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Photolithographic and electron beam lithographic fabrication of micron and submicron three-dimensional arrays of electro

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01M-004/60
출원번호 US-0828414 (1992-01-31)
발명자 / 주소
  • Otagawa Takaaki (Fremont CA) Madou Marc J. (Palo Alto CA) Wachsman Leonor A. (Palo Alto CA)
출원인 / 주소
  • Osaka Gas Company, Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 59  인용 특허 : 0

초록

The present invention relates to a method to produce a thin film three dimensional microelectrode of an electrically conductive polymer having an organized array of identical microprotrusions, which method comprises: (a) depositing at least one conductive metal thin film on an essentially smooth sub

대표청구항

A three-dimensional microelectrode of an electrically conductive polymer comprising polyaniline having a continuous surface comprising a well organized array of multiple micron or submicron substantially identical micro protrusions wherein each protrusion has a height of between about 0.3 and 50 mic

이 특허를 인용한 특허 (59)

  1. Baldwin, Teresa; Kennedy, Joseph; Iwamoto, Nancy; Nakano, Tadashi; Bedwell, William; Stuck, Jason; Suedemeyer, Arlene; Hebert, Mello, Anti-reflective coating for photolithography and methods of preparation thereof.
  2. Mukhopadhyay, Sudip; Pandey, Yamini; Dankers, Lea, Anti-reflective coatings for optically transparent substrates.
  3. Mukhopadhyay, Sudip; Pandey, Yamini; Dankers, Lea, Anti-reflective coatings for optically transparent substrates.
  4. Li, Bo; Kennedy, Joseph; Iwamoto, Nancy; Fradkin, Mark A.; Hussein, Makarem A.; Goodner, Michael D.; Lu, Victor; Leung, Roger, Antireflective coatings for via fill and photolithography applications and methods of preparation thereof.
  5. Li, Bo; Kennedy, Joseph; Iwamoto, Nancy; Lu, Victor; Leung, Roger; Fradkin, Mark A.; Hussein, Makarem A.; Goodner, Michael D., Antireflective coatings for via fill and photolithography applications and methods of preparation thereof.
  6. Johnson Lonnie G. ; Baxley John M. ; Shankle Scott ; Matthews Jeffrey Shane, Apparatus for extracting plasticizer.
  7. Xing, Wanli; Yu, Zhe; Xiang, Guangxin; Pan, Liangbin; Cheng, Jing, Apparatus for stimulating an animal cell and recording its physiological signal and production and use methods thereof.
  8. Basra, Vijay K.; Neumann, Lawrence G., Castellation technique for improved lift-off of photoresist in thin-film device processing and a thin-film device made thereby.
  9. Kennedy, Joseph; Stuck, Jason, Coating composition optimization for via fill and photolithography applications and methods of preparation thereof.
  10. Varaprasad, Desaraju; Korolev, Boris; Mukhopadhyay, Sudip, Coating formulations for optical elements.
  11. Kennedy, Joseph; Xie, Songyuan; Do, Kim; Mukhopadhyay, Sudip, Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof.
  12. Bhanwar Singh ; Ramkumar Subramanian ; Bharath Rangarajan, Conducting electron beam resist thin film layer for patterning of mask plates.
  13. Singh Bhanwar ; Choo Bryan K. ; Subramanian Ramkumar, Conductive photoresist pattern for long term calibration of scanning electron microscope.
  14. Stachoviak Timothy J. ; Nestler Joseph P. ; Schneider Daniel A. ; Craanen Shirley A. ; Lawrence Amy K., Current collector manufacture by arc spray deposition.
  15. Zhang, Hongmei; Demaray, Richard E., Deposition of LiCoO2.
  16. Madou, Marc J.; Daunert, Sylvia, Dual stage microvalve and method of use.
  17. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
  18. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
  19. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
  20. Snyder, Shawn W.; Neudecker, Bernd J., Electrochemical apparatus with barrier layer protected substrate.
  21. Giraud Andre (Levallois-Perret FRX), Electrochromic light modulation devices, in particular screens and display units.
  22. Vyas, Gayatri; Swathirajan, Swathy; Cheng, Yang T.; Mikhail, Youssef M., Electrode and membrane-electrode assemblies for electrochemical cells.
  23. Shy Shyi-Long,TWX, Electron beam imaging method using conducting polyaniline material.
  24. Brantner, Paul C., Energy device with integral collector surface for electromagnetic energy harvesting and method thereof.
  25. Brantner, Paul C., Energy device with integral conductive surface for data communication via electromagnetic energy and method thereof.
  26. Keating, Joseph A.; Bradow, Timothy N.; Johnson, Raymond R.; Narayan, Prativadi B., Environmentally-powered wireless sensor module.
