이 특허를 인용한 특허 (106)

1. Guckel Henry ; Emmerich Harald,DEX ; Klein Jonathan L., Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts.

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2. Tang,Cha Mei; Makarova,Olga V., Anti-scatter grids and collimator designs, and their motion, fabrication and assembly.

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3. Tang,Cha Mei; Makarova,Olga V., Anti-scatter grids and collimator designs, and their motion, fabrication and assembly.

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4. Cohen, Adam L., Apparatus for electrochemical fabrication using a conformable mask.

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5. Wapner Phillip G. ; Hoffman Wesley P. ; Price Gregory J., Apparatus for manufacturing microtubes with axially variable geometries.

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6. Fischer, Kevin J.; Guckel, Henry; Gianchandani, Yogesh B., Bi-directional micromechanical latching linear actuator.

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7. Alfredo Martin Morales ; Linda A. Domeier, Cantilevered multilevel LIGA devices and methods.

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8. Aihara,Masami, Capacitor applicable to a device requiring large capacitance.

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9. Domeier, Linda A.; Morales, Alfredo M.; Gonzales, Marcela G.; Keifer, Patrick M., Castable plastic mold with electroplatable base.

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10. Morales,Alfredo Martin; Domeier,Linda A.; Gonzales,Marcela G.; Keifer,Patrick N.; Garino,Terry Joseph, Compliant cantilevered micromold.

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11. Schmitz, Gregory P.; Lockard, Michael S.; Wu, Ming-Ting; Miller, Eric C.; Cohen, Adam L., Counterfeiting deterrent and security devices, systems and methods.

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12. Schmitz, Gregory P.; Lockard, Michael S.; Wu, Ming-Ting; Miller, Eric C.; Cohen, Adam L., Counterfeiting deterrent and security devices, systems, and methods.

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13. Garcia Ernest J., Device and method for redirecting electromagnetic signals.

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14. Appleby,Michael; Fraser,Iain; Atkinson,James E., Devices, methods, and systems involving cast collimators.

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15. Appleby, Michael; Fraser, Iain; Atkinson, James E., Devices, methods, and systems involving cast computed tomography collimators.

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16. Appleby,Michael; Fraser,Iain; Atkinson,James E., Devices, methods, and systems involving castings.

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17. Appleby,Michael; Fraser,Iain; Atkinson,James E., Devices, methods, and systems involving castings.

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18. Garcia Ernest J. ; Christenson Todd R. ; Polosky Marc A., Electromechanical millimotor.

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19. Bajikar Sateesh S. ; De Carlo Francesco ; Song Joshua J., Enhanced adhesion for LIGA microfabrication by using a buffer layer.

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20. Bajikar, Sateesh S.; De Carlo, Francesco; Song, Joshua J., Enhanced adhesion for LIGA microfabrication by using a buffer layer.

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21. Huang, Changgang; Wu, Hongjiang; Wang, Song; Wan, Jiyu; Lee, Gyuhyun, Exposure method and exposure device.

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22. Guckel Henry (Madison WI) Christenson Todd R. (Madison WI) Skrobis Kenneth (Madison WI), Formation of microstructures using a preformed photoresist sheet.

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23. Jeffrey J. Sniegowski ; Murray S. Rodgers ; Paul J. McWhorter ; Daniel P. Aeschliman ; William M. Miller, Gas-driven microturbine.

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24. Kelly Kevin W., High aspect ratio, microstructure-covered, macroscopic surfaces.

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25. Donders Adrianus P. ; Ryan Terence G. ; Weijand Keon J.,NLX ; Wiklund Craig, Implantable medical device and method of manufacture.

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26. Kohler,Stewart M.; Allen,James J., Inertial measurement unit using rotatable MEMS sensors.

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27. Kohler,Stewart M.; Allen,James J., Inertial measurement unit using rotatable MEMS sensors.

