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Dual coaxial magnetic couplers for vacuum chamber robot assembly

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H02K-049/00
  • F16D-027/00
  • H02N-013/00
출원번호 US-0010377 (1993-01-28)
발명자 / 주소
  • Stevens Craig L. (Felton CA)
출원인 / 주소
  • Applied Materials, Inc. (Santa Clara CA 02)
인용정보 피인용 횟수 : 41  인용 특허 : 0

초록

A compact assembly of two magnetic couplers for coupling two coaxial angular shaft movements through a vacuum barrier. Each coupler includes two concentric rings of radially oriented magnets, arranged to provide magnetic coupling in a radial direction between corresponding magnets in the rings. A re

대표청구항

A dual magnetic coupler mechanism, comprising: a first coupler, having a primary ring of magnets and a secondary ring of magnets, said secondary ring concentric with and generally coplanar with the primary ring, each ring being mounted for rotation about a common axis, and each ring containing a plu

이 특허를 인용한 특허 (41)

  1. Lamb Karl J., Adjustable permanent magnet coupler.
  2. Seedorf, Silke; Krummen, Michael, Adjustment mechanism.
  3. Chabay Ilan S., Apparatus for displaying the interactions between magnetic fields.
  4. Obweger, Rainer; Werfel, Frank, Device for treating disc-like article and method for operating same.
  5. Neff, Edward A.; Vu, Taon M.; Huang, David D.; Okada, Naoyuki; Gladoch, Andrew, Direct drive motor for robotic finger.
  6. Barish, Benjamin J., Electrical devices, particularly electrical shavers, having magnetically coupled drives, and adapters therefor.
  7. Cheung, Jeffrey T.; Xin, Hao, Electrical generator with ferrofluid bearings.
  8. Cheung, Jeffrey T.; Xin, Hao, Electrical power generation by coupled magnets.
  9. De Armas Jorge, Electromagnetic-coupled/levitated apparatus and method for rotating equipment.
  10. Neff, Edward A.; Vu, Toan M.; Zanis, Reyhan, High-torque, low-current brushless motor.
  11. Nichols Stephen B. ; Jagannathan Shankar ; Leary Kevin ; Eisenhaure David ; Stanton William ; Hockney Richard ; Downer James ; Gondhalekar Vijay, Integrated magnetic levitation and rotation system.
  12. Nichols Stephen B. ; Jagannathan Shankar ; Leary Kevin ; Eisenhaure David ; Stanton William ; Hockney Richard ; Downer James ; Gondhalekar Vijay, Integrated magnetic levitation and rotation system.
  13. Neff, Edward A.; Vu, Taon M.; Gladoch, Andrew; Cato, Mark; Simunovic, Tomas, Linear actuator with moving central coil and permanent side magnets.
  14. Neff, Edward A.; Vu, Taon M.; Gladoch, Andrew; Cato, Sr., Mark; Simunovic, Tomas, Linear actuator with moving central coil and permanent side magnets.
  15. Neff, Edward A.; Huang, David; Vu, Toan, Low cost multi-coil linear actuator configured to accommodate a variable number of coils.
  16. Gery, Jean-Marc, Magnetic coupling using halbach type magnet array.
  17. Cheung,Jeffrey T.; Xin,Hao, Magnetic transducer with ferrofluid end bearings.
  18. Kubiak Richard Andrej,GBX ; Stonestreet Paul Richard,GBX, Magnetic transmission couplings.
  19. Neff, Edward A.; Vu, Toan M., Magnetically-latched actuator.
  20. Cheung, Jeffrey T., Mechanical translator with ultra low friction ferrofluid bearings.
  21. Koren, Zion; Ma, Yorkman; Tomas Cardema, Rudy Santo; Taoka, James Tsuneo; Wride, Lois; McFarland, Craig; Gibson, Shawn, Method and system for rotating a semiconductor wafer in processing chambers.
  22. Neff, Edward A.; Vu, Toan M., Methods and apparatus for closed loop force control in a linear actuator.
  23. Mita, Masahiro, Motor device.
  24. Cheung, Jeffrey T.; Xin, Hao, Multiple magnet transducer.
  25. Cheung, Jeffrey T.; Xin, Hao, Multiple magnet transducer with differential magnetic strengths.
  26. Cheung, Jeffrey T.; Xin, Hao, Multiple magnet transducer with differential magnetic strengths.
  27. Lamb Karl J., Permanent magnet coupler with adjustable air gaps.
  28. Kuwahara Tohru,JPX, Permanent magnet vehicle braking apparatus.
  29. Albertson, Robert V., Permanent magnets holding disk.
  30. Hosek, Martin, Robot system with independent arms.
  31. Neff, Edward A.; Vu, Toan M.; Antonius van de Ven, Johannes Theodorus; Ferris, Michael A.; Okada, Naoyuki; Huang, David D., Robotic finger.
  32. Sharp John,DEX, Rotating assembly and support therefor.
  33. Moura, Jairo T.; Gilchrist, Ulysses; Caveney, Robert T., Sealed robot drive.
  34. Yonnet Jean-Paul (Meylan FRX) Delamare Jerome (Grenoble FRX), System for providing rotary drive between two mechanical members by means of magnetic coupling, and a fluid meter includ.
  35. Li, Yicheng, Thermal processing system and thermal processing method.
  36. Cheung, Jeffrey T., Transverse mechanical translator with ferrofluid support.
  37. Dowe David Reynolds (Holley NY) Barrett Harold James (Brockport NY) Furlani Edward Paul (Lancaster NY), Underwater one-time-use camera with magnetic torque coupling for film winding.
  38. Takahashi, Eiichi; Fukai, Toshimasa; Tatsumi, Toshinori; Nishikiori, Yuichi; Kitakizaki, Kaoru, Vacuum capacitor.
  39. Takahashi, Eiichi; Fukai, Toshimasa; Tatsumi, Toshinori; Nishikiori, Yuichi; Kitakizaki, Kaoru; Tanimizu, Toru, Vacuum capacitor.
  40. Takahashi, Eiichi; Fukai, Toshimasa; Tatsumi, Toshinori; Nishikiori, Yuichi; Kitakizaki, Kaoru; Tanimizu, Toru, Vacuum capacitor.
  41. J. Kirston Henderson ; Boyd B. Bushman, Variable ratio angled magnetic drive.
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