanning probe microscope input device.

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99. Andrews, Peter; Hess, David, System for testing semiconductors.

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100. Negishi, Kazuki; Hansen, Mark, Test apparatus for measuring a characteristic of a device under test.

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101. Campbell, Richard, Test structure and probe for differential signals.

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102. Campbell,Richard, Test structure and probe for differential signals.

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103. Rumbaugh,Scott, Thermal optical chuck.

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104. Rice, Alan F.; Huang, Lin, Tracking qualification and self-optimizing probe microscope and method.

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105. Xiao, Ke; Peterson, Brennan; Johnson, Timothy A., Via characterization for BCD and depth metrology.

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106. Valley, John F., Wafer nanotopography metrology for lithography based on thickness maps.

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107. Hayden, Leonard; Martin, John; Andrews, Mike, Wafer probe.

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108. Hayden,Leonard; Martin,John; Andrews,Mike, Wafer probe.

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109. Hayden,Leonard; Martin,John; Andrews,Mike, Wafer probe.

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110. Hayden,Leonard; Martin,John; Andrews,Mike, Wafer probe.

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111. Schwindt, Randy J.; Harwood, Warren K.; Tervo, Paul A.; Smith, Kenneth R.; Warner, Richard H., Wafer probe station having a skirting component.

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112. Schwindt,Randy J.; Harwood,Warren K.; Tervo,Paul A.; Smith,Kenneth R.; Warner,Richard H., Wafer probe station having a skirting component.

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113. Harwood, Warren K.; Tervo, Paul A.; Koxxy, Martin J., Wafer probe station having environment control enclosure.

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114. Harwood,Warren K.; Tervo,Paul A.; Koxxy,Martin J., Wafer probe station having environment control enclosure.

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115. Campbell, Richard, Wideband active-passive differential signal probe.

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