$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Hybrid pulsed valve for thin film coating and method

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-001/02
출원번호 US-0121726 (1993-09-15)
발명자 / 주소
  • Haaland Peter D. (Centerville OH)
출원인 / 주소
  • Mobium Enterprises Corporation (Dayton OH 02)
인용정보 피인용 횟수 : 95  인용 특허 : 0

초록

An apparatus for coating a substrate with a relatively thin, uniform film of a liquid on a substrate with a minimum of waste. The apparatus includes a droplet generator capable of generating droplets of the liquid at a predetermined rate and of a predetermined size, a pulsed gas jet and a computer c

대표청구항

A method of coating a thin film on a substrate comprising the steps of: generating a droplet of a liquid to coat said substrate; and generating a pulse of gas to contact and envelop said droplet, whereby said droplet is accelerated and propelled toward said substrate at a velocity at impact sufficie

이 특허를 인용한 특허 (95)

  1. Renn, Michael J.; Essien, Marcelino; King, Bruce H.; Paulsen, Jason A., Aerodynamic jetting of aerosolized fluids for fabrication of passive structures.
  2. Renn, Michael J.; King, Bruce H.; Paulsen, Jason A., Aerodynamic jetting of blended aerosolized materials.
  3. King, Bruce H.; Woolfson, Steven Barry; Ramahi, David H., Apparatus for anisotropic focusing.
  4. Courtenay, Robert William, Apparatus for coating of a semiconductor wafer.
  5. Renn,Michael J.; King,Bruce H.; Essien,Marcelino; Hunter,Lemna J., Apparatuses and method for maskless mesoscale material deposition.
  6. Renn, Michael J.; King, Bruce H.; Essien, Marcelino; Marquez, Gregory J.; Giridharan, Manampathy G.; Sheu, Jyh-Cherng, Apparatuses and methods for maskless mesoscale material deposition.
  7. Renn, Michael J.; King, Bruce H.; Essien, Marcelino; Marquez, Gregory J.; Giridharan, Manampathy G.; Sheu, Jyh-Cherng, Apparatuses and methods for maskless mesoscale material deposition.
  8. Renn,Michael J.; King,Bruce H.; Essien,Marcelino; Marquez,Gregory J.; Giridharan,Manampathy G.; Sheu,Jyh Cherng, Apparatuses and methods for maskless mesoscale material deposition.
  9. Peeters Eric ; Noolandi Jaan ; Apte Raj B. ; Floyd Philip D. ; Small Jonathan A. ; Kovacs Gregory J.,CAX ; Lean Meng H. ; Volkel Armin R. ; Bolte Steven B. ; Shi An-Chang,CAX ; Endicott Frederick J. , Ballistic aerosol making apparatus for marking with a liquid material.
  10. Lean, Meng H.; Ricciardelli, John J.; Savino, Michael J.; Polatkan, Osman T.; Stolfi, Fred R.; Lindale, Eric, Ballistic aerosol marking apparatus.
  11. Peeters, Eric; Noolandi, Jaan; Apte, Raj B.; Floyd, Philip D.; Small, Jonathan A.; Kovacs, Gregory J.; Lean, Meng H.; Volkel, Armin R.; Bolte, Steven B.; Shi, An-Chang; Endicott, Frederick J.; Anders, Ballistic aerosol marking apparatus for marking a substrate.
  12. Eric Peeters ; Jaan Noolandi ; Raj B. Apte ; Philip D. Floyd ; Jonathan A. Small ; Gregory J. Kovacs CA; Meng H. Lean ; Armin R. Volkel ; Steven B. Bolte ; An-Chang Shi CA; Frederick J. End, Ballistic aerosol marking apparatus for treating a substrate.
  13. Philip D. Floyd ; Frederick J. Endicott ; Gregory B. Anderson ; Jurgen Daniel ; Eric Peeters, Ballistic aerosol marking apparatus with non-wetting coating.
  14. Philip D. Floyd ; Tuan Anh Vo ; Kaiser H. Wong ; Gregory B. Anderson ; Eric Peeters ; Jaan Noolandi CA; Meng H. Lean ; Armin R. Volkel CA; John E. Northrup ; Jurgen Daniel ; G. A. Neville C, Ballistic aerosol marking apparatus with stacked electrode structure.