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28. Guckel Henry ; Mangat Pawitterjit S., Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers.

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29. Schmitz, Gregory P.; Wu, Ming-Ting; Chen, Richard T.; Veeramani, Arun, MEMS micro debrider devices and methods of tissue removal.

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30. Baik, Chan wook; Jin, Yong wan; Park, Gun sik; Kim, Jong min; Shin, Young min; So, Jin kyu, Mask used for LIGA process, method of manufacturing the mask, and method of manufacturing microstructure using LIGA process.

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31. Blom, Claes; Vieider, Christian; Larsson, Olov, Metallic building element for optoelectronics.

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32. Blom,Claes; Vieider,Christian; Larsson,Olov, Metallic building element for optoelectronics.

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33. Siddons David Peter (Shoreham NY) Johnson Erik D. (Ridge NY) Guckel Henry (Madison WI) Klein Jonathan L. (Madison WI), Method and apparatus for micromachining using hard X-rays.

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34. Tang Cha-Mei, Method and apparatus for obtaining high-resolution digital X-ray and gamma ray images.

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35. Hawkins William G. ; Burke Cathie J. ; Calistri-Yeh Mildred ; Atkinson Diane, Method and materials for fabricating an ink-jet printhead.

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36. Burke Cathie J. ; Calistri-Yeh Mildred, Method and materials, including polybenzoxazole, for fabricating an ink-jet printhead.

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37. Kröninger, Werner; Schneegans, Manfred, Method for applying a resist layer, uses of adhesive materials, and adhesive materials and resist layer.

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38. Kr��ninger,Werner; Schneegans,Manfred, Method for applying a resist layer, uses of adhesive materials, and adhesive materials and resist layer.

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39. Adam L. Cohen, Method for electrochemical fabrication.

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40. Cohen Adam L., Method for electrochemical fabrication.

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41. Cohen, Adam L., Method for electrochemical fabrication.

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42. Cohen, Adam L., Method for electrochemical fabrication.

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43. Cohen, Adam L., Method for electrochemical fabrication.

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44. Cohen,Adam L., Method for electrochemical fabrication.

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45. Cohen, Adam L., Method for electromechanical fabrication.

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46. Kenichiro Suzuki JP, Method for fabricating a mask for a LIGA process.

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47. Honda, Nao; Mori, Satoshi; Tanaka, Shuji; Esashi, Masayoshi, Method for fabricating micromachine component of resin.

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48. Brown, Elliot R.; Evans, John D.; Bang, Christopher A.; Cohen, Adam L.; Lockard, Michael S.; Smalley, Dennis R.; Grosser, Morton, Method for fabricating miniature structures or devices such as RF and microwave components.

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49. Brown, Elliott R.; Evans, John D.; Bang, Christopher A.; Cohen, Adam L.; Lockard, Michael S.; Smalley, Dennis R.; Grosser, Morton, Method for fabricating miniature structures or devices such as RF and microwave components.

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50. Cohen, Adam L., Method of electrochemical fabrication.

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51. Mehran Mehregany ; Francis L. Merat, Method of making micromotors with utilitarian features.

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52. Eyre, Francis B.; Fink, Wolfgang, Method to create arbitrary sidewall geometries in 3-dimensions using liga with a stochastic optimization framework.

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53. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.

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54. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.

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55. Appleby, Michael P.; Fraser, Iain; Atkinson, James E., Methods for manufacturing three-dimensional devices and devices created thereby.

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56. Appleby,Michael P.; Fraser,Iain; Atkinson,James E., Methods for manufacturing three-dimensional devices and devices created thereby.

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57. Mehregany Mehran ; Merat Francis Lawrence, Methods of fabricating micromotors with utilitarian features.

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58. Schmitz, Gregory P.; Arcenio, Gregory B.; Leguidleguid, Ronald; Perea, Juan Diego, Micro debrider devices and methods of tissue removal.

