$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Steady-state, glow discharge plasma 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01J-007/24
  • H05B-031/26
출원번호 US-0068508 (1993-05-28)
발명자 / 주소
  • Roth John R. (Knoxville TN) Tsai Peter P. (Knoxville TN) Liu Chaoyu (Knoxville TN)
출원인 / 주소
  • The University of Tennessee Research Corp. (Knoxville TN 02)
인용정보 피인용 횟수 : 59  인용 특허 : 0

초록

A steady-state, glow discharge plasma is generated within the volume between a pair of parallel, insulated metal plate electrodes spaced up to 5 cm apart and R.F. energized with an rms potential of 1 to 5 KV at 1 to 100 KHz. The electrodes are located within an enclosure capable of maintaining an at

대표청구항

Apparatus to generate and maintain a glow discharge plasma at a pressure of about 1 atmosphere, the apparatus comprising a pair of electrically insulated plate electrodes aligned and secured in parallel facing position, means for supplying and maintaining a noble gas at a pressure of about one atmos

이 특허를 인용한 특허 (59)

  1. Kunhardt Erich E. ; Becker Kurt H., AC glow plasma discharge device having an electrode covered with apertured dielectric.
  2. Burada, Venkata; Sekhar, Jainagesh; Batt, Jerod; Reddy, Ganta S.; Kandell, Brian, Anti-smudging, better gripping, better shelf-life of products and surfaces.
  3. Westendorp Han ; Meiling Hans ; Vanderpot John William ; Berrian Donald, Apparatus and method for igniting plasma in a process module.
  4. Woodbridge, Terrance O., Apparatus and method for sanitizing air and spaces.
  5. Shanov, Vesselin Nikolov; Datta, Saswati; Miralai, Seved Farhad; McDaniel, John Andrew, Apparatus and method for treating a workpiece using plasma generated from microwave radiation.
  6. Hwang Yuan-Ko,TWX, Apparatus for controlling etch rate when using consumable electrodes during plasma etching.
  7. de Vries, Hindrik Willem; Mori, Fuyuhiko; Aldea, Eugen; van de Sanden, Mauritius Cornelius Maria, Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions.
  8. Mikhael,Michael G.; Yializis,Angelo; Ellwanger,Richard E., Atmospheric glow discharge with concurrent coating deposition.
  9. Song, Seok Kyun, Atmospheric pressure plasma generating apparatus by induction electrode.
  10. Peter Maschwitz ; Jaime Li, Bipolar plasma source, plasma sheet source, and effusion cell utilizing a bipolar plasma source.
  11. Ricatto, Pascal J.; Houston, Edward J.; Crowe, Richard, Chemical processing using non-thermal discharge plasma.
  12. Price, Robert O.; Chiavarini, Robert; Kolb, Juergen F.; Schoenbach, Karl H., Cold air atmospheric pressure micro plasma jet application method and device.
  13. Wadsworth Larry C. ; Jirsak Oldrich,CZX ; Tsai Peter Ping-Yi, Composite of pleated and nonwoven webs.
  14. Malik, Muhammed Arif; Schoenbach, Karl H., Device and method for gas treatment using pulsed corona discharges.
  15. Spence Paul D., Discharge method and apparatus for generating plasmas.
  16. Spence Paul D., Discharge methods and electrodes for generating plasmas at one atmosphere of pressure, and materials treated therewith.
  17. Buchanan, Walter Riley; Hruska, Christopher Daniel, Distributed dielectric barrier discharge reactor.
  18. Ashpis, David E., Dust removal from solar cells.
  19. Ricatto,Pascal J.; Houston,Edward J.; Crowe,Richard, Electrode discharge, non-thermal plasma device (reactor) for the pre-treatment of combustion air.
  20. Angelo Yializis ; Wolfgang Decker ; Michael G. Mikhael ; Shahid A. Pirzada, Electrode for glow-discharge atmospheric-pressure plasma treatment.
  21. Crowe,Richard; Babko Malyi,Sergei; Kovach,Kurt; Tropper,Seth, Electrode for use with atmospheric pressure plasma emitter apparatus and method for using the same.
  22. Kunhardt, Erich E.; Becker, Kurt H., Glow plasma discharge device.
  23. Kunhardt Erich E. ; Becker Kurt H., Glow plasma discharge device having electrode covered with perforated dielectric.
  24. Crowe,Richard; Korfiatis,George; Babko Malyi,Sergei, In situ sterilization and decontamination system using a non-thermal plasma discharge.
  25. Song,Seok Kyun, Induction concentration remote atmospheric pressure plasma generating apparatus.
