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Precision cleaning system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B08B-003/10
출원번호 US-0122766 (1993-09-16)
발명자 / 주소
  • Smith
  • Jr. Charles W. (Fairview PA) Rosio Larry R. (Fairview PA) Shore Stephen H. (Erie PA) Karle James A. (Erie PA)
출원인 / 주소
  • Autoclave Engineers, Inc. (Erie PA 02)
인용정보 피인용 횟수 : 130  인용 특허 : 0

초록 ▼

An improved precision cleaning method includes introducing a solvent to a cleaning vessel, placing a workpiece in the cleaning vessel and contacting the workpiece with the solvent during a residence period. The cleaning vessel is then pressurized to a target pressure by adding carbon dioxide to the

대표청구항 ▼

A system for cleaning a workpiece with a supercritical cleaning fluid, comprising: a pressurizable cleaning vessel for receiving the workpiece, said cleaning vessel having an inlet and an outlet; a letdown valve in communication with said outlet; a heater for controlling the temperature of said clea

이 특허를 인용한 특허 (130)

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