  15. Eric Peeters ; Jaan Noolandi ; Raj B. Apte ; Philip D. Floyd ; Jonathan A. Small ; Gregory J. Kovacs CA; Meng H. Lean ; Armin R. Volkel ; Steven B. Bolte ; An-Chang Shi CA; Frederick J. End, Cartridge for use in a ballistic aerosol marking apparatus.
  16. Scalf, Mark A.; Smith, Lloyd M.; Westphall, Michael S.; Ebeling, Daniel D., Charge reduction in electrospray mass spectrometry.
  17. Berggren, William Travis; Westphall, Michael Scott; Smith, Lloyd Michael, Charged particle source with droplet control for mass spectrometry.
  18. Courtenay Robert ; Brooks Jerry M., Coated semiconductor die/leadframe assembly and method for coating the assembly.
  19. Robert Courtenay ; Jerry M. Brooks, Coated semiconductor die/leadframe assembly and method for coating the assembly.
  20. Glezer, Ari; Crittenden, Thomas M., Combustion-driven jet actuator.
  21. Griffiths, Andrew; Weitz, David; Ahn, Keunho; Link, Darren; Bibette, Jerome, Compartmentalised combinatorial chemistry by microfluidic control.
  22. Griffiths, Andrew; Weitz, David; Link, Darren; Ahn, Keunho; Bibette, Jerome, Compartmentalised combinatorial chemistry by microfluidic control.
  23. Griffiths, Andrew; Weitz, David; Ahn, Keunho; Link, Darren R.; Bibette, Jerome, Compartmentalized screening by microfluidic control.
  24. Samuels, Michael; Olson, Jeffrey Charles; Watson, Andrew; Brown, Keith; Link, Darren Roy, Compositions and methods for molecular labeling.
  25. Hutchison, John Brian; Olson, Jeffrey Charles; Link, Darren Roy, Digital analyte analysis.
  26. Larson, Jonathan William; Zhong, Qun; Link, Darren Roy, Digital analyte analysis.
  27. Larson, Jonathan William; Zhong, Qun; Link, Darren Roy, Digital analyte analysis.
  28. Link, Darren R.; Zhong, Qun; Watson, Andrew, Digital analyte analysis.
  29. Olson, Jeffrey; Link, Darren R., Digital analyte analysis.
  30. Renn,Michael J., Direct Write짰 System.
  31. Renn, Michael J.; King, Bruce H.; Giridharan, Manampathy G.; Sheu, Jyh-Cherng, Direct write# system.
  32. Renn,Michael J., Direct write짰 system.
  33. Floyd Philip D. ; Biegelsen David K. ; Peeters Eric ; Endicott Frederick J. ; Veregin Richard P. N.,CAX ; Anderson Gregory B. ; Moffat Karen A.,CAX ; McDougall Maria N. V.,CAX ; Noolandi Jaan,CAX ; V, Electro-static particulate source, circulation, and valving system for ballistic aerosol marking.
  34. Frey, Brian L.; Smith, Lloyd M.; Westphall, Michael S., Electrospray ionization ion source with tunable charge reduction.
  35. Sato, Tsuyoshi; Ooshiro, Kenichi, Film forming apparatus forming a coating film using spiral coating while adjusting sound wave projected onto the coating film.
  36. Holtze, Christian; Weitz, David A.; Hutchison, John Brian, Fluorocarbon emulsion stabilizing surfactants.
  37. Holtze, Christian; Weitz, David A.; Hutchison, John Brian, Fluorocarbon emulsion stabilizing surfactants.
  38. Renn, Michael J.; King, Bruce H., Forming structures using aerosol jet® deposition.
  39. Griffiths, Andrew David; Weitz, David A.; Link, Darren R.; Ahn, Keunho; Bibette, Jerome, In vitro evolution in microfluidic systems.
  40. Griffiths, Andrew David; Weitz, David A.; Link, Darren R.; Ahn, Keunho; Bibette, Jerome, In vitro evolution in microfluidic systems.
  41. Westphall,Michael S.; Smith,Lloyd M., Inductive detection for mass spectrometry.
  42. Wong Kaiser H. ; Vo Tuan Anh, Inorganic overcoat for particulate transport electrode grid.
  43. Ishikawa, Akihito; Tanaka, Tomoki; Takeda, Nobuo; Yoshida, Masataka, Jet coating method for semiconductor processing.
  44. Jaan Noolandi ; An-Chang Shi CA; T. Brian McAneney CA, Kinetic fusing of a marking material.
  45. Renn,Michael J.; King,Bruce H.; Essien,Marcelino; Giridharan,Manampathy G.; Sheu,Jyh Cherng, Laser processing for heat-sensitive mesoscale deposition.