  26. Samimy, Mohammad; Adamovich, Igor, Localized arc filament plasma actuators for noise mitigation and mixing enhancement.
  27. Samimy,Mohammad; Adamovich,Igor, Localized arc filament plasma actuators for noise mitigation and mixing enhancement.
  28. Buchanan, Walter Riley, Membrane plasma reactor.
  29. Roth John Reece, Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure.
  30. Kunhardt, Erich; Becker, Kurt, Method and apparatus for stabilizing of the glow plasma discharges.
  31. Wadsworth Larry C. (Knoxville TN) Tsai Peter Ping-yi (Knoxville TN), Method and apparatus for the electrostatic charging of a web or film.
  32. Mohamed, Abdel Aleam H.; Kolb, Juergen Friedrich; Schoenbach, Karl H., Method and device for creating a micro plasma jet.
  33. Mohamed, Abdel-Aleam H; Schoenbach, Karl H.; Chiavarini, Robert; Price, Robert O.; Kolb, Juergen, Method and device for creating a micro plasma jet.
  34. Woodbridge, Terrance, Method and system for generating non-thermal plasma.
  35. Hwang Yuan-Ko,TWX, Method for controlling etch rate when using consumable electrodes during plasma etching.
  36. Kunhardt Erich E. ; Becker Kurt H., Method for generating and maintaining a glow plasma discharge.
  37. Miller, Paul A.; Aragon, Ben P., Method for generating surface plasma.
  38. Carling, Jason D., Method of coating polyolefin floor tile.
  39. Babayan,Steven E.; Hicks,Robert F., Method of processing a substrate.
  40. Claar, James A.; Cuomo, Jerome J.; Diehl, David A.; Oldham, Christopher J.; Sanwald, Roger C.; Wilt, Truman F.; Yancey, Peter J., Methods for removal of polymeric coating layers from coated substrates.
  41. Haney, Thayne; Jenkins, Mark; Forster, Cheryl; Shapiro, Jeremiah; Hedquist, Dana, Modular synthetic floor tile configured for enhanced performance.
  42. Jenkins, Mark L.; Shapiro, Jeremiah; Forster, Cheryl; North, Vaughn W.; Stott, David L., Modular tile with controlled deflection.
  43. Buchanan, Walter Riley, Plasma reactor for liquid and gas.
  44. Abe, Toshiji; Takahashi, Toshiki; Matsuura, Hiroyuki, Plasma treating apparatus.
  45. Yasushi Sawada JP; Kosuke Nakamura JP; Hiroaki Kitamura JP; Yoshitami Inoue JP, Plasma treatment apparatus and plasma treatment method performed by use of the same apparatus.
  46. Datta, Saswati; McDaniel, John Andrew; Miralai, Seyed Farhad; Shanov, Vesselin Nikolov, Portable apparatus and method for treating a workpiece.
  47. Buchanan, Walter Riley; Forsee, Grant William, Quasi-resonant plasma voltage generator.
  48. Roth, J. Reece, Remote exposure of workpieces using a plasma.
  49. J. Reece Roth, Remote exposure of workpieces using a recirculated plasma.
  50. Paul D. Spence, Resonant excitation method and apparatus for generating plasmas.
  51. Christodoulatos, Christos; Korfiatis, George; Crowe, Richard; Kunhardt, Erich E, Segmented electrode capillary discharge, non-thermal plasma apparatus and process for promoting chemical reactions.
  52. Houston, Jr., Edward J.; Kovach, Kurt; Crowe, Richard; Tropper, Seth; Epstein, Michael, Slot discharge non-thermal plasma apparatus and process for promoting chemical reaction.
  53. Laroussi Mounir, Sterilization of liquids using plasma glow discharge.
  54. Jenkins, Mark L.; Shapiro, Jeremiah; Forster, Cheryl, Tile with multiple-level surface.
  55. Forster, Cheryl; Jenkins, Mark; Laitinen, Tyler, Tile with wide coupling configuration and method for the same.
  56. Forster, Cheryl; Jenkins, Mark; Laitinen, Tyler, Tile with wide mouth coupling.
  57. Hebert Edmund A. ; Lutz Mitchell E. ; Mydlack Thomas, Treatment for facilitating bonding between golf ball layers and resultant golf balls.
  58. Hebert, Edmund A.; Lutz, Mitchell E.; Mydlack, Thomas, Treatment for facilitating bonding between golf ball layers and resultant golf balls.
  59. Kovach,Kurt M.; Tropper,Seth; Crowe,Richard; Houston,Edward J.; Korfiatis,George; Kunhardt,Erich, Use of self-sustained atmospheric pressure plasma for the scattering and absorption of electromagnetic radiation.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로