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59. Takanori Katoh JP; Yanping Zhang JP, Micro structure and its manufacture method.

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60. Garcia Ernest J., Micro thrust and heat generator.

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61. Gianchandani, Yogesh B.; Takahata, Kenichi, Micro-electro-discharge machining method and apparatus.

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62. Gianchandani, Yogesh B.; Takahata, Kenichi, Micro-electro-discharge machining utilizing semiconductor electrodes.

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63. Holman Jason ; Emo Stephen M. ; Norwood Robert A. ; Shacklette Lawrence W., Micro-optic switch with lithographically fabricated polymer alignment features for the positioning of switch components and optical fibers.

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64. Garcia Ernest J., Microelectromechanical gyroscope.

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65. Barnes Stephen M. ; Miller Samuel L. ; Jensen Brian D. ; Rodgers M. Steven ; Burg Michael S., Microelectromechanical ratcheting apparatus.

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66. Allen James J., Microelectromechanical reciprocating-tooth indexing apparatus.

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67. Polosky Marc A. ; Garcia Ernest J. ; Plummer David W., Microelectromechanical timer.

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68. Dewa Andrews S. ; Sevrain Christophe J. P., Microfabricated fluidic devices.

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69. Kopf-Sill Anne R. ; Parce John Wallace, Microfluidic systems incorporating varied channel dimensions.

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70. Kopf-Sill, Anne R.; Parce, John Wallace, Microfluidic systems incorporating varied channel dimensions.

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71. Winger, Theodore M.; Evans, John D.; Harvey, Noel G., Microfluidic valve and microactuator for a microvalve.

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72. Gianchandani, Yogesh B.; McNamara, Shamus P., Micromachined shock sensor.

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73. Frank Watt SG; Stuart Victor Springham SG; Thomas Osipowicz SG; Mark Breese GB, Micromachining using high energy light ions.

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74. Gianchandani, Yogesh B.; Hetrick, Joel A.; Chu, Larry Li-Yang, Micromechanical actuation apparatus.

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75. Ohnstein Thomas R. ; Zook J. David ; Starr James B., Micromechanical stepper motor.

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76. Overton Edward B., Microstructure chromatograph with rectangular column.

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77. Wapner Phillip G. ; Hoffman Wesley P. ; Price Gregory, Microtubes devices based on surface tension and wettability.

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78. Brown, Elliot R.; Evans, John D.; Bang, Christopher A.; Cohen, Adam L.; Lockard, Michael S.; Smalley, Dennis R.; Grosser, Morton, Miniature RF and microwave components and methods for fabricating such components.

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79. Brown, Elliott R.; Evans, John D.; Bang, Christopher A.; Cohen, Adam L.; Lockard, Michael S.; Smalley, Dennis R.; Grosser, Morton, Miniature RF and microwave components and methods for fabricating such components.

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80. Brown,Elliott R.; Evans,John D.; Bang,Christopher A.; Cohen,Adam L.; Lockard,Michael S.; Smalley,Dennis R.; Grosser,Morton, Miniature RF and microwave components and methods for fabricating such components.

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81. Lockard, Michael S.; Frodis, Uri; Cohen, Adam L.; Chen, Richard T., Miniature shredding tool for use in medical applications and methods for making.

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82. Lockard, Michael S.; Frodis, Uri; Cohen, Adam L.; Chen, Richard T., Miniature shredding tool for use in medical applications and methods for making.

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83. Lockard, Michael S.; Frodis, Uri; Cohen, Adam L.; Chen, Richard T.; Dupont, Pierre E.; Del Nido, Pedro J.; Vasilyev, Nikolay V., Miniature shredding tool for use in medical applications and methods for making.

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84. Lockard, Michael S.; Frodis, Uri; Cohen, Adam L.; Chen, Richard T.; Wu, Ming Ting; Schmitz, Gregory P.; Miller, Eric C., Miniature shredding tool for use in medical applications and methods for making.