  46. Renn, Michael J.; King, Bruce H.; Essien, Marcelino; Giridharan, Manampathy G.; Sheu, Jyh-Cherng, Laser processing for heat-sensitive mesoscale deposition of oxygen-sensitive materials.
  47. Miller, Benjamin J.; Zhong, Qun; Link, Darren Roy, Manipulating droplet size.
  48. Fraden, Seth; Cristobal-Azkarate, Galder, Manipulation of fluids and reactions in microfluidic systems.
  49. Fraden, Seth; Cristobal-Azkarate, Galder, Manipulation of fluids and reactions in microfluidic systems.
  50. Fraden, Seth; Cristobal-Azkarate, Galder, Manipulation of fluids and reactions in microfluidic systems.
  51. Fraden, Seth; Boukellal, Hakim; Jia, Yanwei; Selimovic, Seila; Rowat, Amy; Agresti, Jeremy; Weitz, David A., Manipulation of fluids, fluid components and reactions in microfluidic systems.
  52. Fraden, Seth; Boukellal, Hakim; Jia, Yanwei; Selimovic, Seila; Rowat, Amy; Agresti, Jeremy; Weitz, David A., Manipulation of fluids, fluid components and reactions in microfluidic systems.
  53. Miller, Benjamin; Hutchison, Brian; Wilson, Andrew; Larson, Jonathan; Zhong, Qun; Yurkovetsky, Yevgeny; Link, Darren; Weary, Mark, Manipulation of microfluidic droplets.
  54. King, Bruce H.; Marquez, Gregory J.; Renn, Michael J., Mechanically integrated and closely coupled print head and mist source.
  55. King, Bruce H.; Marquez, Gregory James; Renn, Michael J., Mechanically integrated and closely coupled print head and mist source.
  56. Punsalan,David; Mardilovich,Peter; Herman,Gregory; Koegler,John M., Method and system to deposit drops.
  57. Eric Peeters ; Jaan Noolandi ; Raj B. Apte ; Philip D. Floyd ; Jonathan A. Small ; Gregory J. Kovacs CA; Meng H. Lean ; Armin R. Volkel ; Steven B. Bolte ; An-Chang Shi CA; Frederick J. End, Method for marking with a liquid material using a ballistic aerosol marking apparatus.
  58. Robert William Courtenay, Method of coating a semiconductor wafer.
  59. Haaland Peter D., Method of coating a thin film on a substrate.
  60. Thompson Mark E. ; Forrest Stephen R., Method of making a display.
  61. Peeters, Eric; Noolandi, Jaan; Apte, Raj B.; Floyd, Philip D.; Lean, Meng H.; Volkel, Armin R., Method of making a print head for use in a ballistic aerosol marking apparatus.
  62. Eric Peeters ; Jaan Noolandi ; Raj B. Apte ; Philip D. Floyd ; Jonathan A. Small ; Gregory J. Kovacs CA; Meng H. Lean ; Armin R. Volkel ; Steven B. Bolte ; An-Chang Shi CA; Frederick J. End, Method of marking a substrate employing a ballistic aerosol marking apparatus.
  63. Goto, Tamotsu, Method of supplying a liquid material onto a base, a droplet ejection apparatus, a base with a plurality of color elements, an electro-optic apparatus and an electronic apparatus.
  64. Griffiths, Andrew David; Abell, Chris; Hollfelder, Florian; Mastrobattista, Enrico, Method of synthesis and testing of combinatorial libraries using microcapsules.
  65. Peeters, Eric; Noolandi, Jaan; Apte, Raj B.; Floyd, Philip D.; Small, Jonathan A.; Kovacs, Gregory J.; Lean, Meng H.; Volkel, Armin R.; Bolte, Steven B.; Shi, An-Chang; Endicott, Frederick J.; Anders, Method of treating a substrate employing a ballistic aerosol marking apparatus.
  66. Yurkovetsky, Yevgeny; Link, Darren Roy; Larson, Jonathan William, Methods for forming mixed droplets.
  67. Link, Darren R.; Boitard, Laurent; Branciforte, Jeffrey; Charles, Yves; Feke, Gilbert; Lu, John Q.; Marran, David; Tabatabai, Ahmadali; Weiner, Michael; Hinz, Wolfgang; Rothberg, Jonathan M., Microfluidic devices and methods of use in the formation and control of nanoreactors.