  27. Lee, Jang-Sik; Cho, Jinhan; Lee, Jaegab, Floating gate having multiple charge storing layers, method of fabricating the floating gate, non-volatile memory device using the same, and fabricating method thereof.
  28. Lee, Jang-Sik; Cho, Jinhan; Lee, Jaegab, Floating gate having multiple charge storing layers, method of fabricating the floating gate, non-volatile memory device using the same, and fabricating method thereof.
  29. Schulman, Joseph H.; Jiang, Guangqiang; Byers, Charles L., Hermetically sealed three-dimensional electrode array.
  30. Neudecker, Bernd J.; Snyder, Shawn W., Hybrid thin-film battery.
  31. Neudecker, Bernd J.; Snyder, Shawn W., Hybrid thin-film battery.
  32. Snyder, Shawn W.; Brantner, Paul C.; Zoetewey, Henry L., Masking of and material constraint for depositing battery layers on flexible substrates.
  33. Snyder, Shawn W.; Neudecker, Bernd J.; Brantner, Paul C., Metal film encapsulation.
  34. Snyder, Shawn W.; Neudecker, Bernd J.; Brantner, Paul C., Metal film encapsulation.
  35. Neudecker, Bernd J.; Whitacre, Jay F., Method for sputter targets for electrolyte films.
  36. Imamura Takahiro,JPX ; Katayama Masaki,JPX, Method of electroplating and electrodeposit structure.
  37. Braun, Paul V.; Ning, Hailong; Arpin, Kevin A., Method of fabricating a three-dimensional (3D) porous electrode architecture for a microbattery.
  38. Dravid, Vinayak P.; Donthu, Suresh K.; Pan, Zixiao, Method of making nanopatterns and nanostructures and nanopatterned functional oxide materials.
  39. Chung, Kenneth K.; Brennan, Anthony B.; Spiecker, Mark McCullough; Stoneberg, Ryan; Thielman, Walter Scott; Reddy, Shravanthi, Method of manufacturing catheter for antimicrobial control.
  40. Chung, Kenneth K.; Brennan, Anthony B.; Bagan, Joseph W.; Spiecker, Mark M., Method of patterning a surface and articles comprising the same.
  41. Lee, Hyoyoung; Lee, Junghyun; Koo, Ja Ryong; Jung, Mi Hee, Molecular electronic device including electrode having conductive polymer electrode layer.
  42. Brantner, Paul C.; Keating, Joseph A.; Johnson, Raymond R.; Bradow, Timothy N.; Narayan, Prativadi B.; Neudecker, Bernd J., Passive over/under voltage control and protection for energy storage devices associated with energy harvesting.
  43. Neudecker, Bernd J.; Keating, Joseph A., Printed circuit board with integrated thin film battery.
  44. Neudecker, Bernd J.; Keating, Joseph A., Printed circuit board with integrated thin film battery.
  45. Tagge,Christopher D.; Wilson, Jr.,Robert B.; Oh,Seajin; Hirschon,Albert S., Reaction calorimeter and differential scanning calorimeter for the high-throughput synthesis, screening and characterization of combinatorial libraries.
  46. Snyder, Shawn W.; Brantner, Paul C.; Keating, Joseph A.; Bradow, Timothy N.; Narayan, Prativadi B.; Neudecker, Bernd J., Robust metal film encapsulation.
  47. Kennedy, Joseph T.; Baldwin-Hendricks, Teresa, Spin-on anti-reflective coatings for photolithography.
  48. Kennedy, Joseph; Baldwin, Teresa; Hacker, Nigel P.; Spear, Richard, Spin-on-glass anti-reflective coatings for photolithography.
  49. Neudecker, Bernd J.; Milonopoulou, Vassiliki, Sputtering target of Li3PO4 and method for producing same.
  50. Greene, Richard M.; Daum, Michael, Stereolithography printer.
  51. Brennan, Anthony B.; Baney, Ronald Howard; Turnage, Michelle Carman; Estes, Thomas G.; Feinberg, Adam W.; Wilson, Leslie H.; Schumacher, James Frederick, Surface topographies for non-toxic bioadhesion control.
  52. Brennan, Anthony B.; Long, Christopher James; Bagan, Joseph W.; Schumacher, James Frederick; Spiecker, Mark M., Surface topographies for non-toxic bioadhesion control.
  53. Johnson, Raymond R.; Snyder, Shawn W.; Brantner, Paul C.; Bradow, Timothy J.; Neudecker, Bernd J., Thin film battery on an integrated circuit or circuit board and method thereof.
  54. Neudecker, Bernd J., Thin film electrolyte for thin film batteries.
  55. Neudecker, Bernd J.; Snyder, Shawn W., Thin film encapsulation for thin film batteries and other devices.
  56. Neudecker, Bernd J.; Snyder, Shawn W., Thin film encapsulation for thin film batteries and other devices.
  57. Kamijima, Akifumi, Thin-film patterning method, manufacturing method of thin-film device and manufacturing method of thin-film magnetic head.
  58. Demaray, Richard E.; Narasimhan, Mukundan, Transparent conductive oxides.
  59. Tagge, Christopher D.; Wilson, Jr., Robert B.; Oh, Seajin; Hirschon, Albert S; Ploeger, Dale W., Viscosity and mass sensor for the high-throughput synthesis, screening and characterization of combinatorial libraries.
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