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85. Cohen, Adam L., Multi-layer encapsulated structures.

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86. Wu, Ming Ting; Larsen, III, Rulon Joseph; Kim, Young; Kim, Kieun; Cohen, Adam L.; Kumar, Ananda H.; Lockard, Michael S.; Smalley, Dennis R., Multi-layer, multi-material fabrication methods for producing micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties.

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87. Wu, Ming Ting; Larsen, III, Rulon J.; Kim, Young; Kim, Kieun; Cohen, Adam L.; Kumar, Ananda H.; Lockard, Michael S.; Smalley, Dennis R., Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties.

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88. Wu, Ming Ting; Larsen, III, Rulon J.; Kim, Young; Kim, Kieun; Cohen, Adam L.; Kumar, Ananda H.; Lockard, Michael S.; Smalley, Dennis R., Multi-layer, multi-material micro-scale and millimeter-scale devices with enhanced electrical and/or mechanical properties.

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89. Dentinger, Paul; Krafick, Karen L.; Simison, Kelby Liv, Photoimageable composition.

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90. Weber,William; Mori,Satoshi; Honda,Nao, Photoresist compositions, hardened forms thereof, hardened patterns thereof and metal patterns formed using them.

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91. Kaida, Yuriko; Sakamoto, Hiroshi, Process for producing article having fine concavo-convex structure on its surface and process for producing wire-grid polarizer.

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92. Kelly, James John; Goods, Steven Howard; Yang, Nancy Yuan-Chi; Cadden, Charles Henry, Process for the electrodeposition of low stress nickel-manganese alloys.

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93. Guckel Henry ; Emmerich Harald,DEX ; Klein Jonathan L., Radiation mask adapted to be aligned with a photoresist layer and method of making the same.

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94. Domeier, Linda A.; Hruby, Jill M.; Morales, Alfredo M., Sacrificial plastic mold with electroplatable base.

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95. Linda A. Domeier ; Jill M. Hruby ; Alfredo M. Morales, Sacrificial plastic mold with electroplatable base.

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96. Schmitz, Gregory P.; Miller, Eric C.; Chen, Richard T.; Wu, Ming Ting, Selective tissue removal tool for use in medical applications and methods for making and using.

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97. Schmitz, Gregory P.; Miller, Eric C.; Chen, Richard T.; Wu, Ming-Ting, Selective tissue removal tool for use in medical applications and methods for making and using.

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98. Schmitz, Gregory P.; Miller, Eric C.; Chen, Richard T.; Wu, Ming-Ting, Selective tissue removal tool for use in medical applications and methods for making and using.

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99. Stampfl Jurgen ; Cooper Alexander ; Leitgeb Rudolf ; Cheng Yih-Lin ; Prinz Friedrich, Shape deposition manufacturing of microscopic ceramic and metallic parts using silicon molds.

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100. Appleby, Michael P.; Randolph, William T.; Klinger, Jill E., Systems for large area micro mechanical systems.

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101. Appleby, Michael P.; Fraser, Iain; Paulus, John, Systems, devices, and/or methods for manufacturing castings.

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102. Appleby, Michael; Fraser, Iain; Paulus, John, Systems, devices, and/or methods for manufacturing castings.

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103. Appleby, Michael; Paulus, John; Fraser, Iain; Klinger, Jill; Heneveld, Benjamin, Systems, devices, and/or methods for producing holes.

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104. Gearhart Steven S., Thick metal integrated transmission line fabrication.

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105. Tang, Cha-Mei, Two-dimensional, anti-scatter grid and collimator designs, and its motion, fabrication and assembly.

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106. Aigeldinger, Georg; Skala, Dawn M.; Griffiths, Stewart K.; Talin, Albert Alec; Losey, Matthew W.; Yang, Chu Yeu Peter, Vitreous carbon mask substrate for X-ray lithography.

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