  68. Link, Darren R.; Boitard, Laurent; Branciforte, Jeffrey; Charles, Yves; Feke, Gilbert; Lu, John Q.; Marran, David; Tabatabai, Ahmadali; Weiner, Michael; Hinz, Wolfgang; Rothberg, Jonathan M., Microfluidic devices and methods of use in the formation and control of nanoreactors.
  69. Link, Darren; Boitard, Laurent; Branciforte, Jeffrey; Charles, Yves; Feke, Gilbert; Lu, John Q.; Marran, David; Tabatabai, Ahmadali; Weiner, Michael; Hinz, Wolfgang; Rothberg, Jonathan M., Microfluidic devices and methods of use in the formation and control of nanoreactors.
  70. King, Bruce H., Miniature aerosol jet and aerosol jet array.
  71. King, Bruce H.; Renn, Michael J.; Paulsen, Jason A., Miniature aerosol jet and aerosol jet array.
  72. Glezer Ari ; Smith Barton L. ; Trautman Mark A., Modifications of fluid flow about bodies and surfaces with synthetic jet actuators.
  73. Thompson Mark E. ; Forrest Stephen R., Multicolor display devices.
  74. Essien, Marcelino; King, Bruce H., Multiple sheath multiple capillary aerosol jet.
  75. Wong Kaiser H. ; Vo Tuan Anh ; Hsieh Bing R., Organic overcoat for electrode grid.
  76. Vo Tuan Anh ; Hays Dan A. ; Peeters Eric ; Elhatem Abdul M. ; Wong Kaiser H. ; Kubby Joel A. ; Noolandi Jaan, Particulate marking material transport apparatus utilizing traveling electrostatic waves.
  77. Floyd Philip D. ; Biegelsen David K. ; Peeters Eric ; Endicott Frederick J. ; Veregin Richard P. N.,CAX ; Anderson Gregory B. ; Moffat Karen A.,CAX ; McDougall Maria N. V,CAX ; Noolandi Jaan,CAX ; Vo, Particulate source, circulation, and valving system for ballistic aerosol marking.
  78. Berggren, William Travis; Westphall, Michael Scott; Scalf, Mark Andrew; Smith, Lloyd Michael, Piezoelectric charged droplet source.
  79. Takeuchi Yukihisa,JPX ; Takahashi Nobuo,JPX, Process for uniformly mixing materials and apparatus therefor.
  80. Link, Darren, Sample multiplexing.
  81. Samuels, Michael; Link, Darren Roy, Sandwich assays in droplets.
  82. Griffiths, Andrew David; Abell, Chris; Hollfelder, Florian; Mastrobattista, Enrico, Selection by compartmentalised screening.
  83. Griffiths, Andrew David; Abell, Chris; Hollfelder, Florian; Mastrobattista, Enrico, Selection by compartmentalised screening.
  84. Link, Darren R.; Weiner, Michael; Marran, David; Rothberg, Jonathan M., Selection of compartmentalized screening method.
  85. Reardon,Timothy J.; Oberlitner,Thomas H.; Meuchel,Craig P.; Owczarz,Aleksander; Thompson,Raymon F., Semiconductor processing apparatus.
  86. Reardon Timothy J. (Kalispell MT) Meuchel Craig P. (Kalispell MT) Oberlitner Thomas H. (Kalispell MT), Semiconductor processing spray coating apparatus.
  87. Reardon Timothy J. ; Meuchel Craig P. ; Oberlitner Thomas H., Semiconductor processing spray coating apparatus.
  88. Goldberg,Jeffrey B.; Spencer,William; Bridges,Bruce K., Small volume liquid handling apparatus and method.
  89. Sadler Steven P. ; Vinciarelli Patrizio, Soldering.
  90. Glezer Ari ; Wiltse John W., Synthetic jet actuators for mixing applications.
  91. Link, Darren R., Systems for handling microfludic droplets.
  92. Yudasaka,Ichio; Shimoda,Tatsuya; Kanbe,Sadao; Miyazawa,Wakao, Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device.
  93. Yudasaka,Ichio; Shimoda,Tatsuya; Kanbe,Sadao; Miyazawa,Wakao, Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device.
  94. Griffiths, Andrew David; Weitz, David; Link, Darren; Ahn, Keunho; Bibette, Jerome, Vitro evolution in microfluidic systems.
  95. Leigh, Joseph; Liu, Jianwei, Wettability improvement of spun-on resist and thermoplastic materials.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트